Bonding material, bonding method and semiconductor device for electric power
US-2016351523-A1 · Dec 1, 2016 · US
US9605334B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9605334-B2 |
| Application number | US-201214345424-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 16, 2012 |
| Priority date | Nov 4, 2011 |
| Publication date | Mar 28, 2017 |
| Grant date | Mar 28, 2017 |
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The present invention is a heat-resistant material comprising a Rh-based alloy, wherein the Rh-based alloy is a high heat-resistant and high strength alloy comprising a Rh-based alloy where Al and W as essential additive elements are added to Rh (0.2 to 15.0 mass % of Al, 15.0 to 45.0 mass % of W and Rh as the remainder), and a γ′ phase (Rh 3 (Al, W)) having an L1 2 structure is dispersed as a strengthening phase in a matrix. The Rh-based alloy of the present invention can be further improved in workability and high temperature oxidation characteristics by optionally adding B, C, Mg, Ca, Y, La or misch metals, Ni, Co, Cr, Fe, Mo, Ti, Nb, Ta, V, Zr, Hf, Ir, Re, Pd, Pt or Ru as an additive element. The Rh-based alloy of the present invention is a heat-resistant material having excellent high-temperature-resistant characteristics and a good balance of factors such as weight.
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What is claimed is: 1. A heat-resistant material comprising a Rh-based alloy, wherein the Rh-based alloy consists of Rh, Al, and W, wherein Al is present in an amount of 0.2 to 15.0 mass % and W is present in an amount from 15.0 to 45.0 mass %; and a γ′ phase (Rh 3 (Al, W)) having an L1 2 structure dispersed as an essential strengthening phase in a matrix. 2. A method for manufacturing the heat-resistant material defined in claim 1 comprising: heat-treating the Rh-based alloy at a temperature of 900 to 1700° C.; and precipitating at least a γ′ phase having an L1 2 structure. 3. A heat-resistant material comprising a Rh-based alloy, wherein the Rh-based alloy consists of Rh, Al, W, and one or more Group I additive elements, wherein Rh is present in an amount of 50 mass % or more, Al is present in an amount of 0.2 to 15.0 mass %, W is present in an amount from 15.0 to 45.0 mass %, and the one or more Group I additive elements are present in a total amount of 0.001 to 2.0 mass %; and a γ′ phase (Rh 3 (Al, W)) having an L1 2 structure dispersed as an essential strengthening phase in a matrix, wherein the one or more Group I additive elements has been selected from the following: Group I: B: 0.001 to 1.0 mass %, C: 0.001 to 1.0 mass %, Mg: 0.001 to 0.5 mass %, Ca: 0.001 to 1.0 mass %, Y: 0.01 to 1.0 mass %, La or a misch metal: 0.01 to 1.0 mass %. 4. A method for manufacturing a heat-resistant material defined in claim 3 comprising: heat-treating the Rh-based alloy at a temperature of 900 to 1700° C.; and precipitating at least a γ′ phase having an L1 2 structure. 5. A heat-resistant material comprising a Rh-based alloy, wherein the Rh-based alloy consists of Rh, Al, W, and one or more Group II additive elements, wherein Rh is present in an amount of 50 mass % or more, Al is present in an amount of 0.2 to 15.0 mass %, W is present in an amount from 15.0 to 45.0 mass %, and the one or more Group II additive elements are present in a total amount of 0.1 to 34.8 mass %; and a γ′ phase (Rh, X) 3 (Al, W, Z) having an L1 2 structure dispersed as an essential strengthening phase in a matrix, wherein X comprises one or more of Co, Fe, Cr, Rh, Re, Pd, Pt and Ru; Z comprises one or more of Mo, Ti, Nb, Zr, V, Ta and Hf, and Ni is included in both X and Z, wherein the one or more Group II additive elements has been selected from the following: Group II: Ni: 0.1 to 34.8 mass %, Co: 0.1 to 34.8 mass %, Cr: 0.1 to 15 mass %, Fe: 0.1 to 2.0 mass %, Mo: 0.1 to 15 mass %, Ti: 0.1 to 10 mass %, Nb: 0.1 to 15 mass %, Ta: 0.1 to 25 mass %, V: 0.1 to 20 mass %, Zr: 0.1 to 15 mass %, Hf: 0.1 to 25 mass %, Re: 0.1 to 25 mass %, Pd: 0.1 to 15 mass %, Pt: 0.1 to 25 mass %, Ru: 0.1 to 15 mass %. 6. A method for manufacturing a heat-resistant material defined in claim 5 comprising: heat-treating the Rh-based alloy at a temperature of 900 to 1700° C.; and precipitating at least a γ′ phase having an L1 2 structure. 7. A heat-resistant material comprising a Rh-based alloy, wherein the Rh-based alloy consists of Rh, Al, W, one or more Group I additive elements, and one or more Group II additive elements, wherein Rh is present in an amount of 50 mass % or more, Al is present in an amount of 0.2 to 15.0 mass %, W is present in an amount from 15.0 to 45.0 mass %, the one or more Group I additive elements are present in a total amount of 0.001 to 2.0 mass %, and the one or more Group II additive elements are present in a total amount of 0.1 to 34.799 mass %; a γ′ phase (Rh 3 (Al, W)) having an L1 2 structure dispersed as an essential strengthening phase in a matrix; and a γ′ phase (Rh, X) 3 (Al, W, Z) having an L1 2 structure dispersed as an essential strengthening phase in a matrix, wherein X comprises one or more of Co, Fe, Cr, Rh, Re, Pd, Pt and Ru; Z comprises one or more of Mo, Ti, Nb, Zr, Ta and Hf, and Ni is included in both X and Z, wherein the one or more Group I additive elements has been selected from the following: Group I: B: 0.001 to 1.0 mass %, C: 0.001 to 1.0 mass %, Mg: 0.001 to 0.5 mass %, Ca: 0.001 to 1.0 mass %, Y: 0.01 to 1.0 mass %, La or a misch metal: 0.01 to 1.0 mass %, and wherein the one or more Group II additive elements has been selected from the following: Group II: Ni: 0.1 to 34.799 mass %, Co: 0.1 to 34.799 mass %, Cr: 0.1 to 15 mass %, Fe: 0.1 to 20 mass %, Mo: 0.1 to 15 mass %, Ti: 0.1 to 10 mass %, Nb: 0.1 to 15 mass %, Ta: 0.1 to 25 mass %, V: 0.1 to 20 mass %, Zr: 0.1 to 15 mass %, Hf: 0.1 to 25 mass %, Re: 0.1 to 25 mass %, Pd: 0.1 to 15 mass %, Pt: 0.1 to 25 mass %, Ru: 0.1 to 15 mass %. 8. A method for manufacturing a heat-resistant material defined in claim 7 comprising: heat-treating the Rh-based alloy at a temperature of 900 to 1700° C.; and precipitating at least a γ′ phase having an L1 2 structure.
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