Multi-rotation epitaxial growth apparatus and reactors incorporating same

Patent metadata

Field	Value
Publication number	US-9637822-B2
Application number	US-90065510-A
Country	US
Kind code	B2
Filing date	Oct 8, 2010
Priority date	Oct 9, 2009
Publication date	May 2, 2017
Grant date	May 2, 2017

Abstract

A susceptor apparatus for use in a CVD reactor includes a main platter with a central gear. The main platter has opposite first and second sides, a central recess formed in the second side, and a plurality of circumferentially spaced-apart pockets formed in the first side. The central gear is positioned within the central recess and the satellite platters are individually rotatable within the respective pockets. Each pocket has a peripheral wall with an opening in communication with the central recess. The central gear teeth extend into each of the pockets via the respective wall openings and engage a planet gear associated with each satellite platter. Rotation of the main platter about its rotational axis causes the satellite platters to rotate about their individual rotational axes.

First claim

That which is claimed is:

1. A susceptor apparatus, comprising:
a rotatable main platter comprising opposite first and second sides, a central recess formed in the second side substantially coaxial with a rotational axis of the main platter, and a plurality of circumferentially spaced-apart pockets formed in the first side;
a central gear positioned within the central recess; and
a plurality of rotatable satellite platters positioned on the main platter and each rotatably secured within a respective pocket, wherein each satellite platter has a wafer support surface on a first side thereof and a planet gear on an opposite second side thereof, wherein each planet gear meshes with the central gear such that rotation of the main platter about its rotational axis causes the satellite platters to rotate within their respective pockets about their individual rotational axes.

2. The susceptor apparatus of claim 1 , wherein each satellite platter wafer support surface is configured to hold one or more wafers.

3. The susceptor apparatus of claim 1 , wherein the wafer support surface of each satellite platter is circumferentially surrounded by a raised peripheral edge portion.

4. The susceptor apparatus of claim 1 , wherein the wafer support surface of each satellite platter is contoured.

5. The susceptor apparatus of claim 1 , further comprising a drive shaft coupled to the main platter such that rotation of the drive shaft causes the main platter to rotate about its rotational axis.

6. The susceptor apparatus of claim 5 , further comprising a drive mechanism coupled to the drive shaft and configured to rotate the drive shaft.

7. The susceptor apparatus of claim 1 , wherein each satellite platter comprises one or more wafer supports rotatably secured within the satellite platter, and wherein rotation of the main platter about its rotational axis causes the satellite platters to rotate about their individual rotational axes and the one or more wafer supports to rotate about their individual rotational axes.

8. The susceptor apparatus of claim 1 , further comprising a coupling extending from the main platter second side along the rotational axis of the main platter, wherein the coupling is configured to receive a free end of a drive shaft therein and to cause the main platter to rotate in response to rotation of the drive shaft.

9. The susceptor apparatus of claim 8 , wherein the central gear comprises a central aperture, and wherein the coupling extends through the central gear central aperture.

10. The susceptor apparatus of claim 9 , wherein the drive shaft is concentrically surrounded by a fixed tube, wherein the tube comprises a free end that engages the central gear aperture when the drive shaft and coupling are engaged, and wherein the tube free end maintains the central gear in a stationary position as the drive shaft rotates the main platter about the main platter rotational axis.

11. The susceptor apparatus of claim 1 , wherein the central gear is removably retained within the central recess by a plurality of retaining members positioned along a periphery of the central recess.

12. The susceptor apparatus of claim 1 , wherein each pocket includes a spindle post and a first bearing surface, wherein each satellite platter second side includes a spindle recess and a second bearing surface, wherein the spindle recess is configured to receive the spindle post therein such that the first and second bearing surfaces engage and such that the satellite platter can rotate about the spindle post.

13. The susceptor apparatus of claim 12 , wherein each pocket includes a pedestal having a free end, wherein the pedestal free end comprises the first bearing surface and wherein the spindle post extends outwardly from the pedestal free end.

14. The susceptor apparatus of claim 1 , wherein each pocket includes a spindle post, and wherein each satellite platter second side includes a spindle recess that receives a spindle post therein such that the satellite platter is rotatably supported by the spindle post.

15. The susceptor apparatus of claim 1 , wherein each pocket has a peripheral wall with an opening in communication with the central recess, and wherein central gear teeth extend into each of the pockets via the respective wall openings.

16. An epitaxial growth reactor, comprising:
a reactor vessel having a wall; and
a susceptor apparatus rotatably disposed within the reactor vessel, wherein the susceptor apparatus comprises:
a rotatable drive shaft extending into the reactor vessel from the wall;
a main platter attached to the rotatable drive shaft, wherein the main platter comprises opposite first and second sides, a central recess formed in the second side substantially coaxial with a rotational axis of the main platter, and a plurality of circumferentially spaced-apart pockets formed in the first side;
a central gear positioned within the central recess; and
a plurality of satellite platters, each rotatably secured within a respective pocket, wherein each satellite platter has a wafer support surface on a first side thereof and a planet gear on an opposite second side thereof, wherein each planet gear meshes with the central gear such that rotation of the main platter about its rotational axis via the drive shaft causes the satellite platters to rotate within their respective pockets about individual rotational axes.

17. The epitaxial growth reactor of claim 16 , further comprising a tube concentrically surrounding the drive shaft in spaced-apart relationship, wherein the tube is secured at one end to the reactor vessel wall and at an opposite end to the central gear, and wherein the tube maintains the central gear in a stationary position as the drive shaft rotates the main platter about the main platter rotational axis.

18. The epitaxial growth reactor of claim 16 , wherein each pocket includes a spindle post and a first bearing surface, wherein each satellite platter second side includes a spindle recess and a second bearing surface, wherein the spindle recess is configured to receive the spindle post therein such that the first and second bearing surfaces engage and such that the satellite platter can rotate about the spindle post.

19. The epitaxial growth apparatus of claim 18 , wherein each pocket includes a pedestal having a free end, wherein the pedestal free end comprises the first bearing surface and wherein the spindle post extends outwardly from the pedestal free end.

20. The epitaxial growth apparatus of claim 16 , wherein each pocket includes a spindle post, and wherein each satellite platter second side includes a spindle recess that receives a spindle post therein such that the satellite platter is rotatably supported by the spindle post.

21. The epitaxial growth reactor of claim 16 , wherein the wafer support surface is contoured.

22. The epitaxial growth reactor of claim 16 , wherein the wafer support surface of each satellite platter is circumferentially surrounded by a raised peripheral edge portion.

23. The epitaxial growth reactor of claim 16 , wherein each pocket has a peripheral wall with an opening in communication with the central recess, and wherein central gear teeth extend into each of the pockets via the respective wall openings.

24. A wafer support for a susceptor apparatus, comprising a platter having a wafer support surface on a first side thereof and a planet gear on an opposite second side thereof, wherein the platter sec

Assignees

• Bergmann Michael John
• Emerson David Todd
• Seibel David Dean
• Cree Inc

Inventors

• Bergmann Michael John
• Emerson David Todd
• Seibel David Dean

Classifications

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• C30B25/12

  Substrate holders or susceptors · CPC title

• C23C16/4584 Primary

  the substrate being rotated · CPC title

• H01L21/68771

  Electricity · mapped topic