Small form factor spectrally selective absorber with high acceptance angle for use in gas detection

Patent metadata

Field	Value
Publication number	US-11119037-B2
Application number	US-201716759865-A
Country	US
Kind code	B2
Filing date	Oct 30, 2017
Priority date	Oct 30, 2017
Publication date	Sep 14, 2021
Grant date	Sep 14, 2021

Abstract

Embodiments relate generally to electromagnetic radiation detector devices, systems, and methods using a planar Golay cell. A method for gas detection may comprise providing a gas sealed in a cavity of a gas detector; directing radiative power from a light source through one or more target gases and through a cell body of the gas detector toward the cavity and a wavelength selective absorber of the gas detector, wherein the one or more target gases are located between the light source and the cavity; setting wavelength sensitivity with the wavelength selective absorber, wherein the wavelength sensitivity is irrespective of an angle of incidence (?); absorbing the radiative power by the wavelength selective absorber and by the one or more target gases; detecting, by a pressure sensing element, a pressure change caused by the absorbing of the radiative power; and determining the one or more target gases based on the detected pressure change.

First claim

What is claimed is:

1. A method for gas detection comprising:
providing a gas sealed in a cavity of an electromagnetic radiation detection device;
directing radiative power from a light source, via a ring reflector, through one or more target gases and through a cell body of the electromagnetic radiation detection device toward the cavity and a wavelength selective absorber of the electromagnetic radiation detection device, wherein the one or more target gases are located between the light source and the cavity;
setting wavelength sensitivity with the wavelength selective absorber, wherein the wavelength sensitivity is irrespective of an angle of incidence;
absorbing the radiative power by the wavelength selective absorber and by the one or more target gases;
detecting, by a pressure sensing element, a pressure change caused by the absorption of the radiative power; and
determining the one or more target gases based on the detected pressure change.

2. The method of claim 1 , further comprising determining an amount of radiation that was absorbed by the one or more target gases based on the detected pressure change.

3. The method of claim 1 , further comprising generating heat due to the absorption.

4. The method of claim 1 , further comprising filtering CO 2 , water vapor, or condensed water from an optical path of the radiative power with a particulate filter or an optical filter.

5. The method of claim 1 , further comprising optically, electrically, or mechanically modulating the radiative power.

6. The method of claim 1 , further comprising modulating the radiative power at a frequency of at least about 1 Hz.

7. The method of claim 1 , further comprising refracting, with a refractive element, the radiative power through the one or more target gases and through the cell body of the electromagnetic radiation detection device toward the cavity and the wavelength selective absorber of the electromagnetic radiation detection device.

8. A method for gas detection comprising:
providing a gas sealed in a cavity of an electromagnetic radiation detection device;
directing radiative power from a light source through one or more target gases and through a cell body of the electromagnetic radiation detection device toward the cavity and a wavelength selective absorber of the electromagnetic radiation detection device, wherein the one or more target gases are located between the light source and the cavity;
reflecting, with a ring reflector, the radiative power through the one or more target gases and through the cell body of the electromagnetic radiation detection device toward the cavity and the wavelength selective absorber of the electromagnetic radiation detection device;
setting wavelength sensitivity with the wavelength selective absorber, wherein the wavelength sensitivity is irrespective of an angle of incidence;
absorbing the radiative power by the wavelength selective absorber and by the one or more target gases;
detecting, by a pressure sensing element, a pressure change caused by the absorbing of the radiative power; and
determining the one or more target gases based on the detected pressure change.

9. The method of claim 8 , further comprising providing fluid communication between the pressure sensing element and the cavity.

10. The method of claim 8 , further comprising allowing fluidic connection between two sides of the cavity by way of vias.

11. The method of claim 8 , further comprising determining an amount of radiation that was absorbed by the one or more target gases based on the detected pressure change.

12. The method of claim 8 , further comprising modulating the radiative power at a frequency between 3 Hz and 10,000 Hz.

13. The method of claim 8 , wherein the providing a gas sealed in a cavity comprises providing nitrogen, hydrogen, argon, krypton, xenon, hydrocarbons, fluorocarbons, or combinations thereof.

14. The method of claim 8 , further comprising pressurizing the gas sealed in the cavity at a pressure ranging from 0.1 bar to 10 bar.

15. The method of claim 8 , wherein directing radiative power from a light source comprises directing radiative power from one or more filament bulbs, microelectromechanical systems (MEMS) hotplates, light emitting diodes (LEDs), and/or lasers.

16. The method of claim 8 , further comprising decreasing a sensitivity to acoustical background noise.

17. The method of claim 8 , further comprising modulating the radiative power by acousto-optic modulation, electro-optic modulation, or magneto-optic modulation.

18. The method of claim 8 , further comprising modulating the radiative power by interference gratings or filters, or interferometers.

19. The method of claim 8 , further comprising placing filters in an optical path of the radiative power.

20. The method of claim 8 , further comprising heating the wavelength selective absorber above an ambient temperature.

Assignees

• Honeywell Int Inc

Inventors

• Yang Wei
• Marta Teresa M
• Fritz Bernard
• Willett Martin

Classifications

• G02B5/22

  Absorbing filters {(G02B5/201 - G02B5/208 take precedence)} · CPC title

• G01N21/00

  Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light (G01N3/00 - G01N19/00 take precedence) · CPC title

• G01J5/38

  using extension or expansion of solids or fluids · CPC title

• G01J5/0896

  using a light source, e.g. for illuminating a surface · CPC title

• G01J5/42 Primary

  using Golay cells · CPC title