Phase characterization of targets

Patent metadata

Field	Value
Publication number	US-9581430-B2
Application number	US-201314057827-A
Country	US
Kind code	B2
Filing date	Oct 18, 2013
Priority date	Oct 19, 2012
Publication date	Feb 28, 2017
Grant date	Feb 28, 2017

Abstract

Systems and methods are provided which derive target characteristics from interferometry images taken at multiple phase differences between target beams and reference beams yielding the interferometry images. The illumination of the target and the reference has a coherence length of less than 30 microns to enable scanning the phase through the coherence length of the illumination. The interferometry images are taken at the pupil plane and/or in the field plane to combine angular and spectroscopic scatterometry data that characterize and correct target topography and enhance the performance of metrology systems.

First claim

What is claimed is:

1. A system comprising:
an illumination source arranged to produce electromagnetic radiation having a coherence length of less than 30 microns;
a reference optical element;
a phase controlled interferometer arranged to:
receive the radiation from the illumination source;
split the radiation between a target and the reference optical element, wherein the interferometer is arranged to controllably introduce a phase between radiation directed to the target and to the reference optical element; and,
generate, from reflected radiation from the target and from the reference optical element, an interference beam;

an imaging unit arranged to receive the interference beam and generate a plurality of interferometry images derived using phase characterization corresponding to different introduced phases at at least one of a pupil plane and a field plane, wherein the plurality of interferometry images are used to introduce a phase difference with the phase controlled interferometer to refine a focus signal calculation.

2. The system of claim 1 , wherein the illumination source is arranged to produce radiation having at least one band within a wavelength range of 170-900 micron.

3. The system of claim 1 , wherein the reference optical element comprises a reference objective which is identical to a target objective and a mirror.

4. The system of claim 1 , wherein the reference optical element comprises a mirror.

5. The system of claim 1 , wherein the phase controlled interferometer comprises a beam splitter which is mechanically adjustable to control the introduced phase.

6. The system of claim 5 , wherein the phase controlled interferometer is arranged to scan the phase through the coherence length of the radiation.

7. The system of claim 1 , wherein the imaging unit is arranged to generate the interferometry images at the pupil plane.

8. The system of claim 1 , wherein the imaging unit is arranged to generate the interferometry images at the field plane.

9. The system of claim 1 , wherein the imaging unit is arranged to generate corresponding interferometry images at both pupil and field planes.

10. The system of claim 1 , wherein the imaging unit comprises a beam splitter arranged split the interferometry images between a pupil camera and a field camera.

11. The system of claim 1 , wherein the at least one target characteristic comprises at least one of: target topography, target side wall angles (SWA), a target asymmetry merit, film thickness, film optical parameters and exposed layer quality before layer development.

12. The system of claim 1 , wherein the phase controlled interferometer is further arranged to refine focusing by introducing a phase difference derived from the interferometry images.

Assignees

• Kla Tencor Corp

Inventors

• Manassen Amnon
• Bachar Ohad
• Negri Daria
• Golovanevsky Boris
• Bringoltz Barak
• Kandel Daniel
• Feler Yoel
• Sapiens Noam
• Irina Paykin
• Svizher Alexander
• Aloni Meir
• Dov Guy Ben
• Shalmoni Hadar
• Levinski Vladimir

Classifications

• G01B9/02027

  Two or more interferometric channels or interferometers · CPC title

• G01B9/02087

  Combining two or more images of the same region · CPC title

• G01B9/0209 Primary

  Low-coherence interferometers · CPC title

• G01N21/45

  using interferometric methods; using Schlieren methods · CPC title

• G01B9/02043

  Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging · CPC title