Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same

Patent metadata

Field	Value
Publication number	US-9586979-B2
Application number	US-201414896156-A
Country	US
Kind code	B2
Filing date	Jun 5, 2014
Priority date	Jun 7, 2013
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

Provided are a novel amino-silyl amine compound, a method for preparing the same, and a silicon-containing thin-film using the same, wherein the amino-silyl amine compound has thermal stability and high volatility and is maintained in a liquid state at room temperature and under a pressure where handling is easy to thereby form a silicon-containing thin-film having high purity and excellent physical and electrical properties by various deposition methods.

First claim

The invention claimed is:

1. An amino-silyl amine compound of Chemical Formula 1:

wherein,
R1 to R4 are each independently hydrogen, halogen, (C1-C7)alkyl, (C2-C7)alkenyl, (C2-C7)alkynyl, (C3-C7)cycloalkyl or (C6-C12)aryl;
R5 to R6 are each independently (C1-C7)alkyl, (C2-C7)alkenyl, (C2-C7)alkynyl, (C3-C10)cycloalkyl or (C6-C12)aryl, or are linked to form 5- to 7-membered alicyclic ring;
R7 to R8 are each independently hydrogen, (C1-C7)alkyl, (C2-C7)alkenyl, (C2-C7)alkynyl, (C3-C10)cycloalkyl or (C6-C12)aryl, or are linked to form 5- to 7-membered alicyclic ring; and
the alkyl, alkenyl, alkynyl, cycloalkyl, and aryl of R1 to R4, and the alkyl, alkenyl, alkynyl, cycloalkyl, and aryl of R5 to R8 can further substituted with halogen, (C1-C7)alkyl, (C1-C7)alkoxy, or (C1-C7)aryloxy.

2. The amino-silyl amine compound of claim 1 , wherein
R1 to R4 are each independently hydrogen, halogen, (C1-C5)alkyl, (C2-C5)alkenyl, (C2-C5)alkynyl, (C3-C6)cycloalkyl or (C6-C10)aryl;
R5 to R6 are each independently (C1-C5)alkyl, (C2-C5)alkenyl, (C2-C5)alkynyl, (C3-C5)cycloalkyl or (C6-C10)aryl; and
R7 to R8 are each independently hydrogen, (C1-C5)alkyl, (C2-C5)alkenyl, (C2-C5)alkynyl, (C3-C5)cycloalkyl or (C6-C10)aryl.

3. The amino-silyl amine compound of claim 2 , wherein
R1 to R4 are each independently hydrogen or (C1-C5)alkyl;
R5 to R6 are each independently (C1-C5)alkyl, and
R7 to R8 are each independently hydrogen or (C1-C5)alkyl.

4. The amino-silyl amine compound of claim 1 , wherein
the Chemical Formula 1 is selected from the following compounds:

5. The amino-silyl amine compound of claim 1 , wherein
R1 to R4 are each independently hydrogen, (C1-C2)alkyl, or (C2)alkenyl;
R5 to R6 are each independently (C1-C3)alkyl or are linked to form a 5-membered alicyclic ring; and
R7 to R8 are each independently hydrogen, (C1-C7)alkyl, (C2-C7)alkenyl, (C2-C7)alkynyl, (C3-C10)cycloalkyl or (C6-C12)aryl, or are linked to form 5- to 7-membered alicyclic ring.

6. The amino-silyl amine compound of claim 1 , wherein
R1 to R4 are each independently hydrogen, (C1-C2)alkyl, or (C2)alkenyl;
R5 to R6 are each independently (C1-C3)alkyl or are linked to form a 5-membered alicyclic ring; and
R7 to R8 are each independently hydrogen or (C1-C7)alkyl.

Assignees

• Dnf Co Ltd

Inventors

• Jang Se Jin
• Lee Sang-Do
• Kim Sung Gi
• Yang Byeong-Il
• Seok Jang Hyeon
• Lee Sang Ick
• Kim Myong Woon

Classifications

• C07F7/10 Primary

  containing nitrogen {having a Si-N linkage} · CPC title