Pre-aligner apparatus

Patent metadata

Field	Value
Publication number	US-9620401-B2
Application number	US-200813124777-A
Country	US
Kind code	B2
Filing date	Oct 22, 2008
Priority date	Oct 22, 2008
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

The apparatus includes a rotary mechanism for holding a semiconductor wafer and rotating the same, a detection mechanism for detecting a positioning cutout portion formed in the wafer, and a wafer transfer mechanism for lifting the wafer from a wafer mounting portion of the rotary mechanism or mounting the wafer on the same. The wafer transfer mechanism has a movable holding portion for holding the wafer at a position just above the wafer mounting portion and is constituted such that the movable holding portion moves up or down while avoiding the wafer held by the rotary mechanism.

First claim

The invention claimed is:

1. A pre-aligner apparatus comprises:
a rotary mechanism configured to hold a semiconductor wafer and rotate the same,
a detection mechanism configured to detect a positioning cutout portion formed in the wafer, and
a wafer transfer mechanism configured to lift the wafer from a wafer mounting portion of the rotary mechanism or mount the wafer on the wafer mounting portion, wherein
the wafer transfer mechanism includes a drive mechanism and a pair of elongated members configured to hold the wafer at a position just above the wafer mounting portion, the pair of elongated members extending in a common plane parallel to the wafer, the pair of elongated members being movable in a horizontal direction and in a vertical direction,
the drive mechanism includes (i) a pair of first link members, each of the pair of first link members having one end pivotally connected to a proximal end of a different one of the pair of elongated members respectively, and (ii) a second link member having i) a first end, ii) a second end, and iii) a rotatably supported central part, the first end being pivotally connected to another end of one of the pair of first link members, and the second end being pivotally connected to another end of another of the pair of first link members,
the pair of the first link members and the second link member are structured such that rotating the second link member around the central part changes a distance between the pair of elongated members in the horizontal direction, and
wherein the drive mechanism includes an air cylinder having an output shaft pivotally connected to the second link member, and a lifting drive mechanism configured to change a position of the pair of elongated members in the vertical direction.

2. The pre-aligner apparatus according to claim 1 , wherein the pair of elongated members are respectively disposed on opposing sides with respect to a rotational axis of the rotary mechanism, the distance between the pair of elongated members in the horizontal direction being changeable between a first distance when the wafer is held and a second distance when the pair of elongated members move up or down while bypassing the wafer held by the rotary mechanism, the second distance being greater than the first distance.

3. The pre-aligner apparatus according to claim 1 , wherein
the drive mechanism controls the pair of elongated members to move between a position right above the wafer held by the rotary mechanism and a position right under the wafer held by the rotary mechanism, such that
the pair of the elongated members move in the vertical direction after a distance between the pair of the elongated members in the horizontal direction is widened from a first distance to a second distance that is longer than the first distance, so that the pair of the elongated members bypass the wafer held by the rotary mechanism when moving in the vertical direction, and
the pair of the elongated members move in the horizontal direction to narrow the distance between the pair of the elongated members in the horizontal direction from the second distance to the first distance after the pair of the elongated members move in the vertical direction, and

the pair of the elongated members are configured to hold the wafer when the distance between the pair of the elongated members is the first distance.

4. A pre-aligner apparatus comprises:
a rotary mechanism configured to hold a semiconductor wafer and rotate the same,
a detection mechanism configured to detect a positioning cutout portion formed in the wafer, and
a wafer transfer mechanism configured to lift the wafer from a wafer mounting portion of the rotary mechanism, wherein
the wafer transfer mechanism includes a drive mechanism and a pair of elongated members configured to move up so as to abut against a rear face of the wafer when lifting the wafer, the pair of elongated members extending in a common plane parallel to the wafer, the pair of elongated members being movable in a horizontal direction and in a vertical direction,
the drive mechanism includes (i) a pair of first link members, each of the pair of first link members having one end pivotally connected to a proximal end of a different one of the pair of elongated members respectively, and (ii) a second link member having i) a first end, ii) a second end, and iii) a rotatably supported central part, the first end being pivotally connected to another end of one of the pair of first link members, and the second end being pivotally connected to another end of another of the pair of first link members,
the pair of the first link members and the second link member are structured such that rotating the second link member around the central part changes a distance between the pair of elongated members in the horizontal direction, and
wherein the drive mechanism includes an air cylinder having an output shaft pivotally connected to the second link member, and a lifting drive mechanism configured to change a position of the pair of elongated members in the vertical direction.

5. The pre-aligner apparatus according to claim 4 , wherein the pair of elongated members are respectively disposed on opposing sides with respect to a rotational axis of the rotary mechanism, the distance between the pair of elongated members in the horizontal direction being changeable between a first distance when the wafer is held and a second distance when the pair of elongated members move up or down while bypassing the wafer held by the rotary mechanism, the second distance being greater than the first distance.

6. The pre-aligner apparatus according to claim 4 , wherein
the drive mechanism controls the pair of elongated members to move between a position right above the wafer held by the rotary mechanism and a position right under the wafer held by the rotary mechanism, such that
the pair of the elongated members move in the vertical direction after a distance between the pair of the elongated members in the horizontal direction is widened from a first distance to a second distance that is longer than the first distance, so that the pair of the elongated members bypass a next wafer held by the rotary mechanism when moving in the vertical direction after the wafer lifted by the pair of elongated members has been carried out, and
the pair of the elongated members move in the horizontal direction to narrow the distance between the pair of the elongated members in the horizontal direction from the second distance to the first distance after the pair of the elongated members move in the vertical direction, and

the pair of the elongated members are configured to hold the next wafer when the distance between the pair of the elongated members is the first distance.

Assignees

• Hashimoto Yasuhiko
• Kawasaki Heavy Ind Ltd

Inventors

• Hashimoto Yasuhiko

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3306

  Horizontal transfer of a single workpiece · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/53 Primary

  using optical controlling means · CPC title