Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device

Patent metadata

Field	Value
Publication number	US-9633890-B2
Application number	US-201113328212-A
Country	US
Kind code	B2
Filing date	Dec 16, 2011
Priority date	Dec 16, 2011
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

A device for processing wafer-shaped articles comprises a rotary chuck having a series of pins adapted to hold a wafer shaped article on the rotary chuck. Each of the pins comprises a cylindrical body and a projecting gripping portion formed integrally therewith. The cylindrical body and gripping portion are made from a ceramic material. The gripping portion comprises cylindrical surfaces having a common generatrix with surfaces of the cylindrical body.

First claim

What is claimed is:

1. A device for processing a wafer, the device comprising:
a rotary chuck; and
a series of pins disposed on the rotary chuck and adapted to hold the wafer on the rotary chuck,
wherein
each of the pins comprises
a body that is cylindrically-shaped, and
a gripping portion formed integrally with the body and formed of a ceramic material,

the gripping portion comprises a groove, a first section and a second section,
the groove is configured to receive an edge of the wafer,
the first section is at a distal most end of the pin and includes a first portion of the groove,
the second section is at a distal most end of the body and includes a second portion of the groove,
the gripping portion comprises a first surface having a common generatrix with a second surface of the body,
the second surface is cylindrically-shaped,
the groove comprises a first sloped region extending from a radially innermost portion of the groove to the second surface of the body, and
each of the pins further includes a second sloped region distinct from the first sloped region and extending from the second surface of the body to the first section of the gripping portion and the first sloped region.

2. The device according to claim 1 , further comprising:
a plurality of gears,
wherein each of the pins comprises a base portion rigidly mounted in one of the plurality of gears via a respective fastener; and
a ring gear in meshing engagement with each of the plurality of gears to drive the pins in unison, wherein the ring gear rotates the plurality of gears and as a result the pins between corresponding angular positions.

3. The device according to claim 2 , wherein each of said the plurality of gears is formed of metal or a thermally resistant and chemically inert plastic material.

4. The device according to claim 1 , wherein the ceramic material includes at least one of Al 2 O 3 , Y 2 O 3 , SiC, Si 3 N 4 , AlN, cordierite (2MgO·2Al 2 O 3 ·5SiO 2 ) zirconia (ZrO 2 ), or quartz (SiO 2 ).

5. The device according to claim 1 , wherein the pins are configured to rotate about respective central axes of the bodies of the pins.

6. The device according to claim 1 , wherein the first surfaces of the gripping portions extend over 45° to 270° of respective circumferences of the bodies of the pins.

7. The device according to claim 1 , wherein:
the grooves extend radially inward from a respective one of the second surfaces of the bodies; and
each of the grooves are dimensioned to receive and engage the edge of the wafer, where the edge of the wafer has a thickness of 500 to 1,000 microns.

8. The device according to claim 1 , wherein:
the gripping portions, in an end view of the pins, do not extend over more than two thirds of respective distal ends of the bodies of the pins; and
the rotary chuck is configured to facilitate release of the wafer from the gripping portions as the first surfaces of the gripping portions are moved radially outward of an axis of rotation of the rotary chuck by rotation of the bodies of the pins about respective axes of the pins.

9. The device according to claim 1 , wherein the rotary chuck is adapted to be driven via a magnetic bearing and without mechanical actuation and contact with the rotary chuck.

10. The device according to claim 1 , wherein:
the first surfaces of the gripping portions adjoin respective radially inwardly extending surfaces of the grooves;
the radially inward extending surfaces of the grooves adjoin radially innermost surfaces of the grooves;
the edge of the wafer comprises a radially outward facing surface; and
the innermost surfaces of the grooves are adapted to engage only the radially outward facing surface of the wafer.

11. The device according to claim 1 , wherein each of the gripping portions has no plane of symmetry that is parallel to a central axis of a corresponding one of the bodies of the pins.

12. The device according to claim 1 , wherein widths of the grooves decrease circumferentially from first ends of the grooves to second ends of the grooves.

13. The device according to claim 12 , wherein:
each of the pins are configured to be rotated between a first position and a second position;
while in the first position, the grooves receive or release the wafer at the first end of the groove;
while in the second position, the grooves grip the wafer via the second end of the groove; and
the pins are rotated between the first positions and the second positions to release and grip the wafer.

14. A system comprising:
the device of claim 1 ; and
a closed process chamber containing the rotary chuck.

15. A gripping pin for use in a device that processes a wafer, the gripping pin comprising:
a body, wherein the body is cylindrically-shaped;
a gripping portion formed integrally with the body,
wherein
the gripping portion is formed of a ceramic material,
the gripping portion comprises a first cylindrically-shaped surface having a common generatrix with a second cylindrically-shaped surface of the body,
the gripping portion comprises a groove,
a width of the groove decreases circumferentially from a first end of the groove to a second end of the groove,
the pin is configured to be rotated between a first position and a second position,
while in the first position, the groove receives or releases the wafer at the first end of the groove,
while in the second position, the groove grips the wafer via the second end of the groove, and
the pin is rotated between the first position and the second position to release and grip the wafer; and

a first sloped region extending between the body and the gripping portion.

16. The gripping pin according to claim 15 , further comprising a gear and a fastener, wherein:
the gear is attached to a base portion of the gripping pin via the fastener; and
the gear is formed of metal or a thermally resistant and chemically inert plastic material.

17. The gripping pin according to claim 15 , wherein the gripping portion, in an end view of the gripping pin, does not extend radially outward of the body and does not extend over more than two thirds of a distal end of the body.

18. The gripping pin of claim 15 , wherein:
the groove comprises a second sloped region;
the second sloped region extends from the body to a radially innermost surface of the groove; and
the first sloped region is distinct from the second sloped region and extends from the body to the second sloped region.

Assignees

• Tschinderle Ulrich
• Gleissner Andreas
• Wirnsberger Thomas
• Kumnig Franz
• Obweger Rainer
• Lam Res Ag

Inventors

• Tschinderle Ulrich
• Gleissner Andreas
• Wirnsberger Thomas
• Kumnig Franz
• Obweger Rainer

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/7608 Primary

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• Y10T279/17213

  Transversely oscillating jaws · CPC title

• H01L21/67051

  Electricity · mapped topic