Membrane transducer structures and methods of manufacturing same using thin-film encapsulation

Patent metadata

Field	Value
Publication number	US-9637371-B2
Application number	US-201414532675-A
Country	US
Kind code	B2
Filing date	Nov 4, 2014
Priority date	Jul 25, 2014
Publication date	May 2, 2017
Grant date	May 2, 2017

Abstract

Membrane transducer structures and thin-film encapsulation methods for manufacturing the same are provided. In one example, the thin film encapsulation methods may be implemented to co-integrate processes for thin-film encapsulation and formation of microelectronic devices and microelectromechanical systems (MEMS) that include the membrane transducers.

First claim

What is claimed is:

1. A microshell membrane transducer structure, comprising:
a MEMS region dispose over a substrate, the MEMS region including a MEMS structural layer defining at least one lower transducer capacitor plate;
a flexible portion of an upper microshell layer disposed over the lower transducer capacitor plate, the flexible portion of the upper microshell layer configured as a flexible transducer membrane disposed over the underlying lower transducer capacitor plate;
a cavity or open area being defined between the flexible transducer membrane and the lower transducer capacitor plate; and
one or more upper release holes in the upper microshell layer;
where the flexible portion of the upper microshell layer further comprises one or more out-of-plane decoupling structures disposed around an in-plane central portion of the flexible transducer membrane, an open area defined under each of the out-of-plane decoupling structures that is contiguous with a cavity or open area defined between the in-plane central portion of the flexible transducer membrane and the lower transducer capacitor plate.

2. The structure of claim 1 , where the lower transducer capacitor plate is a released MEMS device with an open area defined beneath the lower transducer capacitor plate and above the substrate.

3. The structure of claim 1 , further comprising a sealing layer disposed on the upper microshell layer that seals the upper release holes in the upper microshell layer.

4. The structure of claim 3 , further comprising a transducer opening defined in the sealing layer above the flexible transducer membrane, an upper surface of the flexible transducer membrane being exposed to an ambient environment above the flexible membrane transducer through the transducer opening.

5. The structure of claim 1 , further comprising an integrated circuit (IC) region disposed between the MEMS region and the underlying substrate, the IC region including integrated circuitry; multiple conductive vias extending between the MEMS structural layer and the integrated circuitry of the IC region; one or more lower transducer contacts that electrically couple the lower transducer capacitor plate to a first portion of the integrated circuitry of the IC region through one or more of the conductive vias; and one or more membrane transducer contacts that electrically couple the membrane transducer to a second portion of the integrated circuitry of the IC region through one or more of the conductive vias.

6. The structure of claim 1 , where the out-of-plane decoupling structures comprise upwardly extending hinge structures.

7. The structure of claim 1 , where the external stimulus comprises varying pressure.

8. The structure of claim 7 , where the transducer opening is defined in the sealing layer above the flexible transducer membrane in an aligned position over the flexible transducer membrane.

9. A microshell membrane transducer structure, comprising:
a MEMS region dispose over a substrate, the MEMS region including a MEMS structural layer defining at least one lower transducer capacitor plate;
a flexible portion of an upper microshell layer disposed over the lower transducer capacitor plate, the flexible portion of the upper microshell layer configured as a flexible transducer membrane disposed over the underlying lower transducer capacitor plate;
a cavity or open area being defined between the flexible transducer membrane and the lower transducer capacitor plate; and
one or more upper release holes in the upper microshell layer;
where the flexible portion of the upper microshell layer is configured to flex closer and further away from lower transducer capacitor plate due to external stimulus.

10. A microshell membrane transducer structure, comprising:
a MEMS region dispose over a substrate, the MEMS region including a MEMS structural layer defining at least one lower transducer capacitor plate;
a flexible portion of an upper microshell layer disposed over the lower transducer capacitor plate, the flexible portion of the upper microshell layer configured as a flexible transducer membrane disposed over the underlying lower transducer capacitor plate;
a cavity or open area being defined between the flexible transducer membrane and the lower transducer capacitor plate; and
one or more upper release holes in the upper microshell layer;
where the flexible portion of the upper microshell layer further comprises one or more out-of-plane decoupling structures disposed around an in-plane central portion of the flexible transducer membrane, an open area defined under each of the out-of-plane decoupling structures that is contiguous with a cavity or open area defined between the in-plane central portion of the flexible transducer membrane and the lower transducer capacitor plate;
where the flexible portion of the upper microshell layer is configured to flex closer and further away from lower transducer capacitor plate due to external stimulus.

Assignees

• Semiconductor Mfg Int Shanghai Corp

Inventors

• Quevy Emmanuel P
• Hui Jeremy R
• Low Carrie Wing-Zin

Classifications

• B81C1/00285

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81C1/0038

  Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373 · CPC title

• B81C2203/0136

  Growing or depositing of a covering layer · CPC title

• B81B2201/0214

  Biosensors; Chemical sensors · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title