Optical meter and use of same

Patent metadata

Field	Value
Publication number	US-9625313-B2
Application number	US-201414313999-A
Country	US
Kind code	B2
Filing date	Jun 24, 2014
Priority date	Jun 26, 2013
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

An optical meter includes a force member to receive a force and a reflector disposed on the force member to receive radiation and to communicate a pressure of the radiation to the force member. The reflector includes a reflective surface, and the force member is configured to be displaced in response to receiving the force comprising the pressure. The optical meter is configured to measure a power of the radiation, an energy of the radiation, or a combination thereof based on the pressure. A process for measuring a property of radiation includes receiving radiation by the reflector, reflecting radiation from the reflective surface, communicating a pressure from the reflector to the force member, and displacing the force member.

First claim

What is claimed is:

1. An optical meter comprising:
a force member to receive a force; and
a reflector disposed on the force member to receive radiation and to communicate a pressure of the radiation to the force member, the reflector comprising a reflective surface,
wherein the force member is displaced in response to receiving the force comprising the pressure, and
the optical meter measures:
a power of the radiation, an energy of the radiation, or a combination comprising at least one of the foregoing, based on the pressure; and
a mass of a reference mass as a direct-load balance in response to receiving the reference mass on the reflector, and

wherein the optical meter is calibrated to the mass of the reference mass, and the optical meter maintains calibration to the mass of the reference mass when the optical meter measures the radiation in a horizontal orientation as well as a vertical orientation of the reflector.

2. The optical meter of claim 1 , further comprising a thermal barrier interposed between the force member and the reflector.

3. The optical meter of claim 1 , wherein the reflective surface is perpendicular to a direction of propagation of the radiation.

4. The optical meter of claim 1 , wherein the reflective surface is at an oblique angle to a direction of propagation of the radiation.

5. The optical meter of claim 1 , wherein the force member is displaced in a horizontal direction in response to receipt of the radiation.

6. The optical meter of claim 1 , wherein the optical meter receives the reference mass, and the force member is displaced in a vertical direction in response to receipt of the reference mass by the optical meter.

7. The optical meter of claim 1 , wherein the reflector further comprises a substrate interposed between the reflective surface and the force member.

8. The optical meter of claim 1 , wherein a size of the optical meter is less than or equal to 18 cubic decimeters (dm 3 ).

9. The optical meter of claim 1 , wherein the reflector comprises a reflectance greater than or equal to 0.99 at a wavelength of the radiation.

10. The optical meter of claim 1 , wherein the optical meter is configured to measure a power of the radiation for a temperature change of the optical meter that is less than or equal to 0.1 Kelvin.

11. The optical meter of claim 1 , wherein the power is greater than or equal to 100 kilowatts (kW).

12. The optical meter of claim 1 , wherein the power is from 1 mW to 200 kW.

13. The optical meter of claim 1 , wherein the energy is greater than or equal to 25 kilo Joules (kJ).

14. The optical meter of claim 1 , wherein the force is greater than or equal to 90 nanoNewtons (nN).

15. The optical meter of claim 1 , wherein the radiation comprises a wavelength from 250 nm to 10 μm.

16. The optical meter of claim 1 , wherein the radiation comprises a beam having a transverse cross-sectional diameter greater than or equal to 2 cm.

17. The optical meter of claim 1 , wherein a time response of the optical meter is less than or equal 2 seconds.

18. An optical meter system comprising:
an optical meter comprising:
a direct-load balance comprising:
a force member; and
a restoring force system in electromagnetic communication with the force member;

a reflector disposed on the force member to receive radiation, to receive a reference mass, and to communicate a pressure of the radiation to the force member, the reflector comprising a reflective surface; and
a thermal barrier interposed between the force member and the reflector; and

a housing in which the optical meter is disposed; the housing comprising:
a baffle,
an insulator to thermally insulate the optical meter,
an optical window to communicate the radiation to the reflector, or
a combination comprising at least one of the foregoing,

wherein the force member is displaced in response to receiving the force comprising the pressure, and
the optical meter is configured to measure:
a power of the radiation, an energy of the radiation, or a combination comprising at least one of the foregoing, based on the pressure; and
a mass of a reference mass as the direct-load balance in response to receiving the reference mass on the reflector, and

wherein the optical meter is calibrated to the mass of the reference mass, and the optical meter maintains calibration to the mass of the reference mass when the optical meter measures the radiation in a horizontal orientation as well as a vertical orientation of the reflector.

19. A process for measuring a property of radiation, the process comprising:
subjecting an optical meter to radiation, the optical meter comprising:
a force member; and
a reflector disposed on the force member and comprising a reflective surface;

receiving the radiation by the reflector;
reflecting the radiation from the reflective surface;
communicating a pressure of the radiation from the reflector to the force member;
displacing the force member in response to receiving the force comprising the pressure to measure the property of the radiation; and
receiving a reference mass by the reflector;
displacing the reflector and the force member in response to receiving the reference mass by the reflector; and
displacing the force member in response to receiving the force comprising the pressure to measure a mass of the reference mass,
wherein the property of the radiation comprises a power of the radiation, an energy of the radiation, or a combination comprising at least one of the foregoing, based on the pressure, and

wherein the optical meter is calibrated to the mass of the reference mass, and the optical meter maintains calibration to the mass of the reference mass when the optical meter measures the radiation in a horizontal orientation as well as a vertical orientation of the reflector.

20. The process of claim 19 , further comprising:
comparing the power to:
a reference power produced by a reference force,
the mass of the reference mass, or a combination comprising at least one of the foregoing to determine a correction factor; and

determining an absolute optical power of the radiation from the power and the correction factor.

Assignees

• Nat Inst Of Standards & Tech
• Us Commerce
• Scientech Incorporated

Inventors

• Lehman John
• Williams Paul
• Lee Robert
• Maring Frank

Classifications

• G01J1/56 Primary

  using radiation pressure or radiometer effect · CPC title