Ion source and ion beam device using same

Patent metadata

Field	Value
Publication number	US-9640360-B2
Application number	US-201214351559-A
Country	US
Kind code	B2
Filing date	Oct 10, 2012
Priority date	Oct 12, 2011
Publication date	May 2, 2017
Grant date	May 2, 2017

Abstract

Provided is a charged particle beam microscope which has a small mechanical vibration amplitude of a distal end of an emitter tip, is capable of obtaining an ultra-high resolution sample observation image and removing shaking or the like of the sample observation image. A gas field ion source includes: an emitter tip configured to generate ions; an emitter-base mount configured to support the emitter tip; a mechanism configured to heat the emitter tip; an extraction electrode installed to face the emitter tip; and a mechanism configured to supply a gas to the vicinity of the emitter tip, wherein the emitter tip heating mechanism is a mechanism of heating the emitter tip by electrically conducting a filament connecting at least two terminals, the terminals are connected by a V-shaped filament, an angle of the V shape is an obtuse angle, and the emitter tip is connected to a substantial center of the filament.

First claim

The invention claimed is:

1. A gas field ion source comprising:
an emitter tip configured to generate ions;
an emitter-base mount configured to support the emitter tip;
a mechanism configured to heat the emitter tip;
an extraction electrode installed to face the emitter tip and configured to include an opening allowing the ions to pass therethrough; and
a mechanism configured to supply a gas to the vicinity of the emitter tip,
wherein the emitter tip heating mechanism is a mechanism of heating the emitter tip by electrically conducting a filament which has a shape of a straight line connecting at least two terminals, connection points between the terminals and the filament is connected by the filament at an approximately shortest distance, and the emitter tip is connected to a substantial center of the filament, and
wherein a second wire material connects the at least two terminals and the second wire material and the filament are connected to a base portion of the emitter tip.

2. The gas field ion source according to claim 1 , wherein a substantial central portion of the extraction electrode has a convex structure.

3. The gas field ion source according to claim 1 , wherein the filament is made of manganin.

4. The gas field ion source according to claim 1 , wherein the filament is subjected to ceramic coating.

5. The gas field ion source according to claim 1 , wherein the filament has a structure where localized resistivity of the substantial central portion of the filament is relatively high.

6. A gas field ion source, wherein the gas supplied to the gas field ion source according to claim 1 contains at least one of hydrogen, helium, neon, argon, krypton, and xenon.

7. A gas field ion source, wherein the emitter tip of the gas field ion source according to claim 1 is configured in a shape of a nano-pyramid.

8. The gas field ion source according to claim 7 , wherein a distal end of said emitter tip has 4 or more and less than 10 atoms.

9. The gas field ion source of claim 1 , further comprising a soundproof cover configured to separate spatially a compressor connected to a refrigeration system for cooling an emitter tip of the gas field ion source.

10. The gas field ion source of claim 1 , wherein the natural frequency of an installation structure of the emitter tip is 5000 Hz or more.

11. The gas field ion source according to claim 1 , wherein said gas field ion source is configured to provide a magnification of projection of an ion beam on a sample of at least 0.5 or more.

Assignees

• Hitachi High Tech Corp

Inventors

• Shichi Hiroyasu
• Matsubara Shinichi
• Ose Yoichi
• Kawanami Yoshimi
• Arai Noriaki

Classifications

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title

• H01J2237/0807

  Gas field ion sources [GFIS] · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/0216

  Means for avoiding or correcting vibration effects · CPC title