Near field transducers (NFTS) and methods of making

Patent metadata

Field	Value
Publication number	US-9620152-B2
Application number	US-201615167622-A
Country	US
Kind code	B2
Filing date	May 27, 2016
Priority date	May 28, 2015
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

First claim

What is claimed is:

1. A method of forming a NFT, the NFT comprising a disc and a peg, the peg being a portion of a rod, the method comprising:
forming the rod, the rod substantially surrounded on the sides by a dielectric material, the rod comprising the peg;
forming a hard mask positioned over at least a portion of the rod, the hard mask comprising at least one layer;
patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod;
etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask;
forming a disc mask comprising a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc;
etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge;
depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and
polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

2. The method according to claim 1 further comprising removing the disc mask after the disc material has been deposited in the void.

3. The method according to claim 2 further comprising depositing a second dielectric material over at least the disc material.

4. The method according to claim 3 further comprising removing at least a portion of the disc material and second dielectric material.

5. The method according to claim 4 further comprising removing the hard mask before polishing the disc.

6. The method according to claim 1 , wherein the disc mask comprises a photoresist mask.

7. The method according to claim 1 , wherein the hard mask comprises at least five (5) layers.

8. The method according to claim 1 further comprising further defining the shape of the disc using additional masking steps.

9. The method according to claim 1 , wherein the step of patterning the hard mask forms a two piece patterned hard mask with a front portion and a back portion forming a void therebetween.

10. The method according to claim 9 , wherein the front portion comprises the back edge of the hard mask that functions to define the front edge of the disc and the back portion functions to define the back edge of the disc.

11. The method according to claim 10 further comprising defining the sidewalls of the disc after deposition of the disc material using a second disc mask.

12. The method according to claim 1 further comprising forming a barrier layer after formation of the disc mask but before deposition of the disc material.

13. The method according to claim 12 , wherein the barrier layer is plated.

14. A method of forming a NFT, the NFT comprising a disc and a peg, the peg being a portion of a rod, the method comprising:
forming the rod, the rod substantially surrounded on the sides by a dielectric material, the rod comprising the peg;
forming a hard mask positioned over at least a portion of the rod, the hard mask comprising at least one layer;
patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod;
etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask;
forming a disc mask comprising a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc;
etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge;
forming a barrier layer adjacent at least the back edge of the rod;
depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and
polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

15. The method according to claim 14 , wherein the disc mask comprises a multilayer hard mask.

16. The method according to claim 14 , wherein the step of forming the barrier layer comprises use of a conformal deposition technique.

17. The method according to claim 15 , wherein the step of forming the barrier layer comprises use of a plating technique.

18. A device having an air bearing surface (ABS), the device comprising:
a NFT, the NFT comprising:
a disc having a front edge positioned towards the ABS of the device and an opposing back edge and a top surface and an opposing bottom surface; and
a peg having a front surface adjacent the ABS of the device and an opposing back surface and a top surface and an opposing bottom surface,
wherein the bottom surface of the peg is from about 5 nm to 20 nm above the bottom surface of the disc.

19. The device according to claim 18 further comprising a barrier layer positioned between the front edge of the disc and the back edge of the peg.

20. The device according to claim 19 , wherein the barrier layer has a thickness from about 5 nm to about 50 nm.

Assignees

• Seagate Technology Llc

Inventors

• Kautzky Michael C
• Ostrowski Mark H
• Grundman David Michael
• Blaber Martin

Classifications

• G11B5/3169 Primary

  Working or finishing the interfacing surface of heads, e.g. lapping of heads · CPC title

• G11B5/6088

  Optical waveguide in or on flying head · CPC title

• G11B5/3109

  Details (G11B5/3103 takes precedence) · CPC title

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title

• G11B5/3133

  including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure (G11B5/3106 takes precedence) · CPC title