Method for manufacturing semiconductor chip

Patent metadata

Field	Value
Publication number	US-9566791-B2
Application number	US-201615040136-A
Country	US
Kind code	B2
Filing date	Feb 10, 2016
Priority date	Feb 25, 2015
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

There is provided a method for manufacturing semiconductor chips in which the chips as many as possible are arranged on one substrate and these chips can be cut with high accuracy in a relatively simple process. For such occasion on a wafer, short sides of the semiconductor chips are laid out to be inclined at an angle of 5° or less to a crystal orientation of the wafer. Thereafter, a laser stealth dicing method is used to form a plurality of first dicing lines along long sides of the individual semiconductor chips and a plurality of second dicing lines along short sides thereof.

First claim

What is claimed is:

1. A method for manufacturing a plurality of semiconductor chips from a single wafer comprising the steps of:
laying out the plurality of semiconductor chips on the wafer;
forming a layer of modified regions within the wafer by irradiating the wafer with laser light while moving the wafer, the forming step being a dicing line formation step for forming a plurality of first dicing lines along long sides of the semiconductor chips and a plurality of second dicing lines along short sides of the semiconductor chips that are shorter and more than the first dicing lines; and
breaking the wafer along the first dicing lines and the second dicing lines, wherein
the second dicing line is inclined at an angle of 5° or less to a crystal orientation of the wafer.

2. The method for manufacturing the semiconductor chips according to claim 1 , wherein
the second dicing line is inclined at an angle of 2° or less to the crystal orientation of the wafer.

3. The method for manufacturing the semiconductor chips according to claim 1 , wherein
the semiconductor is formed in a parallelogram shape and the long side is inclined at an angle of more than 5° to the crystal orientation of the wafer.

4. The method for manufacturing the semiconductor chips according to claim 1 , wherein
in the step for forming the dicing line, the layer of the modified regions comprises a plurality of layers laminated within the wafer, and the lamination number of the modified regions in the first dicing line is more than the lamination number of the modified regions in the second dicing line.

5. The method for manufacturing the semiconductor chips according to claim 1 , wherein
the crystal orientation is a crystal orientation of <110>.

6. The method for manufacturing the semiconductor chips according to claim 1 , wherein
the crystal orientation is a crystal orientation of <100>.

7. The method for manufacturing the semiconductor chips according to claim 1 , wherein
the semiconductor chip is a chip for an inkjet print head in which energy generating elements for ejecting ink and supply passages for introducing the ink to the energy generating elements are formed.

8. A method for manufacturing an inkjet print head for manufacturing a plurality of semiconductor chips for the inkjet print head from a single wafer, comprising the steps of:
forming energy generating elements and electrical connection portions corresponding to the plurality of semiconductor chips respectively on the wafer;
forming an ejection opening formation member in which ink supply passages corresponding to the plurality of semiconductor chips respectively are formed on the wafer;
forming modified regions within the wafer by irradiating the wafer with laser light while moving the wafer, the forming step being a dicing line formation step for forming a plurality of first dicing lines consisting of layers of the modified regions along long sides of the semiconductor chips and a plurality of second dicing lines along short sides of the semiconductor chips that are shorter and more than the first dicing lines; and
breaking the wafer along the first dicing lines and the second dicing lines, wherein
the second dicing line is inclined at an angle of 5° or less to a crystal orientation of the wafer.

9. The method for manufacturing the inkjet print head according to claim 8 , wherein
the second dicing line is inclined at an angle of 2° or less to the crystal orientation of the wafer.

Assignees

• Canon Kk

Inventors

• Shibata Takeshi

Classifications

• H10P54/00 Primary

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• B41J2/1632 Primary

  machining · CPC title

• H01L21/78

  Electricity · mapped topic

• B41J2/1634

  laser machining · CPC title

• B41J2/162

  Manufacturing of the nozzle plates · CPC title