Optical sensor apparatus to detect light based on the refractive index of a sample

Patent metadata

Field	Value
Publication number	US-9632024-B2
Application number	US-201414531327-A
Country	US
Kind code	B2
Filing date	Nov 3, 2014
Priority date	Feb 21, 2012
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

An optical sensor apparatus includes an optically transmissive structure (e.g., a prism) having two planar faces and a third planar face that connects the two planar faces, two or more light sources located outside the structure, and a photodetector array located outside the prism. The structure, light sources, and photodetector array are configured such that light from the light sources that is totally internally reflected at an optical interface between the prism and a sample outside the structure proximate one of the two planar faces is incident on a portion of the photodetector array that depends on a refractive index of the sample. The light sources are positioned with respect to the structure and photodetector array such that the totally internally reflected light from each light source corresponds to a different range of refractive index of the sample and maps to a corresponding portion of the photodetector array.

First claim

What is claimed is:

1. An optical sensor apparatus, comprising:
an optically transmissive light guiding structure having at least three faces;
two or more light sources located outside the optically transmissive light guiding structure; and
a photodetector array located outside the optically transmissive light guiding structure, wherein the optically transmissive light guiding structure, the two or more light sources, and the photodetector array are configured such that light from the two or more light sources that is totally internally reflected at an optical interface between the optically transmissive light guiding structure and a sample outside the optically transmissive light guiding structure proximate one of the faces is incident on a portion of the photodetector array that depends on a refractive index of the sample,
wherein the two or more light sources are positioned with respect to the optically transmissive light guiding structure and photodetector array such that light from each of the two or more light sources that is totally internally reflected at the interface corresponds to a different range of the refractive index of the sample and maps to a corresponding portion of the photodetector array.

2. The apparatus of claim 1 , wherein the two or more light sources are separated from the optically transmissive light guiding structure by a free-space gap.

3. The apparatus of claim 2 , wherein the photodetector array is separated from the optically transmissive light guiding structure by a free-space gap.

4. The apparatus of claim 3 , wherein the two or more light sources are configured such that cones of totally internally reflected light overlap at the photodetector array.

5. The apparatus of claim 3 , wherein the two or more light sources are at first distance from the optically transmissive light guiding structure, the photodetector array is a second distance from the optically transmissive light guiding structure, and the second distance is greater than the first distance.

6. The apparatus of claim 1 , wherein the two or more light sources include two or more common wavelength light sources configured to emit light of a common vacuum wavelength.

7. The apparatus of claim 6 , wherein the two or more light sources include two or more different wavelength light sources each of the different wavelength light sources configured to emit light of a different vacuum wavelength than the common vacuum wavelength.

8. The apparatus of claim 7 , wherein each of the two or more different wavelength light sources is configured to emit light of a different vacuum wavelength than the other different wavelength light sources.

9. The apparatus of claim 8 , wherein a first different wavelength light source of the two or more different wavelength light sources is configured to emit light with an ultraviolet wavelength, and a second different wavelength light source of the two or more different wavelength light sources is configured to emit light with an infrared wavelength.

10. The apparatus of claim 1 , wherein the two or more light sources include two or more different wavelength light sources configured to emit light of different corresponding vacuum wavelengths.

11. The apparatus of claim 10 , further comprising a processor coupled to the photodetector array, wherein the processor is configured to determine an optical dispersion of the sample from a measurement obtained by the photodetector array based on the light from the two or more different wavelength light sources that is totally internally reflected at the interface.

12. The apparatus of claim 11 , wherein the measurement is a sequential measurement and the two or more different wavelength light sources are activated alternately during the sequential measurement.

13. The apparatus of claim 1 , further comprising an optical window attached to a face of the optically transmissive light guiding structure.

14. The apparatus of claim 13 , wherein the optical window has a refractive index that is greater than a refractive index of the optically transmissive light guiding structure.

15. The apparatus of claim 14 , wherein the optically transmissive light guiding structure is formed of a material that is CTE-matched to the optical window.

16. The apparatus of claim 15 , wherein the light guiding structure is borosilicate glass and the optical window is sapphire.

17. The apparatus of claim 15 , wherein the CTE of the optically transmissive light guiding structure is about 1.6 times larger than the CTE of the optical window.

18. The apparatus of claim 1 , wherein the two or more light sources and the photodetector array are coupled to a printed circuit board that is CTE-matched to the optically transmissive light guiding structure.

19. The apparatus of claim 18 , wherein the optically transmissive light guiding structure is made of an optically dense material or an optically transparent material.

20. An optical sensor apparatus, comprising:
an optically transmissive light guiding structure having at least three faces;
two or more common wavelength light sources adjacent a first face of the three faces and configured to emit light of a common vacuum wavelength;
two or more different wavelength light sources adjacent the first face and configured to emit light of different corresponding vacuum wavelengths;
a photodetector array located outside the optically transmissive light guiding structure adjacent the first face, wherein the optically transmissive light guiding structure, the two or more common wavelength light sources, the two or more different wavelength light sources, and the photodetector array are configured such that light from the two or more common wavelength light sources or the two or more different wavelength light sources that is totally internally reflected at an optical interface between the optically transmissive light guiding structure and a sample outside the optically transmissive light guiding structure proximate a second face is incident on a portion of the photodetector array that depends on a refractive index of the sample,
wherein the two or more common wavelength light sources and two or more different wavelength light sources are positioned with respect to the optically transmissive light guiding structure and photodetector array such that light from each of the two or more common wavelength light sources or two or more different wavelength light sources that is totally internally reflected at the interface corresponds to a different range of the refractive index of the sample and maps to a corresponding portion of the photodetector array.

Assignees

• Entegris Inc

Inventors

• Chiarello Ronald
• Pierson Shad
• Wacinski Christopher
• Arbore Mark
• Anoikin Yevgeny

Classifications

• G01N2021/437

  with investigation of angle · CPC title

• G01N21/431 Primary

  Dip refractometers, e.g. using optical fibres · CPC title

• G01N21/553

  and using surface plasmons (fluorescence excitation G01N21/648; enhanced Raman G01N21/658) · CPC title

• G01N2021/434

  Dipping block in contact with sample, e.g. prism · CPC title