Sensor using sensing mechanism having combined static charge and field effect transistor

Patent metadata

Field	Value
Publication number	US-9634153-B2
Application number	US-201314399279-A
Country	US
Kind code	B2
Filing date	Apr 30, 2013
Priority date	May 11, 2012
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

The present invention relates to a sensor that uses a sensing mechanism having a combined static charge and a field effect transistor, the sensor including: a substrate; source and drain units formed on the substrate and separated from each other; a channel unit interposed between the source and drain units; a membrane separated from the channel unit, disposed on a top portion and displaced in response to an external signal; and a static charge member formed on a bottom surface of the membrane separately from the channel unit and generating an electric field. Accordingly, since the sensor using a sensing mechanism having a combined static charge and a field effect transistor according to an embodiment of the present invention can measure the displacement or movement of the sensor by measuring a change of the electric field of the channel unit of the field effect transistor by using a static member, the electric field can be formed so as to be proportional to an amount of charge and inversely proportional to a squared distance regardless of the intensity and distribution of an external electric field. Therefore, sensitivity is improved without being affected by an external electric field.

First claim

The invention claimed is:

1. A sensor using a sensing mechanism combining an electrostatic unit and an electric field effect transistor, comprising:
a substrate;
a source part and a drain part disposed inside the substrate and separated from each other;
a channel part formed between the source part and the drain part;
a membrane separated from the channel part to be positioned upwardly and reacting to an external signal to generate a displacement;
an electrostatic member formed at a lower surface of the membrane to be separated from the channel part and generating an electric field; and
a shielding member covering and contacting a center portion of the membrane,
wherein a thickness of both ends of the membrane is thicker than the thickness of the center part of the membrane and a center part of the shielding member corresponds to the electrostatic member, and
wherein the electric field of the electrostatic member is configured to affect only the channel part.

2. The sensor of claim 1 , wherein
the channel part and the electrostatic member are positioned to overlap.

3. The sensor of claim 2 , wherein
the source part, the channel part, the drain part, and the electrostatic member form an electric field effect transistor.

4. The sensor of claim 2 , wherein
an insulating part is formed between the channel part and the electrostatic member.

5. The sensor of claim 2 , wherein
the substrate and the membrane are formed of the same material.

Assignees

• Postech Academy-Industry Found

Inventors

• Moon Won Kyu
• West James Edward
• Sung Min
• Je Yub
• Shin Kum Jae

Classifications

• G01L9/008

  using piezoelectric devices (piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025) · CPC title

• G01L9/0072

  using variations in capacitance · CPC title

• H01L41/1132

  Electricity · mapped topic

• H04R23/006

  using solid state devices (solid state devices per se H10) · CPC title

• G01P15/08

  with conversion into electric or magnetic values · CPC title