Method and apparatus for testing IC

Patent metadata

Field	Value
Publication number	US-9618569-B2
Application number	US-201213402439-A
Country	US
Kind code	B2
Filing date	Feb 22, 2012
Priority date	Feb 23, 2011
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A testing method includes measuring an electrical parameter of a device under test (DUT) and a corresponding temperature of the DUT one or more times, determining coefficients in a pre-constructed model based on a plurality of measured values of the electrical parameter and corresponding measured temperatures to characterize a relationship of the electrical parameter to the temperature, and determining a quality of the DUT based on the model and a limit value of the electrical parameter at a specified temperature. The model is pre-constructed to characterize the relationship of the electrical parameter to the temperature with the coefficients that are DUT-dependent variables.

First claim

What is claimed is:

1. A method, comprising:
measuring an electrical parameter of a device under test (DUT) and measuring, using a temperature sensor, a corresponding temperature of the DUT one or more times;
determining coefficients, in a pre-constructed model based on a plurality of measured values of the electrical parameter and corresponding measured temperatures, to characterize a relationship of the electrical parameter of the DUT to the temperature of the DUT, wherein
the pre-constructed model characterizes a relationship of the electrical parameter to the temperature of a circuit type corresponding to the DUT, and
the coefficients are DUT-dependent variables of the DUT; and

determining a fitness of the DUT to meet a specified performance requirement based on the pre-constructed model and a limit value of the electrical parameter at a specified temperature.

2. The method of claim 1 , wherein determining the fitness of the DUT to meet the specified performance requirement based on the pre-constructed model and the limit value of the electrical parameter at the specified temperature further comprises:
determining a value for the electrical parameter at the specified temperature according to the pre-constructed model; and
comparing the determined value to the limit value to determine the quality of the DUT.

3. The method of claim 1 , wherein determining the fitness of the DUT to meet the specified performance requirement based on the pre-constructed model and the limit value of the electrical parameter at the specified temperature further comprises:
determining a temperature value at which the DUT has the limit value of the electrical parameter according to the pre-constructed model; and
comparing the determined temperature value to the specified temperature to determine the quality of the DUT.

4. The method of claim 1 , wherein measuring the electrical parameter of the DUT and the corresponding temperature of the DUT for the one or more times further comprises:
testing the DUT according to a test flow that includes a plurality of parametric tests inserted in a sequence of other tests; and
measuring the electrical parameter of the DUT and the corresponding temperature in response to each of the parametric tests.

5. The method of claim 1 , wherein determining the coefficients in the pre-constructed model based on the plurality of measured values of the electrical parameter and corresponding temperatures further comprises:
determining the coefficients in a pre-constructed polynomial model based on the measured values of the electrical parameter and corresponding temperatures.

6. The method of claim 1 , wherein measuring the electrical parameter of the DUT and the corresponding temperature of the DUT one or more times further comprises:
measuring the electrical parameter of the DUT and a corresponding junction temperature of the DUT.

7. The method of claim 1 , wherein measuring the electrical parameter of the DUT and the corresponding temperature of the DUT one or more times further comprises:
measuring at least one of an operating frequency, a current consumption and an oscillator frequency and the corresponding temperature of the DUT.

8. The method of claim 1 , wherein measuring the electrical parameter of the DUT and the corresponding temperature of the DUT one or more times further comprises:
measuring an operating frequency of the DUT and the corresponding temperature of the DUT for a single time.

9. The method of claim 8 , further comprising:
determining the coefficients in the pre-constructed model based on the single measured value of the operating frequency and the corresponding single measured temperature.

10. An integrated circuit (IC) chip that is tested according to a method, the method comprising:
measuring an electrical parameter of a device under test (DUT) and measuring, using a temperature sensor, a corresponding temperature of the DUT one or more times;
determining coefficients, in a pre-constructed model based on a plurality of measured values of the electrical parameter and corresponding measured temperatures, to characterize a relationship of the electrical parameter of the DUT to the temperature of the DUT, wherein
the pre-constructed model characterizes a relationship of the electrical parameter to the temperature of a circuit type corresponding to the DUT, and
the coefficients are DUT-dependent variables of the DUT; and

determining a fitness of the DUT to meet a specified performance requirement based on the pre-constructed model and a limit value of the electrical parameter at a specified temperature.

11. A test system, comprising:
an interface configured to measure an electrical parameter of a device under test (DUT) and measure, using a temperature sensor, a corresponding temperature of the DUT; and
a controller configured to
control the interface to measure the electrical parameter of the DUT and measure the corresponding temperature of the DUT one or more times,
determine coefficients, in a pre-constructed model based on the measured values of the electrical parameter and the corresponding measured temperatures, to characterize a relationship of the electrical parameter of the DUT to the temperature of the DUT, and
determine a fitness of the DUT to meet a specified performance requirement based on the pre-constructed model and a limit value of the electrical parameter at a specified temperature, wherein
the pre-constructed model characterizes a relationship of the electric parameter to the temperature of a circuit type corresponding to the DUT, and
the coefficients are DUT-dependent variables of the DUT.

12. The test system of claim 11 , wherein the controller is configured to determine a value of the electrical parameter at the specified temperature according to the pre-constructed model, and compare the value to the limit value to determine the fitness of the DUT.

13. The test system of claim 11 , wherein the controller is configured to determine a temperature at which the DUT has the limit value of the electrical parameter according to the pre-constructed model, and compare the temperature to the specified temperature to determine the fitness of the DUT.

14. The test system of claim 11 , wherein the controller is configured to control the interface according to a test flow that includes a plurality of parametric tests inserted in a sequence of other tests, and the interface is configured to measure the electrical parameter of the DUT and the corresponding temperature in response to each of the parametric tests.

15. The test system of claim 11 , wherein the controller is configured to determine the coefficients in a pre-constructed polynomial model based on the measured values of the electrical parameter and corresponding temperatures.

16. The test system of claim 11 , wherein the interface is configured to receive from a temperature sensor in the DUT a sensed junction temperature.

17. The test system of claim 11 , wherein the interface is configured to measure at least one of an operating frequency, a current consumption and an oscillator frequency.

18. The test system of claim 11 , wherein the interface is configured to measure an operating frequency of the DUT and the corresponding temperature for a single time and determine the coefficients in the pre-constructed model based on the measured value of the electrical parameter and the corresponding measured temperature.

19. The test system of claim 11 configured to test a DUT that is defined by an integrated circ

Assignees

• Benjamin Ofer
• Sade Igal
• Nasser Nasim
• Marvell Israel (M I S L) Ltd

Inventors

• Benjamin Ofer
• Sade Igal
• Nasser Nasim

Classifications

• G01R31/31718

  Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis (mechanical aspects G01R31/2808, G01R31/2851) · CPC title

• G01R31/2874 Primary

  related to temperature · CPC title