Fiducial formation for TEM/STEM tomography tilt-series acquisition and alignment

Patent metadata

Field	Value
Publication number	US-9627176-B2
Application number	US-201614989419-A
Country	US
Kind code	B2
Filing date	Jan 6, 2016
Priority date	Jul 23, 2015
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

Provided are methods to improve tomography by creating fiducial holes using charged particle beams, and using the fiducial holes to improve the sample positioning, acquisition, alignment, reconstruction, and visualization of tomography data sets. Some versions create fiducial holes with an ion beam during the process of milling the sample. Other versions create in situ fiducial holes within the TEM using the electron beam prior to acquiring a tomography data series. In some versions multiple sets of fiducial holes are made, positioned strategically around a region of interest. The fiducial holes may be employed to properly position the features of interest during the acquisition, and later to help better align the tilt-series, and improve the accuracy and resolution of the final reconstruction. The operator or software may identify the holes to be tracked with tomography feature tracking techniques.

First claim

We claim as follows:

1. A method of tomographic analysis of a pillar-shaped sample, comprising:
(a) directing one or more charged particle beams at a sample to shape the sample into a pillar shape for tomography;
(b) positioning the sample in a first position and directing one of the charged particle beams in a dwell operating mode at the sample to create a first fiducial hole in the sample;
(c) after creating the first fiducial hole, positioning the sample for a series of tomographic data scans;
(d) conducting a series of tomographic data scans of the sample; and
(e) based on the position of first fiducial hole in the tomographic data scans, improving the accuracy of tomographic data in the tomographic data scans.

2. The method of claim 1 further comprising positioning the sample in a second position and directing one of the charged particle beams at the sample to create a second fiducial hole in the sample, and wherein the accuracy of the tomographic data is improved based on the position of the first and second fiducial holes in the tomographic data scans.

3. The method of claim 2 wherein shaping the sample for tomography includes using a focused ion beam to form a sample pillar including a region of interest in the sample and wherein the first and second fiducial holes are positioned outside the region of interest, and further comprising positioning the sample in a third position and creating a third fiducial hole with one of the charged particle beams, and positioning the sample in a fourth position and creating a fourth fiducial hole with one of the charged particle beams, the third and fourth fiducial holes positioned outside the region of interest opposite the first and second fiducial holes.

4. The method of claim 2 wherein the first and second fiducial holes are oriented in orthogonal directions.

5. The method of claim 1 in which creating the first fiducial hole is performed in situ in a transmission electron microscope which conducts the series of tomographic data acquisitions.

6. The method of claim 1 wherein the first fiducial hole is formed holding the sample in a tilt tomography holder and the series of tomographic data acquisitions are performed by a transmission electron microscope in the tilt sample holder.

7. The method of claim 1 wherein creating the first fiducial hole includes creating a first hole passing through at least half of the sample along a first direction.

8. The method of claim 7 further comprising positioning the sample in a second position and directing one of the charged particle beams at the sample to create a second fiducial hole in the sample, and wherein the first and second holes pass entirely through the sample in their respective directions.

9. The method of claim 8 wherein the first and second holes are formed along a common plane.

10. The method of claim 1 wherein shaping the sample for tomography includes using a focused ion beam to form a sample pillar including a region of interest in the sample and the series of tomographic data scans is conducted by tilting the sample about the longitudinal axis of the pillar shape and scanning with a transmission electron microscope approximately perpendicularly to the longitudinal axis of the pillar shape.

11. The method of claim 1 wherein improving the accuracy of the tomographic data includes improving tomographic reconstruction by identifying the first fiducial hole to improve the alignment of a data set relative to relying only on cross correlation alignment.

12. The method of claim 1 wherein improving the accuracy of the tomographic data includes identifying the first fiducial hole while positioning the sample in successive ones of the series of tomographic data acquisitions.

13. The method of claim 1 wherein improving the accuracy of the tomographic data includes identifying the first fiducial hole as target features for a feature tracking technique during alignment of the tomographic dataset.

14. A method of analyzing a sample, comprising:
(a) providing a sample in a conical or pillar shape for examination by tomography;
(b) positioning the sample in a charged particle beam system in a first position and directing a charged particle beam at the sample to create a first fiducial;
(c) after creating the first fiducial, positioning the sample in a microscope for a series of tomographic data scans;
(d) conducting a series of tomographic data scans of the sample with the microscope; and
(e) based on the position of first fiducial in the tomographic data scans, aligning data in the tomographic data acquisitions.

15. The method of claim 14 in which directing a charged particle beam at the sample to create a first fiducial comprises directing an electron beam toward the sample.

16. The method of claim 15 in which conducting a series of tomographic data scans of the sample with the microscope comprises conducting a series of tomographic data acquisitions of the sample with an electron microscope.

17. The method of claim 14 further comprising positioning the sample in the charged particle beam system in a second position and directing the charged particle beam at the sample to create a second fiducial, and in which improving the accuracy of the tomographic data is further based on the position of the second fiducial.

18. The method of claim 17 wherein the sample is a pillar having a thickness of less than 200 nm and including a region of interest, and in which the first and second fiducial are holes provided toward a first end of the region of interest, and further including forming third and fourth fiducial holes through the sample toward a second end of the region of interest opposite the first end, and in which improving the accuracy of the tomographic data is further based on the position of the third and fourth fiducial holes.

19. The method of claim 14 in which directing a charged particle beam at the sample to create a first fiducial comprises directing a charged particle beam to form a first hole in the sample.

20. The method of claim 14 in which the sample is formed in a cylindrical pillar shape and the series of tomographic data scans is conducted by tilting the sample about the longitudinal axis of the pillar shape and scanning, with the microscope, approximately perpendicularly to the longitudinal axis of the pillar shape.

21. The method of claim 14 wherein aligning data from the tomographic data includes improving tomographic reconstruction by identifying the first fiducial as a feature to be tracked with a feature tracking algorithm during an alignment procedure of the reconstruction process.

22. The method of claim 14 further comprising identifying the first fiducial while positioning the sample in successive fiducial holes of the series of tomographic data acquisitions to better position the sample.

23. A method of forming a tomographic:
providing a pillar-shaped sample;
after forming the pillar-shaped sample, forming a fiducial on the pillar-shaped sample;
conducting a series of tomographic data scans of the sample with a microscope; and
based on the position of fiducial in the tomographic data scans, aligning data in the tomographic data scans.

24. The method of claim 23 in which forming a fiducial on the pillar-shaped sample comprises forming a hold in the pillar using a charged particle beam.

25. The method of claim 23 in which aligning data in the tomographic data scans comprises aligning

Assignees

• Fei Co

Inventors

• Bouchet-Marquis Cedric
• Zhang Liang
• Pullan Lee

Classifications

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title

• H01J37/3045

  Object or beam position registration · CPC title

• G01N23/22 Primary

  by measuring secondary emission from the material · CPC title

• H01J2237/2611

  Stereoscopic measurements and/or imaging · CPC title