Multilevel waveguide structure

Patent metadata

Field	Value
Publication number	US-9606291-B2
Application number	US-201514749907-A
Country	US
Kind code	B2
Filing date	Jun 25, 2015
Priority date	Jun 25, 2015
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

Integrated optical structures include a first wafer layer, a first insulator layer directly connected to the top of the first wafer layer, a second wafer layer directly connected to the top of the first insulator layer, a second insulator layer directly connected to the top of the second wafer layer, and a third wafer layer directly connected to the top of the second insulator layer. Such structures include: a first optical waveguide positioned within the second wafer layer; an optical coupler positioned within the second wafer layer, the second insulator layer, and the third wafer layer; and a second optical waveguide positioned within the third wafer layer. The optical coupler transmits an optical beam from the first optical waveguide to the second optical waveguide through the second insulator layer.

First claim

What is claimed is:

1. An integrated optical structure comprising:
a first wafer layer having a first wafer layer top;
a first insulator layer having a first insulator layer bottom directly connected to said first wafer layer top, and having a first insulator layer top opposite said first insulator layer bottom;
a second wafer layer having a second wafer layer bottom directly connected to said first insulator layer top, and having a second wafer layer top opposite said second wafer layer bottom;
a second insulator layer having a second insulator layer bottom directly connected to said second wafer layer top, and having a second insulator layer top opposite said second insulator layer bottom;
a third wafer layer having a third wafer layer bottom directly connected to said second insulator layer top, and having a third wafer layer top opposite said third wafer layer bottom;
a first optical waveguide positioned within said second wafer layer;
a second optical waveguide positioned within said third wafer layer;
an optical coupler on said first insulator layer and extending vertically through said second wafer layer so as to be positioned laterally adjacent to said first optical waveguide, through said second insulator layer, and through said third wafer layer so as to be positioned laterally adjacent to said second optical waveguide; and
insulators within said second wafer layer and said third wafer layer, said insulators separating said first optical waveguide from said optical coupler within said second wafer layer and separating said second optical waveguide from said optical coupler in said third wafer layer,
said optical coupler transmitting an optical beam from said first optical waveguide to said second optical waveguide through said second insulator layer.

2. The integrated optical structure according to claim 1 , said first optical waveguide comprising a first optical waveguide tapered end adjacent said optical coupler,
said second optical waveguide comprising a second optical waveguide tapered end adjacent said optical coupler,
said optical coupler comprising optical coupler tapered ends adjacent said first optical waveguide tapered end and said second optical waveguide tapered end,
said first optical waveguide tapered end being shaped to direct said optical beam from said first optical waveguide toward said optical coupler,
said optical coupler tapered ends being shaped to direct said optical beam received from said first optical waveguide toward internal spaces of said optical coupler, and to direct said optical beam from said internal spaces of said optical coupler toward said second optical waveguide, and
said second optical waveguide tapered end being shaped to direct said optical beam received from said optical coupler toward internal spaces of said second optical waveguide.

3. The integrated optical structure according to claim 2 , said first wafer layer, said first insulator layer, said second wafer layer, said second insulator layer, and said third wafer layer comprising planar layers lying in different, parallel planes,
said optical coupler directing said optical beam in a first direction perpendicular to said parallel planes, and
said optical coupler tapered ends directing said optical beam in second directions parallel to said parallel planes.

4. The integrated optical structure according to claim 1 , said optical coupler comprising a ring coupler.

5. The integrated optical structure according to claim 1 , said second insulator layer being devoid of devices other than said optical coupler.

6. The integrated optical structure according to claim 1 , further comprising electrical devices positioned on said third wafer layer top.

7. The integrated optical structure according to claim 1 , said first wafer layer being devoid of any devices, and said first wafer layer consisting of only single-crystal silicon.

8. An integrated optical structure comprising:
a first wafer layer having a first wafer layer top;
a first insulator layer having a first insulator layer bottom directly connected to said first wafer layer top, and having a first insulator layer top opposite said first insulator layer bottom;
a second wafer layer having a second wafer layer bottom directly connected to said first insulator layer top, and having a second wafer layer top opposite said second wafer layer bottom;
a second insulator layer having a second insulator layer bottom directly connected to said second wafer layer top, and having a second insulator layer top opposite said second insulator layer bottom;
a third wafer layer having a third wafer layer bottom directly connected to said second insulator layer top, and having a third wafer layer top opposite said third wafer layer bottom;
a first optical waveguide positioned within said second wafer layer;
a second optical waveguide positioned within said third wafer layer; and
an optical coupler positioned within said second wafer layer, said second insulator layer, and said third wafer layer,
said optical coupler transmitting an optical beam from said first optical waveguide to said second optical waveguide through said second insulator layer,
said first optical waveguide comprising a first optical waveguide tapered end adjacent said optical coupler,
said second optical waveguide comprising a second optical waveguide tapered end adjacent said optical coupler,
said optical coupler comprising optical coupler tapered ends adjacent said first optical waveguide tapered end and said second optical waveguide tapered end,
said first optical waveguide tapered end being shaped to direct said optical beam from said first optical waveguide toward said optical coupler,
said optical coupler tapered ends being shaped to direct said optical beam received from said first optical waveguide toward internal spaces of said optical coupler, and to direct said optical beam from said internal spaces of said optical coupler toward said second optical waveguide, and
said second optical waveguide tapered end being shaped to direct said optical beam received from said optical coupler toward internal spaces of said second optical waveguide.

9. The integrated optical structure according to claim 8 , said first wafer layer, said first insulator layer, said second wafer layer, said second insulator layer, and said third wafer layer comprising planar layers lying in different, parallel planes,
said optical coupler directing said optical beam in a first direction perpendicular to said parallel planes, and
said optical coupler tapered ends directing said optical beam in second directions parallel to said parallel planes.

10. The integrated optical structure according to claim 8 , said optical coupler comprising a ring coupler.

11. The integrated optical structure according to claim 8 , said second insulator layer being devoid of devices other than said optical coupler.

12. The integrated optical structure according to claim 8 , further comprising electrical devices positioned on said third wafer layer top.

13. The integrated optical structure according to claim 8 , said first wafer layer being devoid of any devices, and said first wafer layer consisting of only single-crystal silicon.

Assignees

• IBM
• Globalfoundries Inc

Inventors

• Ellis-Monaghan John J
• Harris Brendan S
• Jain Vibhor
• Ngu Yves T
• Ventrone Sebastian T

Classifications

• G02B2006/12147

  Coupler · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B6/13

  Integrated optical circuits characterised by the manufacturing method · CPC title

• G02B2006/12061

  Silicon · CPC title

• G02B2006/12195

  Tapering · CPC title