Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus

Patent metadata

Field	Value
Publication number	US-9548182-B2
Application number	US-201314406909-A
Country	US
Kind code	B2
Filing date	May 8, 2013
Priority date	Jun 11, 2012
Publication date	Jan 17, 2017
Grant date	Jan 17, 2017

Abstract

An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

First claim

The invention claimed is:

1. An instrument producing a charged particle beam, the instrument comprising:
a charged particle source;
a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source between an anode having a ground potential and a first cathode;
a plurality of insulation members disposed between the plurality of first electrodes; and
a housing which covers the plurality of first electrodes and the charged particle source,
wherein the first cathode, the anode, and the plurality of first electrodes are mutually connected via first resistors,
wherein the housing is formed from an insulating solid material and has an inner surface which is disposed to surround the charged particle source, the first cathode, the anode, and the plurality of first electrodes,
wherein the housing includes a plurality of second electrodes mounted to the inner surface of the housing at positions in proximity to the plurality of first electrodes, and includes a second cathode mounted on the inner surface of the housing at a position opposite to the first cathode in a direction orthogonal to the direction of irradiation of the charged particles, and the second cathode is connected to have the same potential as the potential of the first cathode, and
wherein at least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the plurality of first electrodes.

2. The instrument producing a charged particle beam according to claim 1 , wherein a gap between a ground level surface of the housing and the plurality of second electrodes mounted to the inner surface of the housing is filled with the insulating solid material.

3. The instrument producing a charged particle beam according to claim 1 , wherein each of the plurality of second electrodes is mounted to the inner surface of the housing at a position opposite the proximate one of the plurality of first electrodes in the direction orthogonal to the direction of irradiation of the charged particles.

4. The instrument producing a charged particle beam according to claim 1 , wherein each of the plurality of second electrodes mounted to the inner surface of the housing is electrically connected to the proximate one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the plurality of first electrodes.

5. The instrument producing a charged particle beam according to claim 1 , wherein a first one of the plurality of first electrodes located at a position with the largest potential difference with respect to the ground potential and a first one of the plurality of second electrodes mounted to the inner surface of the housing and located in proximity to the first one of the plurality of first electrodes are electrically connected, the plurality of second electrodes being connected by a plurality of second resistors, and each of the plurality of second electrodes has the same potential as the potential of the proximate one of the plurality of first electrodes.

6. The instrument producing a charged particle beam according to claim 1 , wherein some of the plurality of first electrodes and some of the plurality of second electrodes mounted to the inner surface of the housing and in proximity to the plurality of first electrodes are respectively electrically connected, second electrodes of the plurality of second electrodes that are not connected to the plurality of first electrodes are connected by a plurality of second resistors, and each of the plurality of second electrodes has the same potential as the potential of the proximate one of the plurality of first electrodes.

7. The instrument producing a charged particle beam according to claim 1 ,
wherein the second cathode and the plurality of second resistors are connected via a plurality of second resistors.

8. The instrument producing a charged particle beam according to claim 1 ,
wherein the plurality of first electrodes are mutually connected by a Cockcroft-Walton circuit, which includes a plurality of diodes and a plurality of capacitors.

9. A charged particle beam instrument comprising:
an instrument producing a charged particle beam, the instrument comprising:
a charged particle source;
a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source between an anode having a ground potential and a first cathode;
a plurality of insulation members disposed between the plurality of first electrodes; and
a housing which covers the plurality of first electrodes, and the charged particle source;
wherein the first cathode, the anode, and the plurality of first electrodes are mutually connected via first resistors,
wherein the housing is formed from an insulating solid material and has an inner surface which is disposed to surround the charged particle source, the first cathode, the anode, and the plurality of first electrodes, and
wherein the housing includes a plurality of second electrodes mounted to the inner surface of the housing at positions in proximity to the plurality of first electrodes, and includes a second cathode mounted on the inner surface of the housing at a position opposite to the first cathode in a direction orthogonal to the direction of irradiation of the charged particles, and the second cathode is connected to have the same potential as the potential of the first cathode, and
wherein at least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the plurality of first electrodes.

10. The charged particle beam instrument according to claim 9 ,
wherein the second cathode and the plurality of second resistors are connected via a plurality of second resistors.

11. The charged particle beam instrument according to claim 9 ,
wherein the plurality of first electrodes are mutually connected by a Cockcroft-Walton circuit, which includes a plurality of diodes and a plurality of capacitors.

12. A high voltage generator comprising:
a plurality of first electrodes stacked between an anode having a ground potential and a first cathode;
a plurality of insulation members disposed between the plurality of first electrodes; and
a housing which covers the plurality of first electrodes and a high potential portion of the high voltage generator,
wherein the first cathode, the anode, and the plurality of first electrodes are mutually connected via first resistors,
wherein the housing is formed from an insulating solid material and has an inner surface which is disposed to surround the charged particle source, the first cathode, the anode, and the plurality of first electrodes,
wherein the housing includes a plurality of second electrodes mounted to the inner surface of the housing at positions in proximity to the plurality of first electrodes, and includes a second cathode mounted on the inner surface of the housing at a position opposite to the first cathode in a direction orthogonal to a direction that the plurality of first electrodes are stacked, the second cathode is connected to have the same potential as the potential of the first cathode, and
wherein at least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of

Assignees

• Hitachi High Tech Corp

Inventors

• Onishi Takashi
• Watanabe Shunichi
• Kaneda Minoru

Classifications

• H01J37/067 Primary

  Replacing parts of guns; Mutual adjustment of electrodes (H01J37/073 - H01J37/077 take precedence; vacuum locks H01J37/18) · CPC title

• H01J37/073

  Electron guns using field emission, photo emission, or secondary emission electron sources · CPC title

• H01J2237/16

  Vessels · CPC title

• H01J37/16

  Vessels; Containers · CPC title

• H01J27/024

  Extraction optics, e.g. grids · CPC title