Gauge for installation of liners in substrate spin coating tools

Patent metadata

Field	Value
Publication number	US-9574864-B2
Application number	US-201514671058-A
Country	US
Kind code	B2
Filing date	Mar 27, 2015
Priority date	Mar 27, 2015
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

A gauge and method of use. The gauge includes a body configured to removeably mount to substrate chuck of a spin apply coating tool, the body rotatable about an axis passing through a center of the chuck; an extendable arm having a first end mounted to the body, the extendable arm having a retracted position and a deployed position, a second end of the arm including an upper finger and a lower finger, the upper finger configured to be positioned above a rim of the coat apply bowl and the lower finger positioned below the rim of the coat apply bowl in the deployed position when the coat apply bowl is mounted in the spin apply tool; and wherein the gauge provides an error indication when the gauge is rotated about the axis and the coat apply bowl is not installed in the spin apply coating tool correctly.

First claim

What is claimed is:

1. A gauge comprising:
a body configured to removeably mount to substrate chuck of a spin apply coating tool, said body rotatable about an axis passing through a center of said chuck;
an extendable arm having a first end mounted to said body, said extendable arm having a retracted position and a deployed position, a second end of said arm including an upper finger and a lower finger, said upper finger configured to be positioned above a rim of a coat apply bowl and said lower finger positioned below said rim of said coat apply bowl in said deployed position when said coat apply bowl is mounted in said spin apply tool; and
wherein said gauge provides an error indication when said gauge is rotated about said axis and said coat apply bowl is not installed in said spin apply coating tool correctly.

2. The gauge of claim 1 , wherein said gauge provides said error indication when said gauge is rotated about said axis and either said upper finger or lower finger touch said rim of said coat apply bowl at any point during said rotation.

3. The gauge of claim 1 , wherein said gauge does not provide said error indication when said gauge is rotated about said axis and neither said upper finger nor lower finger touch said rim of said coat apply bowl at any point during said rotation.

4. The gauge of claim 1 , wherein said error indication is visual, audio, or tactual.

5. The gauge of claim 1 , wherein said error indication is a scraping noise, resistance to rotation or movement of the coat apply bowl.

6. The gauge of claim 1 , further including a handle attached to a top surface of said body, said handle adapted to allow said body to be turned 360° about said axis.

7. The gauge of claim 1 , further including one or more view ports in a sidewall of said body to provide visual inspection of a position of a coat apply shield installed on said spin apply coating tool under said coat apply bowl.

8. The gauge of claim 1 , wherein a top surface of said substrate chuck defines a reference plane and a distance between said upper finger and said lower finger defines a tolerance around the height of said rim of said coat apply bowl above said reference plane.

9. The gauge of claim 1 , wherein said body has the form of a cylinder having a closed top and open bottom and said substrate chuck is circular.

10. The gauge of claim 9 , further including a pin extending from a bottom surface of said closed top toward said open bottom, said pin configured to rotateably engage a hole in a top surface of said substrate chuck.

11. A method comprising:
(a) providing a spin apply coating tool having substrate chuck and a coat apply bowl installed in said spin apply coating tool;
(b) providing a gauge comprising:
a body configured to removeably mount to said substrate chuck, said body rotatable about an axis passing through a center of said substrate chuck; and
an extendable arm having a first end mounted to said body, said extendable arm having a retracted position and a deployed position, a second end of said arm including an upper finger and a lower finger, said upper finger configured to be positioned above a rim of said coat apply bowl and said lower finger positioned below said rim of said coat apply bowl in said deployed position when said coat apply bowl is mounted in said spin apply tool;

(c) placing said gauge on said substrate chuck and moving said arm to said deployed position and rotating said gauge at least 360° about said axis; and
(d) if said gauge provides an error indication, moving arm to said retracted position, removing said gauge from said substrate and repositioning or replacing said coat apply bowl and repeating steps (c) and (d); and if said gauge does not provides an error indication, moving said arm to said retracted position, removing said gauge from said substrate, and releasing said spin apply coating tool for production.

12. The method of claim 11 , said gauge providing said error indication when said gauge is rotated about said axis and either said upper finger or lower finger touch said rim of said coat apply bowl at any point during said rotation.

13. The method of claim 11 , said gauge not providing said error indication when said gauge is rotated about said axis and neither said upper finger nor lower finger touch said rim of said coat apply bowl at any point during said rotation.

14. The method of claim 11 , wherein said error indication is visual, audio, or tactual.

15. The method of claim 11 , wherein said error indication is a scraping noise, resistance to rotation or movement of the coat apply bowl.

16. The method of claim 11 , said gauge further including a handle attached to a top surface of said body, said handle adapted to allow said body to be turned 360° about said axis.

17. The method of claim 11 , said gauge further including one or more view ports in a sidewall of said body to provide visual inspection of a position of a coat apply shield installed on said spin apply coating tool under said coat apply bowl and said method step (d) further including visually inspecting a position of said coat apply shield and if said coat apply shield is not correctly positioned, removing said gauge from said substrate, removing said coat apply bowl, repositioning said coat apply shield, replacing said coat apply bowl and repeating steps (c) and (d); and if said coat apply shield is correctly positioned and there is no error indication moving said arm to said retracted position, removing said gauge from said substrate, and releasing said tool for production.

18. The method of claim 11 , wherein a top surface of said substrate chuck defines a reference plane and a distance between said upper finger and said lower finger defines a tolerance around the height of said rim of said coat apply bowl above said reference plane.

19. The method of claim 11 , wherein said body has the form of a cylinder having a closed top and open bottom and said substrate chuck is circular.

20. The method of claim 19 , said gauge further including a pin extending from a bottom surface of said closed top toward said open bottom, said pin configured to rotateably engage a hole in a top surface of said substrate chuck.

Assignees

• IBM

Inventors

• Grimes Jeffrey J
• Remillard Kevin C
• Stanton Matthew F

Classifications

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H01L21/6715

  Electricity · mapped topic

• G03F7/162

  Coating on a rotating support, e.g. using a whirler or a spinner · CPC title

• B05D1/005

  Spin coating · CPC title