Implant profiling with resist

Patent metadata

Field	Value
Publication number	US-9633849-B2
Application number	US-201615093867-A
Country	US
Kind code	B2
Filing date	Apr 8, 2016
Priority date	Dec 30, 2013
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

A process for forming at least two different doping levels at the surface of a wafer using one photo resist pattern and implantation process step. A resist layer is developed (but not baked) to form a first resist geometry and a plurality of sublithographic resist geometries. The resist layer is baked causing the sublithographic resist geometries to reflow into a continuous second resist geometry having a thickness less that the first resist geometry. A high energy implant implants dopants through the second resist geometry but not through the first resist geometry. A low energy implant is blocked by both the first and second resist geometries.

First claim

What is claimed is:

1. A process of forming an integrated circuit, comprising the steps:
forming a photoresist layer over a wafer of the integrated circuit;
developing the photoresist layer to form a first photoresist implant blocking geometry on a wafer of the integrated circuit with a greater than or equal to minimum design rule width and with a first thickness and to form a plurality of sublithographic photoresist geometries and a plurality of sublithographic spaces between the sublithographic photoresist geometries on the wafer;
without first baking the photoresist layer at a lower temperature than the reflow temperature of the photoresist, performing a post develop bake at a temperature greater than the reflow temperature of the photoresist causing the sublithographic photoresist geometries and sublithographic spaces to reflow forming a second photoresist implant blocking geometry with a thickness that is less than the first thickness;
implanting a first dopant with a high implant energy wherein the first dopant implant is blocked by the first photoresist implant blocking geometry, is implanted into the wafer through the second resist implant blocking geometry, and is implanted into the wafer where there is no photoresist geometry; and
implanting a second dopant with a low energy wherein the second dopant implant is blocked by the first photoresist implant blocking geometry, is blocked by the second photoresist implant blocking geometry, and is implanted into the wafer where there is no photoresist geometry.

2. The process of claim 1 , wherein the post develop bake is in a temperature range of 100° C. to 160° C. and for a time in the range of 60 sec to 180 sec.

3. The process of claim 1 , wherein the post develop bake is performed at a temperature greater than 10 degrees above the reflow temperature of the photo resist.

4. The process of claim 1 , wherein the first implant forms a well under the second photoresist implant blocking geometry and forms a well in the wafer where there is no photoresist geometry and wherein the second implant dopes the surface of the wafer where there is no photoresist geometry and is blocked from doping the surface by the first and the second photoresist implant blocking geometries.

5. The process of claim 4 , wherein the first implant forms an nwell, wherein a first PMOS transistor with a first turn on voltage is formed in the nwell where there is no photoresist geometry, and wherein a second PMOS transistor with a second turn on voltage is formed in the nwell with the second photoresist implant blocking geometry.

6. The process of claim 4 , wherein the first implant forms a pwell and wherein a first NMOS transistor with a first turn on voltage is formed in the pwell where there is no photoresist geometry and wherein a second NMOS transistor with a second turn on voltage is formed in the pwell with the second photoresist implant blocking geometry.

7. The process of claim 1 , wherein the second photoresist implant blocking geometry adjoins the first photoresist implant blocking geometry next an opening on the wafer with no photoresist geometry and wherein the first implant forms a lightly doped extended drain of a DEMOS transistor under the second photoresist implant blocking geometry and in the opening and wherein the second implant forms a reduced resistance diffusion in the lightly doped extended drain and wherein the second implant is blocked from the border of the lightly doped extended drain under a gate of the DEMOS transistor.

8. The process of claim 7 , wherein the lightly doped extended drain is p-type and the DEMOS transistor is a DEPMOS transistor.

9. The process of claim 7 , wherein the lightly doped extended drain is n-type and the DEMOS transistor is DENMOS.

Assignees

• Texas Instruments Inc

Inventors

• Pendharkar Sameer P
• Hu Binghua

Classifications

• H10P76/20

  of masks comprising organic materials · CPC title

• H10P30/22 Primary

  using masks · CPC title

• H10P14/3822

  Controlling the interface between substrate and epitaxial layer, e.g. by ion implantation followed by annealing · CPC title

• H10P14/61

  using masks · CPC title

• H10P76/2041 Primary

  Photolithographic processes · CPC title