Small form factor spectrally selective absorber with high acceptance angle for use in gas detection
US-11119037-B2 · Sep 14, 2021 · US
US9606049B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9606049-B1 |
| Application number | US-201514879920-A |
| Country | US |
| Kind code | B1 |
| Filing date | Oct 9, 2015 |
| Priority date | Oct 9, 2015 |
| Publication date | Mar 28, 2017 |
| Grant date | Mar 28, 2017 |
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Gas detector devices, systems, and methods using a Golay cell are described herein. One device includes a microphone having a front surface with an sound collecting aperture for receiving sound, a substrate, a gas cavity formed in the substrate such that the gas cavity is in gas communication with the sound collecting aperture and the front surface forms a side surface of the gas cavity, and a window abutting the substrate to form a side surface of the gas cavity.
Opening claim text (preview).
What is claimed: 1. A gas detector device using a Golay cell, comprising: a microphone having a front surface with a sound collecting aperture for receiving sound; a substrate; a gas cavity formed in the substrate such that the gas cavity is in gas communication with the sound collecting aperture and the front surface forms a side surface of the gas cavity; and a window abutting the substrate to form a side surface of the gas cavity. 2. The device of claim 1 , wherein the substrate includes a first substrate portion abutting the sound collecting surface and wherein the first substrate portion has an aperture formed through the first substrate portion with a first end of the aperture directed toward the sound collecting surface; a second substrate portion abutting the first substrate portion such that the second substrate portion forms side surfaces of a gas cavity and the first substrate portion forms a top surface of the gas cavity such that the gas cavity is in gas communication with the aperture. 3. The device of claim 1 , wherein the window allows transmittance of light through the window. 4. The device of claim 1 , wherein the window is opaque to all light that is not within a particular range of wavelengths. 5. The device of claim 1 , wherein the gas cavity has ambient gas therein. 6. The device of claim 1 , wherein gas cavity has only a particular gas therein. 7. The device of claim 1 , wherein the gas cavity has only a particular set of gases therein. 8. The device of claim 1 , wherein the cavity is sealed such that ambient gas cannot enter the cavity once it is sealed. 9. A gas detecting system using a Golay cell, comprising: a gas detector including: a microphone having front surface with a sound collecting aperture for receiving sound; a substrate abutting the front surface of the microphone; a gas cavity formed in the substrate such that the gas cavity is in gas communication with the aperture; a window abutting the substrate forming a side surface of the gas cavity; an optical generation chamber; and a light source to direct light toward the gas detector. 10. The system of claim 9 , wherein the light source is within the optical generation chamber. 11. The system of claim 9 , wherein the optical generation chamber is formed from at least one wall having a material that includes a gas permeable portion. 12. The system of claim 9 , wherein the optical generation chamber is formed by an interior surface and at least a portion of the surface is reflective. 13. The system of claim 9 , wherein the optical generation chamber is formed by an interior surface and the entire interior surface is reflective. 14. The system of claim 9 , wherein the optical generation chamber is formed within a housing and wherein the housing includes one or more openings to allow ambient gas to pass into and out of the chamber. 15. The system of claim 9 , wherein the light source is an infrared light source. 16. The system of claim 9 , wherein the light source generates infrared light and the window is transparent to the infrared light generated thereby allowing the light to pass through the window. 17. A gas detector using a Golay cell, comprising: a microphone having a sound collecting aperture for receiving sound; a substrate having a first surface abutting the sound collecting surface and a second surface and a gas cavity formed between the first surface and the second surface of the substrate and wherein the gas cavity is in gas communication with the sound collecting aperture; and a window abutting the second surface of the substrate to seal the gas cavity. 18. The detector of claim 17 , wherein the microphone and substrate are hermetically sealed together. 19. The detector of claim 17 , wherein the substrate includes multiple layers. 20. The detector of claim 19 , wherein the layers of the substrate are hermetically sealed together.
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