Electroplating apparatus with improved throughput

Patent metadata

Field	Value
Publication number	US-9624595-B2
Application number	US-201414286841-A
Country	US
Kind code	B2
Filing date	May 23, 2014
Priority date	May 24, 2013
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

One embodiment provides an electroplating apparatus, which includes a tank filled with an electrolyte solution, a number of anodes situated around edges of the tank, a cathode situated above the tank, and a plurality of wafer-holding jigs attached to the cathode. A respective wafer-holding jig includes a common connector electrically coupled to the cathode and a pair of wafer-mounting frames electrically coupled to the common connector. Each wafer-mounting frame includes a plurality of openings, and a respective opening provides a mounting space for a to-be-plated solar cell, thereby facilitating simultaneous plating of front and back surfaces of the plurality of the solar cells.

First claim

What is claimed is:

1. A wafer-holding jig for electroplating of a plurality of photovoltaic structures, comprising:
a common connector electrically coupled to a cathode, wherein the common connector is a metal beam;
a wafer-holding mechanism consisting of a pair of wafer-mounting frames electrically coupled to the common connector,
wherein each wafer-mounting frame comprises a plurality of openings and a plurality of spring-loaded mechanisms that hold to-be-plated photovoltaic structures in the openings,
wherein each wafer-mounting frame comprises a plurality of through holes that are positioned between the openings, thereby facilitating flow of metal ions and electric field through the frame,
wherein each spring-loaded mechanism comprises a back part in a fixed position, a rotatable front part, and a spring coupling the back part and the front part,
wherein one end of the spring is directly attached to the wafer-mounting frame,
wherein the wafer-mounting frames are arranged in such a way that a first to-be-plated photovoltaic structure mounted on a first wafer-mounting frame is positioned substantially parallel to a second to-be-plated photovoltaic structure mounted on a second wafer-mounting frame,
wherein an open space exists between the first to-be-plated photovoltaic structure and the second to-be-plated photovoltaic structure to facilitate simultaneous plating of front and back surfaces of the plurality of the photovoltaic structures, and
wherein a distance between the wafer-mounting frames is between 2 and 20 cm.

2. The wafer-holding jig of claim 1 , wherein a respective wafer-mounting frame is made of one or more materials selected from the following group:
stainless steel;
Ti; and
Cu.

3. The wafer-holding jig of claim 1 , wherein the opening is slightly larger than the to-be-plated solar cell.

4. The wafer-holding jig of claim 1 , wherein the rotatable front part and the back part of the spring-loaded mechanism act as electrodes to electrically couple front and back surfaces of the to-be-plated photovoltaic structure to the cathode.

5. The wafer-holding jig of claim 1 , wherein a respective wafer-mounting frame further includes a plurality of through holes, thereby facilitating uniform metal deposition of both the front and back surfaces of the plurality of photovoltaic structures.

6. An electroplating apparatus, comprising:
a tank filled with an electrolyte solution;
a number of anodes situated around edges of the tank;
a cathode; and
a plurality of wafer-holding jigs attached to the cathode, wherein a respective wafer-holding jig comprises:
a common connector electrically coupled to the cathode, wherein the common connector is a metal beam;
a wafer-holding mechanism consisting of a pair of wafer-mounting frames electrically coupled to the common connector,
wherein each wafer-mounting frame includes a plurality of openings and a plurality of spring-loaded mechanisms that hold to-be-plated photovoltaic structures in the opening,
wherein each wafer-mounting frame comprises a plurality of through holes that are positioned between the openings, thereby facilitating flow of metal ions and electric field through the frame,
wherein each spring-loaded mechanism comprises a back part in a fixed position, a rotatable front part, and a spring coupling the back part and the front part,
wherein one end of the spring is directly attached to the wafer-mounting frame,
wherein the wafer-mounting frames are arranged in such a way that a first to-be-plated photovoltaic structure mounted on a first wafer-mounting frame is positioned substantially parallel to a second to-be-plated photovoltaic structure mounted on a second wafer-mounting frame,
wherein an open space exists between the first to-be-plated photovoltaic structure and the second to-be-plated photovoltaic structure to facilitate simultaneous plating of both the front and back sides of the first and second to-be-plated photovoltaic structures, and
wherein a distance between the wafer-mounting frames is between 2 and 20 cm.

7. The electroplating apparatus of claim 6 , wherein the cathode is configured to move from one end of the tank to the other end of the tank, thereby facilitating continuous operation of the electroplating apparatus.

8. The electroplating apparatus of claim 6 , wherein a respective wafer-mounting frame is made of one or more materials selected from the following group:
stainless steel;
Ti; and
Cu.

9. The electroplating apparatus of claim 6 , wherein a respective opening is slightly larger than a to-be-plated photovoltaic structure.

10. The electroplating apparatus of claim 6 , wherein the rotatable front part and the back part of the spring-loaded mechanism act as electrodes to electrically couple front and back surfaces of the to-be-plated photovoltaic structure to the cathode.

11. The electroplating apparatus of claim 6 , wherein a respective wafer-mounting frame further includes a plurality of through holes, thereby facilitating uniform metal deposition of both the front and back surfaces of to-be-plated photovoltaic structures.

12. The electroplating apparatus of claim 6 , wherein a gap between two adjacent wafer-holding jigs is between 1 and 10 cm wide.

13. The electroplating apparatus of claim 6 , further comprising an auxiliary anode situated between the pair of wafer-mounting frames.

14. The electroplating apparatus of claim 13 , wherein the auxiliary anode is made of one or more materials selected from the following group:
stainless steel;
Ti; and
Pt.

15. The electroplating apparatus of claim 13 , wherein the auxiliary anode is made of similar metals that form the anodes situated around edges of the tank.

Assignees

• Silevo Inc
• Solarcity Corp

Inventors

• Fu Jianming
• Kong Wen Zhong

Classifications

• C25D17/08

  Supporting} racks {, i.e. not for suspending · CPC title

• C25D17/10

  Electrodes {, e.g. composition, counter electrode} · CPC title

• C25D17/007

  Current directing devices · CPC title

• C25D17/001 Primary

  Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells · CPC title

• C25D17/06

  Suspending or supporting devices for articles to be coated · CPC title