Vessel with filter

Patent metadata

Field	Value
Publication number	US-9598766-B2
Application number	US-201313897967-A
Country	US
Kind code	B2
Filing date	May 20, 2013
Priority date	May 27, 2012
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.

First claim

The invention claimed is:

1. A method for dispensing a precursor-containing fluid stream comprising a gaseous phase of a precursor from a vessel, the method comprising:
providing a vessel comprising an interior volume defined by a top, one or more sidewalls, and a base; said vessel having a precursor in the interior volume and at least one fluid outlet for vaporized precursor, said vessel having at least one particle barrier that defines at least part of at least one particle restricted space within the interior volume, wherein said at least one particle barrier comprises at least one 3-dimensional filter;
vaporizing the precursor to form the fluid stream, wherein said at least one particle barrier prevents particles in said fluid stream from passing into the at least one particle restricted space wherein prior to said vaporizing step the solid precursor is prepared in a vessel, by any one or more of the following preparing steps: (a) heating the precursor under conditions to sinter loose precursor particles into a solid; (b) heating the precursor under conditions to allow the solid precursor to melt and cooling the precursor below the precursor's melting point to form a solid; (c) introducing the precursor dissolved in a solvent into the vessel; and heating the precursor under conditions sufficient to remove residual solvent to form a solid.

2. The method of claim 1 , further wherein said at least one particle restricted space is in fluid communication with the at least one outlet and in particle restricted fluid communication with the remainder of the interior volume and further comprising after the vaporizing step, the steps of:
passing said fluid stream through said at least one particle barrier from said interior volume into said at least one particle restricted space; and
exiting the vessel with said fluid stream through the at least one outlet.

3. The method of claim 1 , further comprising the step of:
introducing at least one carrier gas into the vessel through at least one inlet wherein the at least one carrier gas and the gaseous phase of the precursor combine to form the fluid stream.

4. The method of claim 3 further comprising the step of flowing the at least one carrier gas through at least one second particle restricted space in fluid communication with said at least one inlet, said second particle restricted space comprising at least one particle barrier located in the interior volume of said vessel.

5. The method of claim 3 wherein said precursor is located at or near the base of said container and said carrier gas flows from said at least one inlet that passes through the lid towards the base of the vessel.

Assignees

• Air Prod & Chem
• Air Prod & Chem

Inventors

• Birtcher Charles Michael
• Steidl Thomas Andrew
• Lei Xinjian
• Ivanov Sergei Vladimirovich

Classifications

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• C23C16/455 Primary

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title

• Y10T137/794

  With means for separating solid material from the fluid · CPC title

• C23C16/4481 Primary

  by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title

• Y10T137/4891

  With holder for solid, flaky or pulverized material to be dissolved or entrained · CPC title