Ion optics components and method of making the same

Patent metadata

Field	Value
Publication number	US-9543136-B2
Application number	US-201313893276-A
Country	US
Kind code	B2
Filing date	May 13, 2013
Priority date	May 13, 2013
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

A method of making an ion optics component includes providing an electrically isolating substrate and machining away material of the substrate from at least one major surface thereof to form features of a first electrode sub-assembly. The formed features include a first surface for supporting integration of a first electrode body and a second surface for supporting integration of a second electrode body. Subsequent plating and masking steps result in the formation of a first electrode body on the first surface and a second electrode body on the second surface. A bridge is integrally formed in the electrically isolating material, so as to electrically isolate the first electrode body from the second electrode body.

First claim

What is claimed is:

1. An ion optics component comprising:
a first electrode sub-assembly comprising an electrically isolating material supporting a first plurality of electrode bodies defining at least two poles of a multipole ion guide structure, the first plurality of electrode bodies formed on, integrated with and in a predetermined alignment one relative to the other on the electrically isolating material of the first electrode sub-assembly;
a second electrode sub-assembly comprising an electrically isolating material supporting a second plurality of electrode bodies defining at least two other poles of the multipole ion guide structure, the second plurality of electrode bodies formed on, integrated with and in a predetermined alignment one relative to the other on the electrically isolating material of the second electrode sub-assembly; and
a mounting structure fixedly secured to the first electrode sub-assembly and to the second electrode sub-assembly, the mounting structure supporting the first plurality of electrode bodies in a predetermined alignment relative to the second plurality of electrode bodies;
at least two of the first plurality of electrode bodies having surfaces facing towards a centerline of the ion optics component that are other than parallel to first and second major surfaces of the first electrode sub-assembly, and at least two of the second plurality of electrode bodies having surfaces facing towards the centerline of the ion optics component that are other than parallel to first and second major surfaces of the second electrode sub-assembly.

2. The ion optics component according to claim 1 , wherein each electrode body of the first plurality of electrode bodies is a segmented electrode body comprising a plurality of electrode body segments that are electrically isolated one from another, and wherein each electrode body of the second plurality of electrode bodies is a segmented electrode body comprising a plurality of electrode body segments that are electrically isolated one from another.

3. The ion optics component according to claim 2 comprising first surface traces provided on the electrically isolating material of the first electrode sub-assembly and second surface traces provided on the electrically isolating material of the second electrode sub-assembly, wherein the first surface traces form electrical connections to the plurality of electrode body segments of the first plurality of electrode bodies and the second surface traces form electrical connections to the plurality of electrode body segments of the second plurality of electrode bodies.

4. The ion optics component according to claim 3 comprising a plurality of resistors and a plurality of capacitors, one resistor and one capacitor disposed between adjacent electrode bodies of each of the first and second plurality of electrode bodies.

5. The ion optics component according to claim 1 wherein the first electrode sub-assembly and the second electrode sub-assembly are mirror images of one another.

6. The ion optics component according to claim 1 wherein the first electrode sub-assembly comprises a portion of at least one of an ion entrance lens and an ion exit lens, and the second electrode sub-assembly comprises a complementary portion of the at least one of an ion entrance lens and an ion exit lens.

7. The ion optics component according to claim 1 wherein the first plurality of electrode bodies and the second plurality of electrode bodies cooperate to define an ion transport volume therebetween, the ion transport volume extending along a length of the ion optics component.

8. The ion optics component according to claim 7 wherein the ion transport volume includes a portion defining a curved ion transport path.

9. An electrode assembly comprising:
an electrically isolating material having supported thereon a plurality of electrode bodies defining at least two poles of a multipole ion guide structure, the plurality of electrode bodies formed on, integrated with, and disposed in a predetermined alignment one relative to the other on the electrically isolating material, there being at least one bridge structure integrally formed in the electrically insulating material between adjacent electrode bodies of the plurality of electrode bodies and spacing the adjacent electrode bodies one from the other so as to define a space therebetween for guiding ions, at least two of the plurality of electrode bodies having surfaces configured to face towards a centerline of the multipole ion guide structure that are other than parallel to first and second major surfaces of the electrode assembly.

Assignees

• Kovtoun Viatcheslav V
• Schirmer Andrew W
• Rizvi Syed F
• Remes Philip M
• Thermo Finnigan Llc

Inventors

• Kovtoun Viatcheslav V
• Schirmer Andrew W
• Rizvi Syed F
• Remes Philip M

Classifications

• H01J49/068

  Mounting, supporting, spacing, or insulating electrodes · CPC title

• H01J49/062 Primary

  Ion guides (linear ion traps performing mass selection H01J49/4225, mass filters H01J49/421) · CPC title

• H01J49/06

  Electron- or ion-optical arrangements · CPC title

• C23C18/1605

  by masking · CPC title

• C23C18/18

  Pretreatment of the material to be coated · CPC title