MEMS having a cutout section on a concave portion between a substrate and a stationary member

Patent metadata

Field	Value
Publication number	US-9611136-B2
Application number	US-201615169368-A
Country	US
Kind code	B2
Filing date	May 31, 2016
Priority date	Apr 18, 2014
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

A functional element includes a substrate which is provided with a concave section; a stationary section connected to a wall section that defines the concave section of the substrate; an elastic section which extends from the stationary section and is capable of stretching and contracting in a first axis direction; a movable body connected to the elastic section; a movable electrode section which extends from the movable body. The concave section includes a cutout section which is provided on the wall section. The stationary section includes an overlap section which is spaced with the substrate, and overlaps the concave section when seen in a plan view. At least a portion of the overlap section overlaps the cutout section when seen in the plan view, and the elastic section extends from the overlap section.

First claim

What is claimed is:

1. A functional element comprising:
a substrate;
a stationary member that is spaced apart from the substrate;
a wall that is provided between the substrate and the stationary member;
an elastic member that extends from the stationary member;
a movable body that is connected to the elastic member;
a movable electrode that is connected to the movable body; and
a stationary electrode that is connected to the substrate and that faces the movable electrode,
wherein the wall includes a cutout,
the stationary member includes an overlap area which overlaps the cutout in a plan view, and
the elastic member extends from the overlap area of the stationary member in a first axis direction.

2. The functional element according to claim 1 ,
wherein the stationary member includes an extension section which extends from the overlap area in a second axis direction which intersects with the first axis direction in the plan view.

3. The functional element according to claim 2 ,
wherein a width of the cutout in the first axis direction is wider than a width of the overlap area in the cutout in the first axis direction in the plan view.

4. The functional element according to claim 2 , wherein:
the substrate has a first area that faces the movable body in the plan view,
the overlap area has second and third areas, the second area overlaps with the cutout in the plan view, and the third area overlaps with the first area in the plan view, and
a width of the cutout in a second axis direction which intersects with the first axis direction is wider than a width of the third area in the second axis direction.

5. The functional element according to claim 1 ,
wherein a width of the cutout in the first axis direction is wider than a width of the overlap area in the first axis direction in the plan view.

6. The functional element according to claim 5 , wherein:
the substrate has a first area that faces the movable body in the plan view,
the overlap area has second and third areas, the second area overlaps with the cutout in the plan view, and the third area overlaps with the first area in the plan view, and
a width of the cutout in a second axis direction which intersects with the first axis direction is wider than a width of the third area in the second axis direction.

7. The functional element according to claim 1 ,
wherein a material of the substrate is glass, and a material of the stationary member is silicon.

8. The functional element according to claim 7 , wherein:
the substrate has a first area that faces the movable body in the plan view,
the overlap area has second and third areas, the second area overlaps with the cutout in the plan view, and the third area overlaps with the first area in the plan view, and
a width of the cutout in a second axis direction which intersects with the first axis direction is wider than a width of the third area in the second axis direction.

9. The functional element according to claim 1 , wherein:
the substrate has a first area that faces the movable body in the plan view,
the overlap area has second and third areas, the second area overlaps with the cutout in the plan view, and the third area overlaps with the first area in the plan view, and
a width of the cutout in a second axis direction which intersects with the first axis direction is wider than a width of the third area in the second axis direction.

10. An electronic apparatus comprising:
the functional element according to claim 1 .

11. A mobile entity comprising:
the functional element according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Tanaka Satoru

Classifications

• H10W72/981

  Auxiliary members, e.g. spacers · CPC title

• H10W20/43

  Layouts of interconnections · CPC title

• H10W10/0121

  in regions recessed from the surface, e.g. in trenches or grooves · CPC title

• H10W10/13

  formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI] · CPC title

• B81B2203/0118

  Cantilevers · CPC title