Photonic degradation monitoring for semiconductor devices

Patent metadata

Field	Value
Publication number	US-9564854-B2
Application number	US-201514705268-A
Country	US
Kind code	B2
Filing date	May 6, 2015
Priority date	May 6, 2015
Publication date	Feb 7, 2017
Grant date	Feb 7, 2017

Abstract

Methods of testing a semiconductor, and semiconductor testing apparatus, are described. In an example, a method for testing a semiconductor can include applying light on the semiconductor to induce photonic degradation. The method can also include receiving a photoluminescence measurement induced from the applied light from the semiconductor and monitoring the photonic degradation of the semiconductor from the photoluminescence measurement.

First claim

What is claimed is:

1. A method for testing a solar cell, the method comprising:
inducing photonic degradation, wherein the inducing includes applying light to the solar cell; and
monitoring the photonic degradation of the solar cell based on a photoluminescence measurement, wherein the monitoring includes receiving a first photoluminescence measurement induced from the applied light and receiving a second photoluminescence measurement induced from the applied light after the first photoluminescence measurement.

2. The method of claim 1 , wherein applying light to the solar cell comprises applying light having a photon energy above the bandgap energy of the semiconductor substrate of the solar cell.

3. The method of claim 1 , wherein applying light to the solar cell comprises applying light from a narrowband light source.

4. The method of claim 3 , wherein applying light from a narrowband light source to the solar cell comprises applying light from a narrowband light source having a wavelength in the range of 100-1000 nm to the solar cell.

5. The method of claim 1 , wherein applying light to the solar cell comprises applying light to a passivation region of the solar cell.

6. The method of claim 1 , wherein applying light to the solar cell comprises applying light to a location on a front side of the solar cell opposite a contact pad on back side of the solar cell.

7. The method of claim 1 , further comprising:
inducing photonic degradation, wherein the inducing includes applying light to a plurality of locations of the solar cell; and
monitoring the induced photonic degradation to the solar cell based on a photonic degradation map, wherein the monitoring includes receiving a plurality of photoluminescence measurements induced from the applied light and mapping the induced photonic degradation at the plurality of locations of the solar cell to the photonic degradation map.

8. The method of claim 1 , wherein applying light to the solar cell comprises applying light to the solar cell for a duration in the range of 10 milliseconds-2 hours.

9. The method of claim 1 , wherein applying light to the solar cell comprises applying light from a laser or a light emitting diode (LED) to the solar cell.

10. A method for testing a solar cell, the method comprising:
applying ultraviolet (UV) light to a first location of the solar cell to induce ultraviolet (UV) degradation at the first location; and
receiving a first and a second photoluminescence measurement induced from the applied ultraviolet (UV) light.

11. The method of claim 10 , further comprising:
applying ultraviolet (UV) light to a second location of the solar cell to induce ultraviolet (UV) degradation at the second location;
receiving a third and fourth photoluminescence measurement induced from the applied ultraviolet (UV) light; and
monitoring the ultraviolet (UV) induced degradation to the solar cell from the first, second, third and fourth photoluminescence measurements.

12. The method of claim 10 , further comprising:
applying ultraviolet (UV) light to a plurality of locations of the solar cell to induce ultraviolet (UV) degradation at the plurality of locations;
receiving a plurality of photoluminescence measurements induced from the applied ultraviolet (UV) light;
mapping the ultraviolet (UV) induced degradation at the plurality of locations of the solar cell from the plurality of photoluminescence measurements; and
monitoring the ultraviolet (UV) induced degradation to the solar cell from a photonic degradation map.

13. The method of claim 10 , wherein applying ultraviolet (UV) light to a first location of the solar cell to induce ultraviolet (UV) degradation comprises applying ultraviolet (UV) light for a duration in the range of 10 milliseconds-2 hours to induce ultraviolet (UV) degradation.

14. The method of claim 10 , wherein applying ultraviolet (UV) light to a first location of the solar cell to induce ultraviolet (UV) degradation at the first location comprises applying ultraviolet (UV) light to a passivation region of the solar cell to induce ultraviolet (UV) degradation at the passivation region.

15. The method of claim 10 , wherein applying ultraviolet (UV) light to a first location of the solar cell to induce ultraviolet (UV) degradation comprises applying light from a laser or a light emitting diode (LED).

16. A solar cell testing apparatus, comprising:
a narrowband light source configured to induce photonic degradation to a solar cell, wherein the inducing includes applying light to the solar cell;
a detector configured to measure photoluminescence induced from the applied light; and
an electronic system configured to monitor the photonic degradation of the solar cell from the photoluminescence measurement, wherein the electronic system is configured to determine whether to pass or fail a solar cell based on the monitoring.

17. The solar cell testing apparatus of claim 16 , wherein the narrowband light source is a laser or a light emitting diode (LED).

18. The solar cell testing apparatus of claim 16 , wherein light from the narrowband light source and the measured photoluminescence are at least partially co-axial.

19. The solar cell testing apparatus of claim 18 , further comprising a dichroic mirror to separate between the light from the narrowband light source and the measured photoluminescence.

20. The solar cell testing apparatus of claim 16 , wherein the narrowband light source is an ultraviolet (UV) light source.

Assignees

• Tu Xiuwen
• Soltz David Aitan
• Johnson Michael C
• Rim Seung Bum
• Qiu Taiqing
• Shen Yu-Chen
• Tracy Kieran Mark
• Sunpower Corp

Inventors

• Tu Xiuwen
• Soltz David Aitan
• Johnson Michael C
• Rim Seung Bum
• Qiu Taiqing
• Shen Yu-Chen
• Tracy Kieran Mark

Classifications

• H02S50/15 Primary

  using optical means, e.g. using electroluminescence · CPC title

• G01N21/6489

  Photoluminescence of semiconductors · CPC title

• G01N21/6408

  with measurement of decay time, time resolved fluorescence · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01N2201/0621

  Supply · CPC title