Positive-type resist composition, method for forming resist pattern, photo-reactive quencher, and polymeric compound
US-2016376233-A1 · Dec 29, 2016 · US
US9644059B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9644059-B2 |
| Application number | US-201615130165-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 15, 2016 |
| Priority date | Aug 10, 2011 |
| Publication date | May 9, 2017 |
| Grant date | May 9, 2017 |
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Anhydrosugar-based monomers prepared from isosorbide, isomannide, and isoidide and resin systems containing these anhydrosugar-based monomers that are partially to fully bio-based, which may produce materials having properties that meet or exceed the properties of similar petroleum derived vinyl ester resins.
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What is claimed is: 1. A polymerizable monomer selected from the group consisting of: 2. A polymerizable monomer as claimed in claim 1 , wherein the monomer is: 3. A polymerizable monomer as claimed in claim 1 , wherein the monomer is: 4. A method for producing a polymerizable monomer comprising the step of acylating one or more hydroxyl groups of an anhydrosugar using acrylic anhydride or methacrylic anhydride and a base catalyst in an aprotic solvent, wherein the anhydrosugar is selected from the group consisting of: isosorbide, isomannide, and isoidide. 5. The method of claim 4 , wherein the one or more hydroxyl groups of the anhydrosugar are acylated using methacrylic anhydride and the base catalyst in the aprotic solvent. 6. A copolymer formed by curing a curable composition comprising at least one monomer selected from the group consisting of the polymerizable monomers of claim 1 using a free-radical initiator. 7. The copolymer of claim 6 , wherein the curable composition comprises at least one vinyl ester resin monomer and/or at least one unsaturated polyester monomer. 8. The copolymer of claim 7 , wherein the curable composition further comprises at least one reactive diluent. 9. The copolymer of claim 7 , wherein the curable composition comprises 1-99% by weight of at least one monomer selected from the group consisting of the polymerizable monomers of claim 1 , 1-70% by weight of vinyl ester resin monomer and/or unsaturated polyester monomer and 0-60% by weight of at least one reactive diluent. 10. The copolymer of claim 7 , wherein the curable composition comprises 5-95% by weight of at least one monomer selected from the group consisting of the polymerizable monomers of claim 1 , 10-55% by weight of vinyl ester resin monomer and/or unsaturated polyester monomer and 0-50% by weight of at least one reactive diluent. 11. The copolymer of claim 8 , wherein the composition comprises 15-90% by weight of at least one monomer selected from the group consisting of the polymerizable monomers of claim 1 , 10-55% by weight of vinyl ester resin monomer and/or unsaturated polyester monomer and 5-45% by weight of at least one reactive diluent. 12. The copolymer of claim 7 , comprising a vinyl ester resin monomer selected from the group consisting of (meth)acrylated glycidyl ethers of bisphenols, (meth)acrylated ethoxylated bisphenols and novolac vinyl esters. 13. The copolymer of claim 7 , comprising a vinyl ester monomer selected from the group consisting of: bisphenol A, hexafluorobisphenol A, bisphenol E, bisphenol F, tetramethyl bisphenol E, tetramethyl bisphenol F, bisphenol M, bisphenol C, bisphenol P and bisphenol Z. 14. The copolymer of claim 13 , wherein the curable composition further comprises a reactive diluent selected from the group consisting of: styrene, 2-hydroxymethacrylate, methyl methacrylate, methyl acrylate, furfuryl methacrylate, methacyrlated lauric acid and methacrylated fatty acids. 15. The copolymer of claim 14 , wherein the monomer of claim 1 is selected from a monomer of the formula 2 and a monomer of the formula 2a. 16. The copolymer of claim 7 , wherein the curable composition comprises an unsaturated polyester monomer made from one or more of the following components: phthalic acid, terephtalic acid, m-phthalic acid, suberic acid, adipic acid, succinic acid, maleic acid, fumaric acid, butylene glycol, propylene glycol, and ethylene glycol. 17. The copolymer of claim 16 , wherein the curable composition further comprises a reactive diluent selected from the group consisting of: styrene, 2-hydroxymethacrylate, methyl methacrylate, methyl acrylate, furfuryl methacrylate, methacyrlated lauric acid and methacrylated fatty acids. 18. The copolymer of claim 17 , wherein the monomer of claim 1 is selected from a monomer of the formula 2 and a monomer of the formula 2a.
and containing two or more oxygen atoms · CPC title
Esters containing oxygen in addition to the carboxy oxygen · CPC title
Ortho-condensed systems · CPC title
Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a heterocyclic ring containing oxygen (cyclic esters of polyfunctional acids C08F118/00; cyclic anhydrides of unsaturated acids C08F120/00, C08F122/00) · CPC title
Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a heterocyclic ring containing oxygen (cyclic esters of polyfunctional acids C08F218/00; cyclic anhydrides of unsaturated acids C08F220/00, C08F222/00) · CPC title
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