Surface force apparatus based on a spherical lens

Patent metadata

Field	Value
Publication number	US-9625331-B2
Application number	US-201514850146-A
Country	US
Kind code	B2
Filing date	Sep 10, 2015
Priority date	Sep 10, 2015
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

A force detector and method for using the same includes a movable lens having a spherical surface; a cantilever below the movable lens; a laser above the movable lens configured to emit a beam of light through the movable lens, such that light reflects from the spherical surface and the cantilever; a camera configured to capture images of interference rings produced by the light reflected from the spherical surface and the light reflected from the cantilever; and a processor configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.

First claim

What is claimed is:

1. A force detector, comprising:
a movable lens comprising a spherical surface;
a cantilever disposed below the movable lens;
a laser disposed above the movable lens configured to emit a beam of light through the movable lens, such that light reflects from the spherical surface and the cantilever;
a camera configured to capture images of interference rings produced by the light reflected from the spherical surface and the light reflected from the cantilever; and
a processor configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.

2. The force detector of claim 1 , wherein the movable lens is formed from a lens base material and has a coating on the spherical surface formed from a first material to be tested.

3. The force detector of claim 1 , wherein the cantilever comprises a cantilever base material and has a coating formed from a second material to be tested.

4. The force detector of claim 1 , further comprising a motor configured to move the movable lens and to track changes in lens position.

5. The force detector of claim 1 , wherein the processor is further configured to determine a deflection of the cantilever based on a change in lens position and a change in a distance between the movable lens and the cantilever.

6. The force detector of claim 5 , wherein the processor is further configured to determine the change in distance between the movable lens and the cantilever according to

Δ
⁢

⁢
h

=

Δ
⁢

⁢
p

2
⁢
π

⁢

(

λ

2
⁢

n
0

)

,

where Δh is the change in distance, Δp is the change in phase of the interference rings, λ is the wavelength of the emitted light, and n 0 is the index of refraction of the medium between the surface of the lens and the cantilever.

7. The force detector of claim 1 , wherein the spherical surface has a radius of at least 1 cm and a surface roughness of 2 nm or less and wherein the cantilever has a thickness of at least 10 μm.

8. The force detector of claim 1 , wherein the movable lens is in contact with the cantilever and progressively moved away from the cantilever's resting position, such that a force of adhesion causes a deflection in the cantilever and wherein the processor is further configured to repeatedly measure an adhesion force between the movable lens and the cantilever until the cantilever breaks contact with the lens.

9. The force detector of claim 8 , wherein the processor is configured to determine the force of adhesion based on a last measured deflection before the cantilever breaks contact with the movable lens.

10. A force detector, comprising:
a movable lens connected to a motor configured to move the movable lens and to track changes in the lens's position, the movable lens comprising a spherical surface and a transparent coating of a first material to be tested;
a cantilever disposed below the movable lens comprising a coating of a second material to be tested;
a laser disposed above the movable lens configured to emit a beam of light through the movable lens, such that light reflects from the spherical surface and the cantilever;
a camera configured to capture images of interference rings produced by the light reflected from the spherical surface and the light reflected from the cantilever; and
a processor configured to determine a deflection of the cantilever based on the change in lens position and a change in distance between the movable lens and the cantilever measured based on a change in phase of the interference rings and to convert the determined deflection to a force between the lens and the cantilever.

11. A method for force detection, comprising:
emitting a laser beam through a movable lens having a spherical surface to a cantilever positioned below the movable lens, such that light reflects from the spherical surface and the cantilever;
capturing an image of interference rings produced by the light reflected from the spherical surface and the light reflected from the cantilever; and
determining a force between the movable lens and the cantilever with a processor based on a change in a phase of the interference rings.

12. The method of claim 11 , wherein the movable lens is formed from a lens base material and has a coating on the spherical surface formed from a first material to be tested.

13. The method of claim 11 , wherein the cantilever comprises a cantilever base material and has a coating formed from a second material to be tested.

14. The method of claim 11 , further comprising moving the movable lens according to a known position change.

15. The method of claim 11 , wherein determining the force further comprises determining a deflection of the cantilever based on a change in lens position and a change in a distance between the movable lens and the cantilever.

16. The method of claim 15 , wherein determining the force further comprises determining the change in distance between the movable lens and the cantilever according to

Δ
⁢

⁢
h

=

Δ
⁢

⁢
p

2
⁢
π

⁢

(

λ

2
⁢

n
0

)

,

where Δh is the change in distance, Δp is the change in phase of the interference rings, λ is the wavelength of the emitted light, and n 0 is the index of refraction of the medium between the surface of the lens and the cantilever.

17. The method of claim 11 , wherein the spherical surface has a radius of at least 1 cm and a surface rough

Assignees

• IBM

Inventors

• Ellis Arthur W
• Haight Richard A
• Hannon James B
• Tromp Rudolf M

Classifications

• G01L1/24 Primary

  by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis {using infrared, visible light, ultraviolet} · CPC title

• G01B11/161

  by interferometric means · CPC title