Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US9593170B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9593170-B2 |
| Application number | US-201414889793-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 2, 2014 |
| Priority date | May 9, 2013 |
| Publication date | Mar 14, 2017 |
| Grant date | Mar 14, 2017 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A compound that increases the photocuring rate of a photocurable composition and reduces the force for releasing a cured product from a mold is provided. A compound is represented by general formula (1): where R f represents an alkyl group at least part of which is substituted with fluorine, R O represents an oxyalkylene group or a repeated structure of an oxyalkylene group, N represents a nitrogen atom, R A represents an alkyl group, and R B represents an alkyl group or a hydrogen atom.
Opening claim text (preview).
The invention claimed is: 1. A photocurable composition comprising: a component (A) which is a polymerizable compound; a component (B) which is a photopolymerization initiator; and a component (C) which is a compound represented by general formula (1): where R f represents an alkyl group at least part of which is substituted with fluorine, R O represents a repeated structure of an oxyalkylene group or an oxypropylene group, N represents a nitrogen atom, R A represents an alkyl group, and R B represents an alkyl group or a hydrogen atom. 2. A photocurable composition comprising: a component (A) which is a polymerizable compound; a component (B) which is a photopolymerization initiator; and a component (C) which is a compound represented by general formula (1): where R f represents an alkyl group at least part of which is substituted with fluorine, R O represents an oxyalkylene group or a repeated structure of an oxyalkylene group, N represents a nitrogen atom, R A represents an alkyl group, and R B represents an alkyl group or a hydrogen atom. 3. The photocurable composition according to claim 2 , wherein R B represents an alkyl group. 4. The photocurable composition according to claim 3 , wherein R A and R B each represent a linear alkyl group having 1 to 5 carbon atoms. 5. The photocurable composition according to claim 2 , wherein the compound represented by general formula (1) is a compound represented by general formula (5): where a represents an integer in a range of 1 to 25, b represents an integer in a range of 0 to 25, c represents an integer in a range of 1 to 25, R 1 represents an alkyl group, and R 2 represents an alkyl group or hydrogen. 6. The photocurable composition according to claim 5 , wherein a, b, and c in general formula (5) each independently represent an integer in a range of 1 to 10. 7. The photocurable composition according to claim 5 , wherein b in general formula (5) represents an integer in a range of 1 to 5. 8. The photocurable composition according to claim 5 , wherein R 2 in general formula (5) represents an alkyl group. 9. The photocurable composition according to claim 8 , wherein R 1 and R 2 in general formula (5) each represent a linear alkyl group having 1 to 5 carbon atoms. 10. A method for producing a patterned film, the method comprising: a placement step of placing the photocurable composition according to claim 2 on a substrate; a mold contact step of bringing the photocurable composition into contact with a mold having an original pattern for transferring a pattern shape; an irradiation step of irradiating the photocurable composition with light to form a cured film; and a mold releasing step of releasing the cured film from the mold. 11. The method according to claim 10 , wherein a surface of the original pattern of the mold has hydroxyl groups. 12. The method according to claim 11 , wherein the surface of the original pattern of the mold is composed of quartz. 13. The method according to claim 10 , wherein the mold contact step is performed in an atmosphere composed of a gas containing a condensable gas. 14. The method according to claim 13 , wherein the gas containing the condensable gas is a gas mixture containing helium and the condensable gas. 15. The method according to claim 13 , wherein the condensable gas is 1,1,1,3,3-pentafluoropropane. 16. A method for producing an optical component, the method comprising: a step of obtaining a patterned film on a substrate by the method according to claim 10 . 17. A method for producing an optical component, the method comprising: a step of obtaining a patterned film by the method according to claim 10 ; and a step of etching or ion-implanting the substrate by using a pattern shape of the obtained patterned film as a mask. 18. A method for producing a circuit board, the method comprising: a step of obtaining a patterned film by the method according claim 10 ; a step of etching or ion-implanting the substrate by using a pattern shape of the obtained patterned film as a mask; and a step of forming an electronic part on the substrate. 19. A method for forming an electronic component, the method comprising: a step of obtaining a circuit board by the method according to claim 18 ; and a step of connecting the circuit board to a controlling mechanism for controlling the circuit board. 20. A cured product obtained by curing the photocurable composition according to claim 2 . 21. The photocurable composition according to claim 2 , wherein a blend ratio of the component (C) is 0.001% by weight or more and 10% by weight or less relative to a total weight of the polymerizable compound serving as the component (A). 22. The photocurable composition according to claim 2 , further comprising a hydrogen donor, wherein the ratio of the hydrogen donor is 0% or more and 20% by weight or less relative to a total weight of the polymerizable compound serving as the component (A). 23. The photocurable composition according to claim 2 , wherein a viscosity of the photocurable composition is 5 cP or more and 50 cP or less in terms of a viscosity of a mixture of the components other than a solvent at 23° C.
characterised by their composition, e.g. multilayer masks or materials · CPC title
of insulating materials · CPC title
carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title
Masks · CPC title
Assembling printed circuits with electric components, e.g. with resistors · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.