Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications

Patent metadata

Field	Value
Publication number	US-9553174-B2
Application number	US-201514622647-A
Country	US
Kind code	B2
Filing date	Feb 13, 2015
Priority date	Mar 28, 2014
Publication date	Jan 24, 2017
Grant date	Jan 24, 2017

Abstract

Embodiments of the present invention provide methods for forming fin structure with desired materials using a conversion process for three dimensional (3D) stacking of fin field effect transistor (FinFET) for semiconductor chips. In one embodiment, a method of forming a fin structure on a substrate includes performing an directional plasma process on a fin structure formed from a substrate comprising a first type of atoms, the directional plasma process dopes a second type of atoms on sidewalls of the fin structure, performing a surface modification process to form a surface modified layer on the sidewalls of the fin structure reacting with the first type of atoms, replacing the first type of the atoms with the second type of the atoms in the fin structure during the surface modification process, and forming the fin structure including the second type of the atoms on the substrate.

First claim

The invention claimed is:

1. A method of forming a fin structure on a substrate comprising:
performing a directional plasma process on a fin structure formed from a substrate predominantly comprising a first type of atoms, the directional plasma process dopes a second type of atoms on sidewalls of the fin structure;
performing a surface modification process to form a surface modified layer on the sidewalls of the fin structure reacting with the first type of atoms; and
replacing the first type of the atoms with the second type of the atoms in the fin structure during the surface modification process until the fin structure comprises predominantly the second type of the atoms, wherein the second type of atoms are at least one of Ge, Ga, In, P or As atoms.

2. The method of claim 1 , wherein forming the directional plasma process further comprising:
doping ions into the sidewalls of the fin structure with an ion incident angle of between about 0 degrees and 60 degrees.

3. The method of claim 1 , wherein the fin structure includes a hardmask layer disposed on a top surface.

4. The method of claim 1 , wherein the first type of atoms are silicon atoms.

5. The method of claim 1 , wherein the second type of atoms is Ge atoms.

6. The method of claim 1 , wherein performing the surface modification process further comprising:
oxidizing or nitridizing the sidewalls of the fin structure.

7. The method of claim 6 , further comprising:
forming an oxidation layer or a nitridation layer on the sidewalls of the fin structure by reacting with the first type of the atoms from the fin structure.

8. The method of claim 7 , wherein forming an oxidation layer or a nitridation layer on the sidewalls of the fin structure further comprising:
removing the oxidation layer or the nitridation layer from the sidewalls.

9. The method of claim 8 , wherein the oxidation layer or the nitridation layer is removed from the sidewalls by a dry etching process.

10. The method of claim 8 , further comprising:
removing a hardmask layer from the fin structure after removing the oxidation layer or the nitridation layer from the fin structure.

11. The method of claim 1 , wherein the surface modification process is controlled at a temperature range less than about 950 degrees Celsius.

12. The method of claim 1 , further comprising:
forming a conformal layer on an outer surface of the fin structure having the second type of atoms.

13. A method of forming a fin structure on a substrate comprising:
doping first type of atoms into a fin structure formed on a substrate, the fin structure including a second type of atoms;
oxidizing or nitridizing the fin structure to react with the second type of atoms formed from the substrate, forming an oxidation layer or a nitridation layer on the fin structure; and
converting the fin structure to have predominantly the first type of atoms wherein the second type of the atoms are substantially formed as the oxidation layer or the nitridation layer.

14. The method of claim 13 , further comprising:
removing the oxidation layer or nitridation layer from the fin structure.

15. The method of claim 14 , wherein removing the oxidation layer or nitridation layer from the fin structure further comprises:
etching the oxidation layer or nitridation layer from the fin structure.

16. The method of claim 15 , wherein etching the oxidation layer or nitridation layer further comprises:
controlling the substrate temperature to less than about 950 degrees Celsius.

17. The method of claim 13 , wherein doping the first type of atoms into the fin structure further comprises:
doping the first type of atoms into sidewalls of the fin structure with an incident angle of between about 0 degrees and about 60 degrees.

18. The method of claim 13 , wherein the first type of atoms include Ge, Ga, As, In or P.

19. A method of forming a fin structure on a substrate comprising:
doping first type of atoms into sidewalls of a fin structure formed on a substrate, the fin structure formed predominantly from a second type of atoms;
diffusing the first type of atoms to a center region where the second type of atoms are located in the fin structure; and
replacing the second type of atoms with the first type of atoms until the fin structure is predominantly comprised of the first type of atoms, wherein the first type of atoms are at least one of Ge, Ga, In, P or As atoms.

20. The method of claim 19 , further comprising:
removing the second type of atoms from the fin structure.

Assignees

• Applied Materials Inc

Inventors

• Godet Ludovic
• Hatem Christopher
• Scotney-Castle Matthew D
• Hilkene Martin A

Classifications

• H10P50/642

  Chemical etching · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10P14/6319

  Formation by plasma treatments, e.g. plasma oxidation of the substrate · CPC title

• H10P14/6316

  Formation by nitridation, e.g. nitridation of the substrate · CPC title

• H10P14/6309

  of silicon in uncombined form, i.e. pure silicon · CPC title