Dielectric window cleaning apparatuses

Patent metadata

Field	Value
Publication number	US-9623449-B2
Application number	US-201213442223-A
Country	US
Kind code	B2
Filing date	Apr 9, 2012
Priority date	Apr 9, 2012
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

A dielectric window cleaning apparatus may be used for cleaning a dielectric window of a plasma processing device. The dielectric window cleaning apparatus may comprise a window support base, a fluid containing enclosure, a window rotating mechanism, a spray arm, and multiple fluid spraying nozzles. The fluid containing enclosure may include at least one overflow containment sidewall and may be located at least partially under and at least partially around a portion of the window support base. The window rotating mechanism may be operatively connected to the window support base and may rotate the window support base. The spray arm may be in fluid communication with a fluid source and may include a fluid flow channel. The multiple fluid spraying nozzles may each expel fluid from the fluid flow channel in a window cleansing spray.

First claim

What is claimed is:

1. A dielectric window cleaning apparatus for cleaning a dielectric window of a plasma processing device wherein the dielectric window is used to transmit RF or microwave energy during plasma processing, the dielectric window cleaning apparatus comprising:
a window support base comprising a window contacting surface configured to support an underside of the dielectric window;
a fluid containing enclosure comprising at least one overflow containment sidewall, wherein the fluid containing enclosure is located at least partially under and at least partially around a portion of the window support base;
a window rotating mechanism operatively connected to the window support base, wherein the window rotating mechanism rotates the window support base;
a spray arm in fluid communication with a fluid source and comprising a fluid flow channel, wherein the spray arm comprises an operational position and a loading position, wherein when the spray arm is positioned in the operational position the fluid flow channel is at least partially disposed directly above the window support base, and when in the loading position the fluid flow channel is not disposed directly above the window support base; and
multiple fluid spraying nozzles that each expel fluid from the fluid flow channel in a window cleansing spray, wherein the window cleansing spray from one of the fluid spraying nozzles overlaps with the window cleansing spray of at least another fluid spraying nozzle, and wherein the window cleansing spray forms a wall of fluid shaped to overlap and spray an upper surface of the dielectric window;
wherein the dielectric window cleaning apparatus is configured to clean the upper surface of the dielectric window from contaminants deposited on the dielectric window during plasma processing.

2. The dielectric window cleaning apparatus of claim 1 , wherein the window contacting surface comprises at least one o-ring configured to prevent scratching of the underside of the dielectric window and form a seal between the underside of the dielectric window and the window contacting surface to prevent contact of the window cleansing spray from the underside of the dielectric window.

3. The dielectric window cleaning apparatus of claim 1 , wherein the spray arm has pivoting movement wherein the spray arm pivots on a rotational axis between the operational position and the loading position.

4. The dielectric window cleaning apparatus of claim 3 , wherein the pivoting movement of the spray arm is restricted by at least one spray arm guidepost.

5. The dielectric window cleaning apparatus of claim 1 , wherein the dielectric window cleaning apparatus is configured to clean a dielectric window of a plasma processing device, with the dielectric window having a diameter of at least 20 inches and a weight of at least 40 pounds.

6. The dielectric window cleaning apparatus of claim 1 , wherein there is between about 5% and about 50% overlap in the window cleansing spray of one of the multiple fluid spraying nozzles and the window cleansing spray of an adjacent one of the multiple fluid spraying nozzles.

7. The dielectric window cleaning apparatus of claim 6 , wherein the window cleansing spray from each of the multiple fluid spraying nozzles is aligned.

8. The dielectric window cleaning apparatus of claim 6 , wherein the window cleansing spray is not substantially perpendicular to the window contacting surface.

9. The dielectric window cleaning apparatus of claim 8 , wherein the window cleansing spray is at an angle of between about 10° and about 50° relative to a line that is normal to the window contacting surface.

10. The dielectric window cleaning apparatus of claim 1 , wherein the window cleansing spray comprises de-ionized water.

11. The dielectric window cleaning apparatus of claim 1 , wherein the window cleansing spray has a temperature between about 65° C. and about 80° C.

12. The dielectric window cleaning apparatus of claim 1 , wherein the window support base rotates at between about 25 Hz and about 150 Hz.

13. The dielectric window cleaning apparatus of claim 1 , wherein the window support base comprises a base supporting shaft and the window rotating mechanism is operatively connected to the window support base at the base supporting shaft.

14. The dielectric window cleaning apparatus of claim 13 , further comprising an inner shaft housing and an outer shaft housing, wherein:
the inner shaft housing partially surrounds the base supporting shaft;
the outer shaft housing partially surrounds the inner shaft housing and the base supporting shaft; and
the outer shaft housing allows fluid flow towards the inner shaft housing only through a passage below the outer shaft housing.

15. The dielectric window cleaning apparatus of claim 1 , wherein the window cleansing spray from each of the multiple fluid spraying nozzles has a substantially flat shape.

16. A dielectric window cleaning apparatus for cleaning a dielectric window of a plasma processing device, the dielectric window cleaning apparatus comprising:
a window support base comprising a window contacting surface having a window centering post shaped to mate with a cavity in the dielectric window;
a spray arm in fluid communication with a fluid source and comprising a fluid flow channel; and
multiple fluid spraying nozzles that each expel fluid from the fluid flow channel in a window cleansing spray, wherein the window cleansing spray from one of the fluid spraying nozzles overlaps with the window cleansing spray of at least another fluid spraying nozzle;
and wherein:
each of the multiple fluid spraying nozzles expel a window cleansing spray; and
there is between about 5% and about 50% overlap in the window cleansing spray of a fluid spraying nozzle and the window cleansing spray of an adjacent fluid spraying nozzle wherein the dielectric window cleaning apparatus is configured to clean the upper surface of the dielectric window.

17. The dielectric window cleaning apparatus of claim 16 , wherein the window cleansing spray is at an angle of between about 10° and about 50° relative to a line that is normal to the window contacting surface.

18. A dielectric window cleaning apparatus for cleaning a dielectric window of a plasma processing device, the dielectric window cleaning apparatus comprising:
a window support base comprising a window contacting surface wherein the window contacting surface comprises at least one o-ring configured to prevent scratching of the underside of the dielectric window and form a seal between the underside of the dielectric window and the window contacting surface;
a fluid containing enclosure comprising at least one overflow containment sidewall, wherein the fluid containing enclosure is located at least partially under and at least partially around a portion of the window support base;
a window rotating mechanism operatively connected to the window support base, wherein the window rotating mechanism rotates the window support base;
a spray arm in fluid communication with a fluid source and comprising a fluid flow channel, wherein the spray arm comprises an operational position and a loading position, wherein when the spray arm is positioned in the operational position the fluid flow channel is at least partially disposed directly above the window support base, and when in the loading position the fluid flow channel is not disposed directly above the window support base; and
multiple fluid spraying nozzles that each expel fluid from the fluid flow channel in a window cleansing spra

Assignees

• Avoyan Armen
• Shih Hong
• Lacroix Cliff
• Daugherty John
• Lam Res Corp

Inventors

• Avoyan Armen
• Shih Hong
• Lacroix Cliff
• Daugherty John

Classifications

• B08B3/022

  Cleaning travelling work (B08B3/042 takes precedence) · CPC title

• B08B3/024 Primary

  Cleaning by means of spray elements moving over the surface to be cleaned · CPC title