Device and method for detecting energy beam

Patent metadata

Field	Value
Publication number	US-11709098-B2
Application number	US-202117381544-A
Country	US
Kind code	B2
Filing date	Jul 21, 2021
Priority date	Jun 16, 2021
Publication date	Jul 25, 2023
Grant date	Jul 25, 2023

Abstract

A device for detecting energy beam is provided. The device comprises a carbon nanotube structure, a support structure and an infrared detector. The carbon nanotube structure comprises a plurality of carbon nanotubes, and an extending direction of each carbon nanotube is parallel to a direction of an energy beam to be detected. The support structure is configured to support the carbon nanotube structure, and make a portion of the carbon nanotube structure suspended in the air. The infrared detector is located below and spaced apart from the carbon nanotube structure. The infrared detector is configured to detect a temperature of a suspended portion of the carbon nanotube structure, and image according to a temperature distribution of the carbon nanotube structure. A method for detecting energy beam is also provided.

First claim

What is claimed is:

1. A device for detecting energy beam comprising:
a carbon nanotube structure comprising a plurality of carbon nanotubes, wherein an extending direction of each carbon nanotube of the plurality of carbon nanotubes is substantially parallel to each other;
a support structure supporting the carbon nanotube structure, wherein a portion of the carbon nanotube structure is suspended between the support structure, and the extending direction of each carbon nanotube is substantially perpendicular to the substrate structure; and
an infrared detector on one side of a suspended portion of the carbon nanotube structure and spaced apart from the carbon nanotube structure, wherein the infrared detector is configured to detect a temperature of the suspended portion of the carbon nanotube structure, to obtain a temperature distribution of the carbon nanotube structure, and produce an image according to the temperature distribution of the carbon nanotube structure.

2. The device of claim 1 , wherein the carbon nanotube structure is a carbon nanotube array.

3. The device of claim 1 , wherein the carbon nanotube structure comprises a plurality of carbon nanotube arrays stacked with each other.

4. The device of claim 1 , wherein the plurality of carbon nanotubes are staggered arranged in a direction parallel to the extending direction of each carbon nanotube of the plurality of carbon nanotubes.

5. The device of claim 1 , wherein the carbon nanotube structure is a super-aligned carbon nanotube array or a plurality of super-aligned carbon nanotube arrays stacked with each other.

6. The device of claim 1 , wherein a thickness of the carbon nanotube structure in the extending direction ranges from 200 micrometers to 400 micrometers.

7. The device of claim 1 , wherein the carbon nanotube structure is supported by the support structure at edge points of the carbon nanotube structure.

8. The device of claim 7 , wherein the support structure is a hollow frame, or a plurality of columns arranged at intervals.

9. The device of claim 1 , wherein a material of the support structure is a heat insulating material.

10. The device of claim 1 , wherein the infrared detector comprises:
an infrared probe detecting an infrared heat radiation and convert the detected infrared heat radiation into electrical signals;
a signal processor processing the electrical signals to form an image; and
an image display displaying the image.

11. The device of claim 10 , wherein the infrared detector is an infrared thermal imager.

12. The device of claim 1 , wherein the energy beam is an electron beam or a light beam.

13. A method for detecting energy beam comprising:
step S1, providing a device for detecting energy beam comprising:
a carbon nanotube structure comprising a plurality of carbon nanotubes, wherein an extending direction of each carbon nanotube of the plurality of carbon nanotubes is substantially parallel to each other;
a support structure supporting the carbon nanotube structure, wherein a portion of the carbon nanotube structure is suspended between the support structure, and the extending direction of each carbon nanotube is substantially perpendicular to the substrate; and
an infrared detector on one side of the suspended portion of the carbon nanotube and spaced apart from the carbon nanotube structure, wherein the infrared detector is configured to detect a temperature of the suspended portion of the carbon nanotube structure, to obtain a temperature distribution of the carbon nanotube structure, and produce an image according to the temperature distribution of the carbon nanotube structure;

step S2, placing the suspended portion of the carbon nanotube structure on a projectile of an energy beam; and
step S3, producing an image of a temperature distribution of the carbon nanotube structure, thereby obtaining an image or a movement track of beam spots of the energy beam projected on the device.

14. The method of claim 13 , wherein the carbon nanotube structure is a super-aligned carbon nanotube array or comprises a plurality of super-aligned carbon nanotube arrays stacked with each other.

15. The method of claim 13 , wherein a thickness of the carbon nanotube structure in the extending direction ranges from 200 micrometers to 400 micrometers.

16. The method of claim 13 , wherein the carbon nanotube structure is supported by the support structure at edge points of the carbon nanotube structure.

17. The method of claim 13 , wherein a material of the support structure is a heat insulating material.

18. The method of claim 13 , wherein the infrared detector comprises:
an infrared probe detecting an infrared heat radiation and convert the detected infrared heat radiation into electrical signals;
a signal processor processing the electrical signals to form an image; and
an image display displaying the image.

19. The method of claim 13 , wherein the infrared detector is an infrared thermal imager.

Assignees

• Univ Tsinghua
• Hon Hai Prec Ind Co Ltd

Inventors

• Zhang Ke
• Chen Guo
• Liu Peng
• Jiang Kai-Li
• Fan Shou-Shan

Classifications

• H04N23/23

  from thermal infrared radiation · CPC title

• G01J5/023 Primary

  Particular leg structure or construction or shape; Nanotubes · CPC title

• G01J5/20

  using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title

• H04N5/33

  Transforming infrared radiation (cameras or camera modules for generating image signals from infrared radiation H04N23/20; circuitry of SSIS for transforming infrared radiation into image signals H04N25/20) · CPC title

• G01T1/29 Primary

  Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation · CPC title