Square pulse laser lift off

Patent metadata

Field	Value
Publication number	US-9610651-B2
Application number	US-201514632813-A
Country	US
Kind code	B2
Filing date	Feb 26, 2015
Priority date	Feb 26, 2014
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

A laser lift-off method includes generating a plurality of solid state laser pulses, converting the plurality of solid state laser pulses to an ultraviolet frequency, adjusting the transverse spatial intensity profile of the plurality of laser pulses across perpendicular transverse axes to be rectangular in shape with the shape along each transverse axis corresponds to a super-Gaussian of order eight or higher, and scanning the plurality of laser pulses across the target along a direction parallel to one of the transverse axes in order to produce laser lift-off on the target. Systems for laser lift-off are also disclosed.

First claim

I claim:

1. A laser lift-off method comprising:
generating a plurality of solid state laser pulses;
converting the plurality of solid state laser pulses to an ultraviolet frequency;
adjusting the transverse spatial intensity profile of the plurality of laser pulses across perpendicular transverse axes to be rectangular in shape with the shape along each transverse axis corresponding to a super-Gaussian of order eight or higher; and
scanning the plurality of laser pulses across the target along a direction parallel to one of the transverse axes in order to produce laser lift-off on the target.

2. The method of claim 1 wherein the rectangular shape is a square shape.

3. The method of claim 1 wherein the spatial extent of the scanned laser pulses at the target overlap each other by less than 20%.

4. The method of claim 1 wherein the adjusted transverse spatial intensity profile across each of the perpendicular transverse axes corresponding to a super-Gaussian of order of at least twelve.

5. The method of claim 1 wherein the length of the pulses in the scan direction at the target is at least 1.5 mm or longer.

6. The method of claim 1 wherein the laser pulses delivered to the target each have a pulse fluence of at least 200 mJ/cm 2 .

7. The method of claim 1 wherein a pulse repetition rate of the pulses delivered to the target is at least 10 kHz.

8. The method of claim 1 wherein the solid state laser pulses are generated with a solid state disk laser.

9. The method of claim 1 wherein an aspect ratio of the rectangular pulse is 5:1 or less.

10. A system for causing laser lift-off on a target, the system comprising:
a pulsed solid state laser situated to produce laser pulses having laser pulse parameters selected for laser lift-off;
frequency converter situated to receive the laser pulses and to convert the frequency of the laser pulses;
beam shaping optics situated to receive the laser pulses and to adjust the transverse intensity profile of the laser pulses across perpendicular transverse axes such that the shape of the profile across each transverse axis corresponds to a super-Gaussian of order eight or higher; and
scanning optics situated to direct the spatially adjusted laser pulses to the target along a direction parallel to one of the transverse axes in order to cause laser lift-off on the target.

11. The system of claim 10 wherein the frequency converter converts the laser pulses to an ultraviolet frequency.

12. The system of claim 10 wherein the shape of the adjusted transverse intensity profile is a rectangular shape.

13. The system of claim 12 wherein the rectangular shape has an aspect ratio of 5:1 or less.

14. The system of claim 10 wherein the length of the optical pulses in the scan direction at the target surface is 1.5 mm or wider.

15. The system of claim 10 wherein the laser pulses have a pulse fluence at the target surface of of 200 mJ/cm 2 or more.

16. The system of claim 10 wherein the pulsed solid state laser is a disk laser.

17. The system of claim 10 wherein the pulsed solid state laser is a rod laser.

18. The system of claim 10 wherein the adjusted transverse spatial intensity profile across each of the perpendicular transverse axes corresponds to a super-Gaussian of order of at least twelve.

19. The system of claim 10 wherein the adjusted transverse spatial intensity profile across each of the perpendicular transverse axes corresponds to a super-Gaussian of order of at least fourteen.

20. The system of claim 10 wherein the laser pulses are provided to the target surface at a pulse repetition rate of at least 10 kHz.

Assignees

• Nlight Photonics Corp
• Nlight Inc

Inventors

• Martinsen Robert J

Classifications

• B23K26/40

  taking account of the properties of the material involved · CPC title

• B23K26/082

  Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head · CPC title

• B23K26/362

  Laser etching · CPC title

• B23K2103/56

  being semiconducting · CPC title

• B23K26/361

  for deburring or mechanical trimming (B23K26/351 takes precedence) · CPC title