Semiconductor and ferromagnetic insulator heterostructure

Patent metadata

Field	Value
Publication number	US-11424409-B2
Application number	US-202017135632-A
Country	US
Kind code	B2
Filing date	Dec 28, 2020
Priority date	Jan 11, 2019
Publication date	Aug 23, 2022
Grant date	Aug 23, 2022

Abstract

A first aspect provides a topological quantum computing device comprising a network of semiconductor-superconductor nanowires, each nanowire comprising a length of semiconductor formed over a substrate and a coating of superconductor formed over at least part of the semiconductor; wherein at least some of the nanowires further comprise a coating of ferromagnetic insulator disposed over at least part of the semiconductor. A second aspect provides a method of fabricating a quantum or spintronic device comprising a heterostructure of semiconductor and ferromagnetic insulator, by: forming a portion of the semiconductor over a substrate in a first vacuum chamber, and growing a coating of the ferromagnetic insulator on the semiconductor by epitaxy in a second vacuum chamber connected to the first vacuum chamber by a vacuum tunnel, wherein the semiconductor comprises InAs and the ferromagnetic insulator comprises EuS.

First claim

The invention claimed is:

1. A method of fabricating a quantum or spintronic device comprising a wafer including at least one heterostructure of semiconductor and ferromagnetic insulator, the method comprising: forming the heterostructure by:
forming a portion of the semiconductor over a substrate in a first vacuum chamber,
growing a coating of the ferromagnetic insulator on the semiconductor by epitaxy in a second vacuum chamber connected to the first vacuum chamber by a vacuum tunnel, wherein the semiconductor comprises InAs and the ferromagnetic insulator comprises EuS, wherein the method comprises moving the wafer from the first vacuum chamber to the second vacuum chamber without breaking vacuum between the forming of the semiconductor and the ferromagnetic insulator; and
forming a coating of superconductor over and physically contacting the semiconductor and the ferromagnetic insulator.

2. The method of claim 1 , wherein the forming of the semiconductor is by epitaxy.

3. The method of claim 1 , wherein the superconductor comprises Al.

4. The method of claim 1 , wherein the forming of the superconductor is by epitaxy.

5. The method of claim 1 , wherein the semiconductor InAs forms a direct interface with the ferromagnetic insulator EuS without an intermediate layer of In—S.

6. The method of claim 1 , wherein the device comprises a topological computing device, and the method comprises forming a plurality of the heterostructures, wherein:
the portions of semiconductor comprise lengths of semiconductor each forming a core of a respective nanowire,
the growing of the ferromagnetic insulator comprises growing the EuS on the InAs at least part way around the core along the length of each core, and
the method further comprises forming a coating of superconductor at least part way around the heterostructure along the length of each core and physically contacting the semiconductor, thereby forming a network of semiconductor-superconductor nanowires.

7. The method of claim 1 , wherein the device comprises a spintronic device, wherein the heterostructure is arranged to form at least part of at least one spin transistor, spin-based storage element or spin-based sensing element.

8. A method of fabricating a quantum or spintronic device comprising a wafer including at least one heterostructure of semiconductor and ferromagnetic insulator, the method comprising: forming the heterostructure by:
forming a portion of the semiconductor over a substrate in at least one vacuum chamber; and
growing a coating of the ferromagnetic insulator on the semiconductor by epitaxy in the at least one vacuum chamber, wherein the forming of the portion of the semiconductor and the growing the coating of the ferromagnetic insulator are performed without breaking vacuum; and
forming a coating of superconductor over and physically contacting the semiconductor.

9. The method of claim 8 , wherein the forming of the semiconductor is by epitaxy.

10. The method of claim 8 , wherein the semiconductor comprises GaSb.

11. The method of claim 8 , wherein the ferromagnetic insulator comprises EuO, Y 3 Fe 5 O 12 , Bi 3 Fe 5 O 12 , YFeO 3 , Fe 2 O 3 , Fe 3 O 4 , GdN, Sr 2 CrReO 6 , CrBr 3 , CrI 3 , YTiO 3 or combinations thereof.

12. The method of claim 8 , wherein the at least one vacuum chamber comprises a first vacuum chamber and a second vacuum chamber and the forming of the portion of the semiconductor over the substrate is performed in the first vacuum chamber and the growing the coating of the ferromagnetic insulator on the semiconductor by epitaxy is performed in the second vacuum chamber.

13. The method of claim 12 , wherein the first vacuum chamber and the second vacuum chamber are connected by a vacuum tunnel.

14. The method of claim 8 , wherein the semiconductor comprises InAs and the ferromagnetic insulator comprises EuS.

15. The method of claim 14 , wherein the device comprises a topological computing device, and the method comprises forming a plurality of the heterostructures, wherein:
the portions of semiconductor comprise lengths of semiconductor each forming a core of a respective nanowire,
the growing of the ferromagnetic insulator comprises growing the EuS on the InAs at least part way around the core along the length of each core, and
the method further comprises forming a coating of superconductor at least part way around the heterostructure along the length of each core, thereby forming a network of semiconductor-superconductor nanowires.

16. The method of claim 15 , wherein the semiconductor InAs forms a direct interface with the ferromagnetic insulator EuS without an intermediate layer of In—S.

17. The method of claim 8 , wherein the device comprises a spintronic device, wherein the heterostructure is arranged to form at least part of at least one spin transistor, spin-based storage element or spin-based sensing element.

Assignees

• Microsoft Technology Licensing Llc

Inventors

• Krogstrup Jeppesen Peter
• Liu Yu
• Luchini Alessandra

Classifications

• H10D48/3835

  Semiconductor qubit devices comprising a plurality of quantum mechanically interacting semiconductor quantum dots, e.g. Loss-DiVincenzo spin qubits · CPC title

• H10D62/119

  Nanowire, nanosheet or nanotube semiconductor bodies · CPC title

• H10D62/85

  being Group III-V materials, e.g. GaAs · CPC title

• H01F10/20

  Ferrites · CPC title

• H01F10/1933

  Perovskites · CPC title