Charged particle source module

Patent metadata

Field	Value
Publication number	US-12288663-B2
Application number	US-202318155684-A
Country	US
Kind code	B2
Filing date	Jan 17, 2023
Priority date	Apr 11, 2017
Publication date	Apr 29, 2025
Grant date	Apr 29, 2025

Abstract

The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.

First claim

The invention claimed is:

1. A charged particle source module for generating and emitting a charged particle beam, comprising:
a frame including a first frame part, a second frame part, and one or more support members which are arranged between said first frame part and said second frame part;
a charged particle source arrangement for generating a charged particle beam; and
a power connecting assembly arranged at said first frame part,
wherein said charged particle source arrangement is electrically connected to said power connecting assembly via electrical wiring,
wherein said electrical wiring comprises one or more wires with a service loop; and
wherein said frame comprises mounting members that are connected to said second frame part by flexure connections.

2. The charged particle source module of claim 1 , wherein:
said second frame part comprises a mounting plate, each of said flexure connections comprises a connecting lip provided at the outer circumference of said mounting plate; and
wherein each connecting lip defines a slit between said mounting plate and said connecting lip.

3. The charged particle source module of claim 1 , wherein said first frame part, said second frame part and/or said one or more support members are made of a non-ferrous material.

4. The charged particle source module of claim 1 , wherein said power connecting assembly is rigidly connected to said first frame part, and said charged particle source arrangement is rigidly connected to said second frame part.

5. The charged particle source module of claim 1 , wherein said power connecting assembly comprises an electrically non-conductive connecting plate which is arranged at said first frame part of said frame, wherein said power connecting assembly comprises one or more connectors.

6. The charged particle source module according to claim 5 , wherein said one or more connectors extend through said electrically non-conductive connecting plate in a direction substantially parallel to said support members of said frame.

7. The charged particle source module according to claim 5 , wherein said first frame part comprises two substantially parallel plates, wherein the power connecting assembly is secured between said two plates.

8. The charged particle source module of claim 1 , wherein said charged particle source arrangement comprises an emitter arrangement configured for emitting charged particles, and an electrode for forming a charged particle beam from said charged particles emitted by said emitter arrangement.

9. The charged particle source module of claim 8 , wherein said emitter arrangement and said electrode are connected to one or more electrically non-conductive supports oriented substantially parallel to an optical axis defined by said emitter arrangement and said electrode, wherein each of said one or more supports is connected with an outer circumference of said emitter arrangement and with an outer circumference of said electrode, and wherein said one or more supports maintain the orientation and/or the position of said emitter arrangement and said electrode with respect to each other.

10. The charged particle source module of claim 9 , wherein at least one of said emitter arrangement and said electrode is rigidly connected to said one or more supports.

11. The charged particle source module of claim 9 , wherein said emitter arrangement and said electrode comprise a plate-shaped electrode body, wherein said flexure connection comprises a connecting lip provided at the outer circumference of said plate-shaped electrode body, wherein said connecting lip defines a slit between said connecting lip and said plate-shaped electrode body.

12. The charged particle source module of claim 8 , said power connecting assembly comprising an electrically non-conductive connecting plate that is arranged at said first frame part of said frame, wherein said power connecting assembly comprises one or more connectors, wherein said electrical wiring is peripherally connected to said electrode and is connected to said one or more connectors, and wherein the electrical wiring extends in a direction substantially parallel to said support members of said frame.

13. The charged particle source module of claim 1 , wherein the electrical wiring is flexible electrical wiring.

14. The charged particle source module of claim 1 , wherein said service loop is between the first frame part and the second frame part.

15. An exposure system for emitting a charged particle beam towards a surface or a target, comprising:
a charged particle source module for generating and emitting a charged particle beam of claim 1 ; and
a charged particle optical arrangement configured to receive the charged particle beam generated and emitted by the charged particle source module, and to direct said charged particle beam towards said surface or said target,
wherein said second frame part of said frame is arranged at said charged particle optical arrangement.

16. The exposure system of claim 15 , wherein said service loop comprises a bend along a portion of the electrical wiring, the bend extending in a direction that is not parallel to the direction of the electrical wiring.

17. A charged particle source for generating and emitting a charged particle beam, comprising:
a frame including a first frame part, a second frame part, and one or more support members which are arranged between said first frame part and said second frame part;
a charged particle source arrangement for generating a charged particle beam; and
a power connecting assembly arranged at said first frame part,
wherein said charged particle source arrangement is electrically connected to said power connecting assembly via electrical wiring,
wherein said electrical wiring comprises a bend along a portion of the electrical wiring, the bend extending in a direction that is not parallel to the direction of the electrical wiring; and
wherein said frame comprises mounting members that are connected to said second frame part by flexure connections.

18. The charged particle source arrangement of claim 17 , wherein the bend is substantially u-shaped.

19. The charged particle source arrangement of claim 17 , wherein the bend is between the first frame part and the second frame part.

20. The charged particle source arrangement of claim 17 , wherein the bend comprises a service loop.

Assignees

• Asml Netherlands Bv

Inventors

• Dinu-Gurtler Laura
• Hogervorst Eric Petrus
• Van Soest Jurgen

Classifications

• H10P34/40

  with high-energy radiation · CPC title

• H01J2237/061

  Construction · CPC title

• H01J37/3175

  Projection methods, i.e. transfer substantially complete pattern to substrate · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/10

  Lenses · CPC title