Microfluidic surface processing device and method

Patent metadata

Field	Value
Publication number	US-9611528-B2
Application number	US-201514608578-A
Country	US
Kind code	B2
Filing date	Jan 29, 2015
Priority date	Jun 29, 2012
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

The present invention is notably directed to a microfluidic surface processing device including a microfluidic probe head with at least one aperture, on a face, including at least an outlet aperture; and a surface processing structure extending outward and perpendicular with respect to the face, the processing structure being further dimensioned and located with respect to the outlet aperture such that it can intercept a flowpath of liquid dispensed via the outlet aperture. The present invention is further directed to related apparatuses and methods.

First claim

What is claimed is:

1. A microfluidic surface processing device, comprising:
a microfluidic probe head having, on a face, at least one aperture, including at least an outlet aperture;
a processing structure extending outward and perpendicular with respect to the face, the processing structure being dimensioned and located with respect to the outlet aperture such that the processing structure intercepts a flowpath of liquid dispensed via the outlet aperture; and
a cantilever connected to the microfluidic probe head, wherein the processing structure is a probe tip terminating the cantilever, the cantilever is a scanning probe microscope cantilever, and wherein the cantilever is anchored to the microfluidic probe head, and
wherein the cantilever is fixed via a fixed portion at the face, the fixed portion being distant from the probe tip, and the cantilever further including a free portion that extends opposite to the probe tip with respect to a main axis of the cantilever and configured to seal one of the apertures when urged against the cantilever.

2. The microfluidic surface processing device according to claim 1 , wherein the microfluidic probe head includes at least an inlet aperture on the face, comprising:
the outlet aperture and the inlet aperture are dimensioned and positioned such as to allow for collecting, via the inlet aperture, liquid dispensed via the outlet aperture; and
the processing structure is dimensioned and located with respect to the inlet aperture and the outlet aperture to intercept the flowpath of liquid dispensed via the outlet aperture and collected via the inlet aperture.

3. The microfluidic surface processing device according to claim 2 , comprising:
an electrical circuit configured to measure an electrical response, such as an electrical conductivity, an electrical capacitance, or an electrochemical potential, of liquid collected via the inlet aperture; and
feedback control means coupled to the electrical circuit, configured to control a rate of processing liquid dispensed via the outlet aperture based on an electrical response measured via the electrical circuit.

4. The microfluidic surface processing device according to claim 1 , wherein:
an average diameter of the outlet aperture at the level of the face is between 0.5 and 1000 micrometers;
a distance between the processing structure and the outlet aperture is between 5 and 2000 micrometers; and
a distance between the outlet aperture and an inlet aperture of the microfluidic probe head, if any, is between 5 and 2000 micrometers.

5. The microfluidic surface processing device according to claim 1 , wherein the fixed portion is opposite to the probe tip with respect to the free portion or the free portion is opposite to the probe tip with respect to the fixed portion.

6. A microfluidic surface processing device, comprising:
a microfluidic probe head having, on a face, at least one aperture, including at least an outlet aperture;
a processing structure extending outward and perpendicular with respect to the face, the processing structure being dimensioned and located with respect to the outlet aperture such that the processing structure intercepts a flowpath of liquid dispensed via the outlet aperture; and
a cantilever connected to the microfluidic probe head, wherein the processing structure is a probe tip terminating the cantilever, the cantilever is a scanning probe microscope cantilever, and wherein the cantilever is anchored to the microfluidic probe head, and
wherein the cantilever is fixed via a fixed portion at the face, the fixed portion, distant from the probe tip, and the cantilever further include a free portion, extending opposite to the probe tip with respect to a main axis of the cantilever, wherein the fixed portion is opposite to the probe tip with respect to the free portion or the free portion is opposite to the probe tip with respect to the fixed portion.

7. The microfluidic surface processing device according to claim 6 , wherein the microfluidic probe head includes at least an inlet aperture on the face, comprising:
the outlet aperture and the inlet aperture are dimensioned and positioned such as to allow for collecting, via the inlet aperture, liquid dispensed via the outlet aperture; and
the processing structure is dimensioned and located with respect to the inlet aperture and the outlet aperture to intercept the flowpath of liquid dispensed via the outlet aperture and collected via the inlet aperture.

8. The microfluidic surface processing device according to claim 7 , comprising:
an electrical circuit configured to measure an electrical response, such as an electrical conductivity, an electrical capacitance, or an electrochemical potential, of liquid collected via the inlet aperture; and
feedback control means coupled to the electrical circuit, configured to control a rate of processing liquid dispensed via the outlet aperture based on an electrical response measured via the electrical circuit.

9. The microfluidic surface processing device according to claim 6 , wherein:
an average diameter of the outlet aperture at the level of the face is between 0.5 and 1000 micrometers;
a distance between the processing structure and the outlet aperture is between 5 and 2000 micrometers; and
a distance between the outlet aperture and an inlet aperture of the microfluidic probe head, if any, is between 5 and 2000 micrometers.

Assignees

• IBM

Inventors

• Duerig Urs T
• Lovchik Robert

Classifications

• G01Q80/00

  Applications, other than SPM, of scanning-probe techniques (manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08) · CPC title

• C23C2/04 Primary

  characterised by the coating material · CPC title

• B81B3/0097 Primary

  Devices comprising flexible or deformable elements not provided for in groups B81B3/0002 - B81B3/0094 · CPC title

• G01Q60/42

  Functionalisation · CPC title

• B05D1/18

  performed by dipping · CPC title