Substrate holding apparatus and substrate cleaning apparatus
US-9558971-B2 · Jan 31, 2017 · US
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Patent family 52109727
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52109727 |
| Family type | — |
| Earliest priority | Jun 24, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9558971B2 — Substrate holding apparatus and substrate cleaning apparatus |
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US9558971B2 — Substrate holding apparatus and substrate cleaning apparatus (published Jan 31, 2017)
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