Fluorine-containing compound, substrate for pattern formation, photodegradable coupling agent, pattern formation method, and compound

Patent metadata

Field	Value
Publication number	US-9606437-B2
Application number	US-201514635583-A
Country	US
Kind code	B2
Filing date	Mar 2, 2015
Priority date	Sep 4, 2012
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

A fluorine-containing compound represented by a following general formula (1) is provided. [In the general formula (1), X represents a halogen atom or an alkoxy group, R 1 represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and R f1 and R f2 represent fluorinated alkoxy groups. n represents an integer of 0 or greater.]

First claim

What is claimed is:

1. A fluorine-containing compound represented by a following general formula (1):

where X represents a halogen atom or a methoxy group, R 1 represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, R f1 and R f2 represent fluorinated alkoxy groups having 5 to 10 carbon atoms, and n represents an integer of 0 to 20.

2. The fluorine-containing compound according to claim 1 ,
wherein R 1 represents an isopropyl group, an isobutyl group, or a tert-butyl group.

3. The fluorine-containing compound according to claim 1 ,
wherein R f1 or R f2 represent fluorinated alkoxy groups having 6 to 10 carbon atoms.

4. A substrate for pattern formation having a surface chemically modified with the fluorine-containing compound according to claim 1 .

5. A photodegradable coupling agent formed of the fluorine-containing compound according to claim 1 .

6. A pattern formation method for forming a pattern on a work surface of an object, the pattern formation method comprising:
chemically modifying the work surface using the fluorine-containing compound according to claim 1 , by applying the fluorine-containing compound to the work surface such that the fluorine-containing compound bonds to the work surface;
generating a latent image formed of a hydrophilic region and a water repellent region by irradiating the chemically modified work surface with light having a predetermined pattern; and
disposing a pattern formation material in the hydrophilic region or the water repellent region.

7. A pattern formation method for forming a circuit pattern for an electronic device on a substrate having flexibility, the pattern formation method comprising:
chemically modifying an entire surface or a specific region of the substrate using the fluorine-containing compound according to claim 1 , by applying the fluorine-containing compound to the entire surface or specific region of the substrate such that the fluorine-containing compound bonds to the entire surface or specific region of the substrate;
generating a latent image of the circuit pattern due to a difference in hydrophilicity and water repellency on the chemically modified surface of the substrate by irradiating with light energy having a distribution corresponding to the circuit pattern; and
bringing a pattern formation material having fluidity into contact with a part of the latent image on the surface of the substrate and capturing the pattern formation material on the substrate in a shape of the circuit pattern by the difference in hydrophilicity and water repellency.

8. The pattern formation method according to claim 6 ,
wherein the pattern formation material includes a liquid conductive material, a liquid semiconductor material, or a liquid insulating material.

9. The pattern formation method according to claim 6 ,
wherein the light includes light having a wavelength included in a range of 200 nm to 450 nm.

10. The pattern formation method according to claim 6 , wherein the applying the fluorine-containing compound to the work surface is performed by dipping or refluxing the substrate to treat the work surface.

11. The pattern formation method according to claim 7 , wherein the applying the fluorine-containing compound to the entire surface or specific region of the substrate is performed by dipping or refluxing the substrate to treat the entire surface or specific region of the substrate.

Assignees

• Univ Kanagawa
• Nikon Corp

Inventors

• Yamaguchi Kazuo

Classifications

• G03F7/2002

  with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• C07C205/56

  having nitro groups bound to carbon atoms of six-membered aromatic rings and carboxyl groups bound to acyclic carbon atoms of the carbon skeleton · CPC title

• C07C49/825

  all hydroxy groups bound to the ring · CPC title

• G03F7/0755 Primary

  Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds (G03F7/0752 takes precedence) · CPC title