Subsurface wires of integrated chip and methods of forming

Patent metadata

Field	Value
Publication number	US-9601513-B1
Application number	US-201514977899-A
Country	US
Kind code	B1
Filing date	Dec 22, 2015
Priority date	Dec 22, 2015
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

Various embodiments include methods and integrated circuit structures. One method includes masking a structure with a mask to cover at least a portion of the structure under the mask, selectively implanting a material through a semiconductor layer and into a buried insulator layer forming an implant region. The implant region is substantially parallel to and below an upper surface of the structure. The method may also include masking an additional portion of the structure; etching a set of access ports though the semiconductor layer and partially through the insulator layer into the implant region; etching at least one tunnel below the upper surface of the structure in the implant region using the set of access; and depositing a conductor into the at least one tunnel and the set of access ports.

First claim

We claim:

1. A method comprising:
masking a structure with a mask to cover at least a portion of the structure under the mask, the structure comprising: a substrate, a buried insulator layer disposed above the substrate, and a semiconductor layer disposed above the buried insulator layer;
implanting a material through the semiconductor layer and into the buried insulator layer forming an implant region, wherein the implant region is substantially parallel to and below an upper surface of the structure;
masking an additional portion of the structure with an additional mask to cover an additional portion under the additional mask;
etching a set of access ports though the semiconductor layer and partially through the insulator layer into the implant region in the buried insulator layer;
etching at least one tunnel below the upper surface of the structure in the implant region using the set of access ports by removing at least a portion of the implant region; and
depositing a conductor into the at least one tunnel and the set of access ports.

2. The method of claim 1 , wherein the material comprises silicon.

3. The method of claim 1 , wherein the conductor includes at least one of a group comprising: doped polysilicon, tungsten, and indium.

4. The method of claim 1 , wherein the etching of the set of access points comprises reactive-ion etching (RIE) etching.

5. The method of claim 1 , wherein the etching of the at least one tunnel comprises vapor hydrofluoric acid (Vapor HF) etching.

6. The method of claim 1 , further comprising:
planarizing, following the depositing, the upper surface of the structure; and
forming a transistor on the upper surface of the structure.

7. The method of claim 6 , further comprising:
contacting the conductor to a set of wiring layers electrically connected to a set of contacts disposed above the transistor.

8. The method of claim 1 , wherein a center of the at least one tunnel is approximately 50 nanometers (nm) to approximately 150 nm below a bottom surface of the semiconductor layer.

9. The method of claim 8 , wherein the at least one tunnel is between approximately 100 nm and approximately 1000 nm long, approximately 50 nm wide, and approximately 50 nm deep.

10. A method comprising:
masking a structure with a mask to cover at least a portion of the structure under the mask, the structure comprising: a substrate, a buried insulator layer disposed above the substrate, and a semiconductor layer disposed above the buried insulator layer, and a transistor above the semiconductor layer;
implanting a material through the transistor and semiconductor layer and into the buried insulator layer, forming an implant region, wherein the implant region is substantially parallel to and below an upper surface of the structure;
masking an additional portion of the structure with an additional mask to cover the transistor;
etching a set of access ports though the semiconductor layer and partially through the buried insulator layer into the implant region in the buried insulator layer;
etching at least one tunnel below the upper surface of the structure in the implant region using the set of access ports by removing at least a portion of the implant region; and
depositing a conductor into the at least one tunnel and the set of access ports.

11. The method of claim 10 , wherein the material comprises silicon.

12. The method of claim 10 , wherein the conductor includes at least one of a group comprising: doped polysilicon, tungsten, and indium.

13. The method of claim 10 , wherein the etching of the set of access points comprises reactive-ion etching (RIE) etching.

14. The method of claim 10 , wherein the etching of the at least one tunnel comprises vapor hydrofluoric acid (Vapor HF) etching.

15. The method of claim 10 , further comprising:
planarizing an upper surface of the structure.

16. The method of claim 15 , further comprising:
contacting the conductor to a set of wiring layers electrically connected to a set of contacts disposed above the transistor.

17. The method of claim 10 , wherein the at least one tunnel is between approximately 50 nanometers (nm) and approximately 150 nm below a bottom surface of the semiconductor layer, and wherein the at least one tunnel is between approximately 100 nm and approximately 1000 nm long, approximately 50 nm wide, and approximately 50 nm deep.

Assignees

• Globalfoundries Inc

Inventors

• Hook Terence B
• Scholze Andreas
• Liebmann Lars W
• Quon Roger A
• Simon Andrew H

Classifications

• H10P50/283

  by chemical means · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10P30/40

  into insulating materials · CPC title

• H10P30/22

  using masks · CPC title

• H10W20/4451

  Semiconductor materials, e.g. polysilicon · CPC title