Liquid sensing systems and methods using a ring resonator sensor

Patent metadata

Field	Value
Publication number	US-9618693-B2
Application number	US-201414303862-A
Country	US
Kind code	B2
Filing date	Jun 13, 2014
Priority date	Jun 13, 2014
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A sensor system having a multi-pass interaction region is disclosed. The system includes an input region, a multi-pass region, and an output region. The input region is configured to receive emitted light. The multi-pass region is coupled to the input region and is configured to absorb portions of the emitted light according to a specimen proximate the multi-pass region. The output region is coupled to the multi-pass region and is configured to provide interacted light from the multi-pass region.

First claim

What is claimed is:

1. A sensor system having a multi-pass interaction region, the system comprising:
an input region configured to receive emitted light;
a multi-pass region coupled to the input region, wherein the multi-pass region is configured to cause the emitted light to pass through the multi-pass region multiple times and to absorb portions of the emitted light according to a specimen proximate the multi-pass region, and wherein the multi-pass region is comprised of a periodic structure of two types and has an absorption rate based on specimen characteristics and the periodic structure;
an output region coupled to the multi-pass region, the output region configured to provide interacted light from the multi-pass region; and
a flexible membrane configured to support the input region, the multi-pass region and the output region, wherein the flexible membrane includes a honeycomb structure on its back side with respect to the input region, the multi-pass region and the output region.

2. The system of claim 1 , wherein the input region has a tapered shape.

3. The system of claim 1 , wherein the input region has a linear shape.

4. The system of claim 1 , wherein the input region has grating configured to receive the emitted light off plane.

5. The system of claim 1 , further comprising a light source configured to provide the emitted light at selected wavelengths.

6. The system of claim 1 , wherein the emitted light has an infra-red wavelength.

7. The system of claim 1 , wherein the multi-pass region has a bend configured to permit multiple passes of at least a portion of the emitted light.

8. The system of claim 1 , wherein the multi-pass region is circular and has a radius according to a selected wavelength of the emitted light.

9. The system of claim 1 , further comprising a throughput port coupled to the multi-pass region.

10. The system of claim 1 , wherein the output region is in-line with the input region.

11. The system of claim 1 , further comprising a detector configured to measure the interacted light from the output region.

12. The system of claim 11 , further comprising a control unit configured to obtain a measurement of the interacted light from the detector and to determine chemical properties of a specimen proximate the multi-pass region.

13. The system of claim 1 , wherein the multi-pass region is comprised of polymethacrylmethylimide (PMMI) and is amorphous and has a transmittance of about 90% at a thickness of 3 mili-meters.

14. The system of claim 1 , wherein the absorption rate is further based on temperature and age of the specimen.

15. The system of claim 1 , wherein the flexible membrane is comprised of silicon nitride.

16. A sensor system having a multi-pass interaction region, the system comprising:
a sensor having:
a light source configured to emit light at a selected wavelength;
a waveguide formed of photonic crystal and supported by a flexible membrane and configured to receive the emitted light and absorb a portion of the light according to a specimen, and to provide interacted light, wherein the flexible membrane includes a honeycomb structure on its back side with respect to the waveguide, wherein the photonic crystal is a periodic structure of two types of materials arranged in a periodic lattice and has an absorption rate based on specimen characteristics and the periodic structure; and
a detector configured to measure the interacted light from the waveguide; and

a control unit coupled to the sensor and configured to determine properties of the specimen according to the measured light and the emitted light.

17. The system of claim 16 , wherein the waveguide has a bended portion configured to cause at least a portion of the emitted light to travel through in multiple passes.

18. The system of claim 16 , wherein the waveguide includes a multi-pass interaction region having a circular shape, wherein the circular shape is configured for the selected wavelength.

19. The system of claim 16 , further comprising an interface coupled to the sensor and the control unit.

20. A method of operating a sensor having a multi-pass interaction region, the method comprising:
selecting a wavelength for detection;
configuring a waveguide with a multi-pass interaction region according to the selected wavelength, wherein the multi-pass interaction region is a periodic structure of two types of materials arranged in a periodic lattice and has an absorption rate based on specimen characteristics and the periodic structure;
supporting the waveguide with a flexible membrane, wherein the flexible membrane includes a honeycomb structure on its back side with respect to the waveguide;
receiving light having the selected wavelength at the waveguide;
interacting the received light within the multi-pass interaction region; and
measuring the interacted light from the waveguide.

21. The method of claim 20 , wherein selecting the wavelength includes selecting the wavelength to detect chemical and environmental properties.

22. The method of claim 20 , wherein interacting the received light includes interacting the received light with a specimen proximate to the multi-pass interaction region, wherein the specimen is a liquid.

23. The method of claim 20 , further comprising comparing the measured light with the received light to detect a specimen.

Assignees

• Infineon Technologies Ag

Inventors

• Lavchiev Ventsislav
• Jakoby Bernhard
• Hedenig Ursula
• Grille Thomas
• Irsigler Peter
• Neidhart Thomas
• Ostermann Thomas Krotscheck

Classifications

• G01N21/7746 Primary

  the waveguide coupled to a cavity resonator · CPC title

• G01N2021/7783

  Transmission, loss · CPC title

• G02B6/102 Primary

  for infrared and ultraviolet radiation · CPC title

• G01N21/59

  Transmissivity (G01N21/25 takes precedence) · CPC title

• G01N21/552

  Attenuated total reflection · CPC title