Scanning probe sensor with a ferromagnetic fluid

Patent metadata

Field	Value
Publication number	US-9568496-B1
Application number	US-201514943150-A
Country	US
Kind code	B1
Filing date	Nov 17, 2015
Priority date	Nov 17, 2015
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

The invention is notably directed to a scanning probe sensor for a scanning probe microscope. The scanning probe sensor comprises a probe tip having a ferromagnetic fluid and a magnetic field generator adapted to generate a magnetic field acting on the ferromagnetic fluid. Furthermore, a sensor controller is provided and configured to control one or more parameters of the magnetic field generator, thereby controlling the shape of the fluid. The invention further concerns a related scanning probe sensor, a related method and a related computer program product.

First claim

What is claimed is:

1. A scanning probe sensor for a scanning probe microscope, the scanning probe sensor comprising:
a probe tip comprising a ferromagnetic fluid;
a magnetic field generator adapted to generate a magnetic field acting on the ferromagnetic fluid; and
a sensor controller configured to control one or more parameters of the magnetic field generator, thereby controlling the shape of the fluid.

2. A scanning probe sensor according to claim 1 , wherein the sensor controller is configured to control the shape of the fluid in dependence on interactions between the fluid and a sample.

3. A scanning probe sensor according to claim 1 , wherein the sensor controller is configured to control the strength of the magnetic field.

4. A scanning probe sensor according to claim 1 , wherein the sensor controller is configured to control one or more directions of the magnetic field.

5. A scanning probe sensor according to claim 1 , the probe tip comprising a solid core surrounded by the ferromagnetic fluid.

6. A scanning probe sensor according to claim 1 , the probe tip comprising a solid carrier structure comprising a channel for the ferromagnetic fluid.

7. A scanning probe sensor according to claim 1 , the probe tip consisting of the ferromagnetic fluid.

8. A scanning probe sensor according to claim 1 , the scanning probe sensor comprising:
a reservoir for the ferromagnetic fluid; and
a pump for pumping the ferromagnetic fluid from the reservoir to the probe tip.

9. A scanning probe sensor according to claim 1 , wherein the scanning probe sensor is configured to operate in a non-contact scanning mode.

10. A scanning probe sensor according to claim 9 , wherein the sensor controller is configured to control the one or more parameters of the magnetic field generator such that the shape of the fluid changes periodically.

11. A scanning probe sensor according to claim 1 , wherein the scanning probe sensor is configured to operate in a contact scanning mode.

12. A scanning probe sensor according to claim 11 , wherein the sensor controller is configured to control the one or more parameters of the magnetic field generator such that the size of the contact area between the fluid and a sample is dynamically adapted.

13. A scanning probe sensor according to claim 1 , wherein the ferromagnetic fluid is electrically conductive and the scanning probe sensor is configured to perform electrical measurements related to electronic transport within the fluid.

14. A scanning probe sensor according to claim 1 , wherein the sensor controller is configured to control the one or more parameters of the magnetic field generator such that a plurality of predefined tip shapes are provided.

15. A scanning probe sensor according to claim 1 , the scanning probe sensor comprising a cantilever, wherein the probe tip is arranged on the cantilever.

16. A scanning probe sensor according to claim 1 , the scanning probe sensor comprising a tuning fork, wherein the probe tip is arranged on the tuning fork.

17. A scanning probe microscope comprising:
a scanning probe sensor comprising:
a probe tip comprising a ferromagnetic fluid;
a magnetic field generator adapted to generate a magnetic field acting on the ferromagnetic fluid; and
a sensor controller configured to control one or more parameters of the magnetic field generator, thereby controlling the shape of the fluid

a sample positioner configured to position a sample in relation to the scanning probe sensor; and
a system controller configured to control the sample positioner and the scanning probe sensor.

18. A scanning probe microscope of claim 17 , wherein the sensor controller is configured to control the shape of the fluid in dependence on interactions between the fluid and a sample.

19. A scanning probe microscope of claim 17 , wherein the sensor controller is configured to control the strength of the magnetic field.

20. A scanning probe microscope of claim 17 , wherein the sensor controller is configured to control one or more directions of the magnetic field.

Assignees

• IBM

Inventors

• Gotsmann Bernd W
• Menges Fabian
• Niramalraj Pio Peter Niraj

Classifications

• G01Q60/56 Primary

  Probes with magnetic coating · CPC title

• G01Q70/14

  Particular materials · CPC title

• G01Q10/00

  Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe · CPC title

• G01Q60/38 Primary

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q60/16

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title