Crystalline magnetic layer to amorphous substrate bonding

Patent metadata

Field	Value
Publication number	US-9595274-B2
Application number	US-201514811303-A
Country	US
Kind code	B2
Filing date	Jul 28, 2015
Priority date	Dec 18, 2012
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

Various methods for attaching a crystalline write pole onto an amorphous substrate and the resulting structures are described in detail herein. Further, the resulting structure may have a magnetic moment exceeding 2.4 Tesla. Still further, methods for depositing an epitaxial crystalline write pole on a crystalline seed or template material to ensure that the phase of the write pole is consistent with the high moment phase of the template material are also described in detail herein.

First claim

What is claimed is:

1. A method of manufacturing an article, the method comprising:
attaching one or more epitaxial crystalline layers to an amorphous substrate by:
bonding a nonmagnetic crystalline template layer to the amorphous substrate;
patterning trenches in the nonmagnetic crystalline template layer bonded to the amorphous substrate; and
depositing additional nonmagnetic crystalline template material within the patterned trenches and over the nonmagnetic crystalline template, prior to depositing a magnetic epitaxial crystalline layer on the nonmagnetic crystalline template layer, wherein the magnetic moment of the article is greater than 2.4 Tesla.

2. The method of claim 1 , wherein the bonding includes bonding a first part of the nonmagnetic crystalline template layer having a thickness of less than 300 nm to the amorphous substrate.

3. The method of claim 2 , further comprising:
separating the first part of the nonmagnetic crystalline template layer from a second part of the nonmagnetic crystalline template layer having a thickness of greater than 100micrometers prior to the depositing step.

4. The method of claim 3 , wherein the separating comprises dissolving a release layer between the first part and the second part of the nonmagnetic crystalline template layer.

5. The method of claim 1 , wherein depositing additional nonmagnetic crystalline template material comprises depositing the additional nonmagnetic crystalline template material with an angled growth mode that traps defects caused by depositing the additional nonmagnetic crystalline template material directly on the amorphous substrate within the patterned trenches.

6. The method of claim 1 , further comprising:
depositing a magnetic epitaxial crystalline layer on a nonmagnetic crystalline template layer; and
extracting the magnetic epitaxial crystalline layer from the nonmagnetic crystalline template layer, prior to the attaching operation.

7. The method of claim 6 , wherein the extracting and attaching operations are accomplished using a flexible stamp removably attached to the magnetic epitaxial crystalline layer.

8. The method of claim 6 , further comprising:
patterning the deposited magnetic epitaxial crystalline layer into individual islands of magnetic material; and
etching away nonmagnetic crystalline template material underneath the individual islands of magnetic material, prior to the extracting operation.

9. The method of claim 8 , wherein the attaching operation includes bonding the individual islands of magnetic material to the amorphous substrate.

10. A method of manufacturing an article, the method comprising:
attaching a nonmagnetic crystalline template layer comprising gallium arsenide directly to the amorphous substrate; and
depositing a magnetic epitaxial crystalline layer on the nonmagnetic crystalline template layer, wherein the magnetic moment of the article is greater than 2.4 Tesla.

11. The method of claim 10 , wherein attaching the nonmagnetic crystalline template layer comprises attaching a nonmagnetic crystalline template layer comprising:
a first part bonded to the amorphous substrate with trenches patterned therein;
a second epitaxial part deposited within the patterned trenches of the first part; and
a third epitaxial part deposited over the first part and the second epitaxial part, wherein defects within the second epitaxial part do not propagate to the third epitaxial part.

12. The method of claim 11 , wherein the second epitaxial part is deposited within the patterned trenches of the first part with an angled growth mode that traps defects caused by depositing the second epitaxial part directly on the amorphous substrate within the patterned trenches.

13. The method of claim 11 , wherein the magnetic epitaxial crystalline layer is deposited on the third epitaxial part of the nonmagnetic crystalline template layer.

14. A method of manufacturing an article, the method comprising:
providing a template wafer comprising a crystalline magnetic epitaxial layer and a template crystalline substrate;
patterning the crystalline magnetic epitaxial layer into individual islands of crystalline magnetic material;
removing the individual islands of crystalline magnetic material from the template crystalline substrate; and
bonding the removed individual islands of crystalline magnetic material to an amorphous substrate.

15. The method of claim 14 , further comprising:
after patterning and before removing the individual islands of crystalline magnetic material, etching cavities in the template crystalline substrate immediately proximate to the individual islands of magnetic material.

16. The method of claim 15 , further comprising:
after etching cavities in the template crystalline substrate, removably attaching a flexible stamp to the individual islands of crystalline magnetic material; and
releasing the flexible stamp from the individual islands of crystalline magnetic material after bonding the removed individual islands of crystalline magnetic material to an amorphous substrate.

17. The method of claim 14 , wherein a magnetic moment of the article of manufacture is greater than 2.4 Tesla.

Assignees

• Seagate Technology Llc

Inventors

• Gubbins Mark Anthony
• Mooney Marcus Benedict

Classifications

• Y10T428/115

  Magnetic layer composition · CPC title

• G11B5/3173

  Batch fabrication, i.e. producing a plurality of head structures in one batch · CPC title

• G11B5/3153 Primary

  including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure · CPC title

• C09K13/08

  containing a fluorine compound · CPC title

• Y10T428/1186

  with head pole component · CPC title