Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale

Patent metadata

Field	Value
Publication number	US-9613729-B2
Application number	US-201414282281-A
Country	US
Kind code	B2
Filing date	May 20, 2014
Priority date	May 20, 2014
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.

First claim

What is claimed is:

1. A multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale comprising:
a zone plate alignment base frame;
a plurality of zone plates;
a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing;
at least one respective positioning stage driving and positioning each said respective zone plate holder; each said respective positioning stage being mounted on said zone plate alignment base frame;
a respective linkage component coupling each said respective positioning stage and said respective zone plate holder; and
said zone plate alignment base frame, each said zone plate holder and each said linkage component being formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.

2. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein the selected material forming said zone plate alignment base frame includes a nickel-iron alloy having a low coefficient of thermal expansion.

3. The multiple zone plates precision alignment apparatus as recited in claim 2 wherein said nickel-iron alloy includes invar.

4. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein the selected material forming each said zone plate holder includes synthetic diamond having a low coefficient of thermal expansion.

5. The multiple zone plates precision alignment apparatus as recited in claim 4 wherein said synthetic diamond includes chemical vapor deposition (CVD) diamond.

6. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein said synthetic diamond provides predefined stiffness for said zone plate holder.

7. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein the selected material forming each said linkage component includes a combination of selected materials to compensate the stages thermal deformation.

8. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein each said respective positioning stage includes a motorized linear stage including a piezoelectric transducer (PZT) or PZT-driven linear stage.

9. The multiple zone plates precision alignment apparatus as recited in claim 8 wherein said motorized linear stage includes a piezoelectric transducer (PZT) PZT-driven linear stage.

10. The multiple zone plates precision alignment apparatus as recited in claim 9 wherein said PZT-driven linear stage includes an ultrasonic piezo-motor with a linear optical encoder.

11. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein each said respective positioning stage includes three positioning stages to adjust position of said respective zone plate holder in X, Y, and Z directions.

12. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein each of said three positioning stages includes a motorized linear stage.

13. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein said zone plates include Fresnel zone plates (FZPs).

14. The multiple zone plates precision alignment apparatus as recited in claim 1 includes a symmetric base structure.

15. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein said symmetric base structure is formed of a nickel-iron alloy invar.

16. The multiple zone plates precision alignment apparatus as recited in claim 1 includes a non-symmetric base structure.

17. The multiple zone plates precision alignment apparatus as recited in claim 16 wherein said non-symmetric base structure is formed of a nickel-iron alloy invar.

18. The multiple zone plates precision alignment apparatus as recited in claim 1 wherein each said linkage component is formed of a selected single material or a selected combination of materials.

19. The multiple zone plates precision alignment apparatus as recited in claim 18 wherein said single material and said combination of materials forming each said linkage component includes an aluminum alloy, titanium, a copper alloy, a nickel-iron alloy invar, a stainless steel material, and a carbon steel material.

20. The multiple zone plates precision alignment apparatus as recited in claim 1 includes a respective pair of fasteners arranged for thermal expansion compensation respectively connecting said respective linkage component and said positioning stage, and said respective linkage component and zone plate holder including a spring loaded fastener providing a sliding connection and a second fastener without spring loading providing a tight connection.

Assignees

• Uchicago Argonne Llc
• Uchicago Argonne Llc

Inventors

• Shu Deming
• Liu Jie
• Gleber Sophie C
• Vila-Comamala Joan
• Lai Barry
• Maser Jorg M
• Roehrig Christian
• Wojcik Michael J
• Vogt Franz Stefan

Classifications

• G21K1/06

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• G21K7/00 Primary

  Gamma- or X-ray microscopes · CPC title