Substrate processing device and substrate processing method

Patent metadata

Field	Value
Publication number	US-9607867-B2
Application number	US-201615137347-A
Country	US
Kind code	B2
Filing date	Apr 25, 2016
Priority date	Nov 18, 2013
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

The invention provides a substrate processing device and a substrate processing method for cooling a substrate, which are capable of conveying a substrate in a cleaner condition. A substrate cooling device serving as a substrate processing device of an embodiment of the invention includes: a chamber; a cooling unit which performs cooling; a substrate holder which is provided with a substrate mounting surface for mounting a substrate inside the chamber, and is cooled by the cooling unit; and a shield which is provided with a side surface portion surrounding a lateral side of the substrate mounting surface inside the chamber, and is cooled by the cooling unit. Moreover, a shield heater is provided in the vicinity of a surface on the inside of the shield.

First claim

The invention claimed is:

1. A substrate processing device comprising:
a chamber with an exhaust unit configured to evacuate inside the chamber;
a substrate holder provided inside the chamber and including a substrate mounting surface configured to cool a substrate;
a shield provided inside the chamber and including a side wall portion provided to surround a lateral side of the substrate mounting surface;
a shield cooling unit configured to cool the shield; and
a control device configured to control the shield cooling unit to cool the shield before the substrate is mounted on the substrate mounting surface.

2. The substrate processing device according to claim 1 , wherein the shield further comprises an upper wall portion opposed to the substrate mounting surface.

3. The substrate processing device according to claim 2 , wherein a range from an outer peripheral part of the upper wall portion to the side wall portion is provided in a continuously inclined manner, and a diameter of the shield in the side wall portion made smaller than a diameter of the shield in the outer peripheral part of the upper wall portion.

4. The substrate processing device according to claim 1 , wherein the shield further comprises a skirt wall portion to surround a lateral part of the substrate holder.

5. The substrate processing device according to claim 1 , further comprising:
a heater located on the substrate holder side of the shield.

6. A method of cooling the substrate by using the substrate processing device according to claim 1 , comprising the steps of:
mounting the substrate on the substrate mounting surface; and
cooling the substrate in a state where the substrate holder and the shield are cooled.

7. A method of performing maintenance of the substrate processing device according to claim 5 , comprising the step of:
operating the heater in a state where the substrate is not located in the chamber.

8. The method according to claim 7 , wherein the step of operating the heater is performed between a step of cooling a first substrate using the substrate processing device and a step of cooling a second substrate using the substrate processing device.

9. The substrate processing device according to claim 1 , further comprising:
a shield drive mechanism configured to elevate and lower the shield along a normal direction of the substrate mounting surface.

10. A method of cooling the substrate by using the substrate processing device according to claim 9 , comprising the steps of:
moving the substrate to a position located above the substrate mounting surface but not in contact with the substrate mounting surface in a state where the shield is elevated by using the shield drive mechanism;
lowering the shield by using the shield drive mechanism;
mounting the substrate on the substrate mounting surface; and
cooling the substrate in a state where the substrate holder and the shield are cooled.

11. The substrate processing device according to claim 1 , wherein the control device is configured to control the shield cooling unit to cool the shield when a plasma is not generated in the chamber.

Assignees

• Canon Anelva Corp

Inventors

• Kajihara Yuji

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H01L43/10

  Electricity · mapped topic

• H01L21/68742

  Electricity · mapped topic