Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom

Patent metadata

Field	Value
Publication number	US-9540339-B2
Application number	US-201615005177-A
Country	US
Kind code	B2
Filing date	Jan 25, 2016
Priority date	Aug 12, 2011
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

A resist composition containing a compound represented by the general formula (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, and an alcoholic compound that can be derived therefrom are described.

First claim

The invention claimed is:

1. A compound represented by formula (1) or formula (2):

wherein R 1 are each independently a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a heteroatom, or an aromatic group having 6 to 30 carbon atoms;
R 2 are each independently a hydrogen atom, a halogen atom, a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group and may be the same or different on the same naphthalene ring;
at least two of R 2 on at least one of the naphthalene moieties is a hydroxyl group in the formula (1);
at least one of R 2 is a hydroxyl group in the formula (2);
n is an integer of 2 to 4;
the structural formulas of the repeating units in the formulas (1) and (2) may be the same or different;
in the formula (1), m 1 are each independently an integer of 1 to 7; and
in the formula (2), X are each independently an oxygen atom or a sulfur atom, and m 2 are each independently an integer of 1 to 6.

2. The compound according to claim 1 , wherein the formula (1) is the general formula (1-1), and the formula (2) is the formula (2-1):

wherein R 1 are each independently a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a heteroatom, or an aromatic group having 6 to 30 carbon atoms;
R 3 are each independently a hydrogen atom, a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, or an alkenyl group having 2 to 10 carbon atoms and may be the same or different on the same naphthalene ring;
the structural formulas of the repeating units in the formulas (1-1) and (2-1) may be the same or different;
n is an integer of 2 to 4; in the formula (1-1), m 3 are each independently an integer of 2 to 7, m 4 are each independently an integer of 0 to 6, and m 3 +m 4 is an integer of 2 to 7; and
in the formula (2-1), m 5 are each independently an integer of 1 to 6, m 6 are each independently an integer of 0 to 5, and m 5 +m 6 is an integer of 1 to 6.

3. The compound according to 1 , wherein the formula (2) is the formula (2-2):

wherein R 1 is a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a heteroatom, or an aromatic group having 6 to 30 carbon atoms;
R 3 are each independently a hydrogen atom, a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, or an alkenyl group having 2 to 10 carbon atoms and may be the same or different on the same naphthalene ring;
the structural formulas of the repeating units in the formula (2-2) may be the same or different;
n is an integer of 2 to 4; and
in the formula (2-2), m 6 are each independently an integer of 0 to 5.

Assignees

• Mitsubishi Gas Chemical Co

Inventors

• Echigo Masatoshi
• Yamakawa Masako

Classifications

• C07C39/17

  containing other rings in addition to the six-membered aromatic rings {, e.g. cyclohexylphenol} · CPC title

• G03F7/0045

  with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors · CPC title

• C07C2601/14

  The ring being saturated · CPC title

• C07C37/20 Primary

  using aldehydes or ketones · CPC title

• C07C2601/10

  the ring being unsaturated · CPC title