Method and apparatus with tiled image sensors

Patent metadata

Field	Value
Publication number	US-9599723-B2
Application number	US-201514828772-A
Country	US
Kind code	B2
Filing date	Aug 18, 2015
Priority date	Aug 18, 2015
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

An M×N array of sensor tiles are attached to a substrate using a compliant film that includes an adhesive. A thickness of the compliant film varies depending on a thickness of the sensor tiles so that outward facing sides of the sensor tiles are coplanar.

First claim

What is claimed:

1. An imaging device comprising:
an M×N array of sensor tiles, wherein M and N are positive integers;
a substrate facing a bottom side of each of the sensor tiles;
a sheet between the array of sensor tiles and the substrate, the sheet comprising a compressible, compliant material; and
a first adhesive between the array of sensor tiles and the substrate, the first adhesive contacting the sheet, the substrate, and the bottom side of the sensor tiles.

2. The apparatus of claim 1 , wherein the substrate comprises a top surface facing the bottom side of each of the sensor tiles, and wherein the apparatus further comprises electronic circuits attached to the top surface of the substrate.

3. The apparatus of claim 2 , wherein the electronic circuits are electrically connected to the array of sensor tiles.

4. The apparatus of claim 2 , further comprising a second adhesive between the electronic circuits and the top surface of the substrate, wherein the second adhesive is the same as, or different from, the first adhesive.

5. The apparatus of claim 1 , wherein top sides of the sensor tiles are aligned in a common plane, the bottom sides of two of the sensor tiles are each aligned in a different plane, and wherein the sheet is compressed against the substrate to a different thickness by each of said two of the sensor tiles.

6. The apparatus of claim 1 , further comprising a scintillator material over the top surface of the sensor tiles.

7. The apparatus of claim 1 , wherein the sheet is perforated, the first adhesive is disposed in the perforations of the sheet, and wherein a surface of the perforated sheet that faces the sensor tiles comprises a lower coefficient of friction than a surface of the sheet that faces the substrate.

8. The apparatus of claim 1 , wherein a gap between adjacent edges of two of the sensor tiles is less than a mean dimension of the pixels of the sensor tiles.

9. The apparatus of claim 1 , wherein the first adhesive, when cured, comprises an elastic modulus at least about 10000 times greater than an elastic modulus of the sheet.

10. A method of fabricating a tiled sensor array, the method comprising:
providing a substantially flat surface;
aligning a plurality of sensor tiles using the flat surface;
providing a substrate;
placing a compliant film in contact with the substrate;
disposing an adhesive in contact with the substrate and with the compliant film;
pressing the compliant film against the back sides of the plurality of sensor tiles including disposing an adhesive in contact with the substrate and with the back sides of the plurality of sensor tiles; and
removing the substantially flat surface to release the tiled sensor array comprising the substrate and the plurality of sensor tiles with the compliant film adhered therebetween.

11. The method of claim 10 , wherein the compliant film comprises a plurality of perforations therethrough, the step of disposing comprises disposing the adhesive into the plurality of perforations such that the adhesive is in contact with the substrate, and wherein the step of pressing comprises the adhesive in the perforations contacting the back sides of the plurality of sensor tiles.

12. The method of claim 11 , wherein the flat surface comprises a plurality of alignment markings, and wherein the step of aligning the plurality of sensor tiles includes aligning the sensor tiles to the markings.

13. The method of claim 11 , wherein the step of aligning the plurality of sensor tiles includes viewing the alignment markings and the sensor tiles using a camera while moving the sensor tiles into alignment.

14. The method of claim 11 , wherein the flat surface comprises channels to provide a vacuum path to a vacuum source, and the method further includes holding the sensor tiles on the flat surface in an aligned position using the vacuum source after the step of aligning the plurality of sensor tiles.

15. The method of claim 11 , wherein the step of aligning the plurality of sensor tiles comprises securing the sensor tiles to a transfer mechanism using a vacuum source.

16. The method of claim 11 , wherein the compliant film comprises a first surface and a second surface, the first surface of the compliant film having a coefficient of friction greater than the second surface, and wherein the method further comprises placing the first surface of the compliant film in contact with the substrate.

17. The method of claim 11 , wherein the plurality of sensor tiles each have a photosensitive surface, and the method further comprises placing the photosensitive surface in contact with the flat surface.

18. An apparatus comprising:
an M×N array of photosensitive tiles, wherein M and N are positive integers;
a substrate facing a bottom side of each of the sensor tiles; and
a compliant film between the array of photosensitive tiles and the substrate, wherein the film includes adhesive for securing together the substrate and the array of photosensitive tiles, a thickness of the compliant film is different between the substrate and a first one of the tiles compared to its thickness between the substrate and a second one of the tiles, and wherein top sides of the sensor tiles are coplanar.

19. The apparatus of claim 18 , wherein the compliant film comprises a plurality of perforations therethrough, the perforations comprise an adhesive therein, and wherein the adhesive in each perforation is in contact with the substrate and with one of the photosensitive tiles.

20. The apparatus of claim 18 , wherein a deviation of the tiles from a planar shape is equal to or less than about 0.3 mm.

Assignees

• Carestream Health Inc

Inventors

• Jadrich Bradley S
• Shafer Mark E
• Tickner Edward A
• Entz Steven F
• Wojcik Timothy J

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10F71/00

  Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00) · CPC title

• H10F39/018

  of hybrid image sensors · CPC title

• H10F39/195

  X-ray, gamma-ray or corpuscular radiation imagers · CPC title

• H10F39/1898

  Indirect radiation image sensors, e.g. using luminescent members · CPC title