Electronic platform comprising an ABO3 type crystal and graphene, method for its manufacture and chip comprising the same

Patent metadata

Field	Value
Publication number	US-9548435-B2
Application number	US-201314429332-A
Country	US
Kind code	B2
Filing date	Sep 18, 2013
Priority date	Sep 18, 2012
Publication date	Jan 17, 2017
Grant date	Jan 17, 2017

Abstract

An electronic platform comprising a substrate made of a ABO3 crystal ( 2 ) and at least one layer of a two-dimensional conducting sheet of carbon atoms ( 1 ) of a thickness between one and four atoms, characterized in that the conducting layer(s) is (are) placed on top of a face of the crystal whose orthogonal axis is at an angle up to 35° of the crystal's spontaneous polarization or c-axis. The invention achieves a sheet resistance lower than 1 Ω/square at temperatures higher than 77K.

First claim

The invention claimed is:

1. An electronic platform comprising a substrate made of a ABO 3 crystal and at least one layer of a two-dimensional conducting sheet of carbon atoms of a thickness between one and four atoms, characterized in that the at least one layer of a two-dimensional conducting sheet of carbon atoms is placed on top of a face of the crystal whose orthogonal axis is at an angle up to 35° of the crystal's spontaneous polarization or c-axis.

2. An electronic platform according to claim 1 wherein the substrate is made of at least one of LiNbO 3 , LiTaO 3 , LiIO 3 , Ba x Sr 1-x TiO 3 , Pb(Zr x Ti 1-x )O 3 , with x varying between 0 and 1.

3. An electronic platform according to claim 2 wherein the at least one layer of a two-dimensional conducting sheet of carbon atoms is shaped as Hall bars.

4. A chip comprising the electronic platform according to claim 3 and gold contacts of a thickness of 10 to 1000 nm.

5. A chip according to claim 4 further comprising a layer of chromium of a thickness of 1 to 50 nm between the at least one layer of a two-dimensional conducting sheet of carbon atoms and the gold contacts.

6. A chip comprising the electronic platform according to claim 2 and gold contacts of a thickness of 10 to 1000 nm.

7. A chip according to claim 6 further comprising a layer of chromium of a thickness of 1 to 50 nm between the at least one layer of a two-dimensional conducting sheet of carbon atoms and the gold contacts.

8. An electronic platform according to claim 1 wherein the at least one layer of a two-dimensional conducting sheet of carbon atoms is shaped as Hall bars.

9. A chip comprising the electronic platform according to claim 1 and gold contacts of a thickness of 10 to 1000 nm.

10. A chip according to claim 9 further comprising a layer of chromium of a thickness of 1 to 50 nm between the at least one layer of a two-dimensional conducting sheet of carbon atoms and the gold contacts.

11. A process for fabricating an electronic platform comprising a substrate of a crystal of the form ABO 3 and at least one layer of a two-dimensional conducting sheet of carbon atoms of a thickness between one and four atoms, the method comprising the steps of
depositing the at least one layer of a two-dimensional conducting sheet of carbon atoms on top of a face of the crystal whose orthogonal axis is at an angle up to 35° of the crystal's spontaneous polarization or c-axis,
subjecting the at least one layer of a two-dimensional conducting sheet of carbon atoms and the substrate to a process of change of spontaneous polarization.

Assignees

• Fundació Inst De Ciències Fotòniques
• Institució Catalana De Recerca I Estudis Avançats
• Fundació Inst De Ciències Fotòniques Parque Mediterraneo De La Tecnologia
• Inst Catalana Recerca Estudis Avancats

Inventors

• Pruneri Valerio
• Koppens Frank
• Janner Davide
• Gatti Fabio

Classifications

• H01B12/02

  characterised by their form · CPC title

• H01L39/005 Primary

  Electricity · mapped topic

• H01L39/125

  Electricity · mapped topic

• H05K1/0306

  Inorganic insulating substrates, e.g. ceramic, glass · CPC title

• H05K1/09

  Use of materials for the {conductive, e.g. } metallic pattern · CPC title