Substrate processing apparatus
US-2024269862-A1 · Aug 15, 2024 · US
US9539729B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9539729-B2 |
| Application number | US-201514724906-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 29, 2015 |
| Priority date | May 30, 2014 |
| Publication date | Jan 10, 2017 |
| Grant date | Jan 10, 2017 |
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Official abstract text for this publication.
According to one embodiment, a conveying apparatus includes a finger unit, a drive belt, a first belt and a transfer belt. The finger unit includes first and second rotation units, and a projecting tip. The drive belt includes one end fixed to the finger unit and moves the finger unit in a movement direction. The first belt is provided on a first surface of the drive belt and includes one end folded at the first rotation unit to be away from the first surface and fixed to a first support unit. The second belt is provided on a second surface of the drive belt opposed to the first surface and includes one end folded at the second rotation unit to be away from the second first surface and fixed to the first support unit.
Opening claim text (preview).
What is claimed is: 1. A conveying apparatus, comprising: a first support unit; a finger unit that includes a first rotation unit and a second rotation unit; a drive belt that includes one end fixed to the finger unit and moves the finger unit in a direction of movement; a first transfer belt that is provided on a first surface of the drive belt and includes one end folded at the first rotation unit to be away from the first surface and fixed to the first support unit; and a second transfer belt that is provided on a second surface of the drive belt opposed to the first surface and includes one end folded at the second rotation unit to be away from the second surface and fixed to the first support unit, wherein the first transfer belt and the second transfer belt move together with the drive belt when the drive belt moves in the direction. 2. The apparatus according to claim 1 , wherein an object to be conveyed is transferred onto the first transfer belt by the finger unit going under the object or into the object while accompanying the drive belt. 3. The apparatus according to claim 1 , further comprising an engagement unit that is arranged at the first support unit and engaged with the finger unit, wherein the finger unit is engaged with the engagement unit after an object to be conveyed is transferred onto the first transfer belt. 4. The apparatus of claim 3 , further comprising: a sensor that generates a sensor signal for detecting engagement between the finger unit and the engagement unit; and a controller that halts driving of the drive belt in accordance with the sensor signal. 5. The apparatus according to claim 3 , wherein at least a part of the finger unit is made of iron, and the engagement unit is an electromagnet. 6. The apparatus according to claim 1 , further comprising: a second support unit that is opposed to the first support unit; and an engagement unit that is provided on the second support unit and engaged with the finger unit after an object to be conveyed is transferred onto the first transfer belt. 7. The apparatus according to claim 1 , wherein the finger unit includes a suction mechanism. 8. The apparatus according to claim 1 , wherein another end of each of the drive belt, the first transfer belt and the second transfer belt is wound and energized to make torque work in a direction of rewinding the drive belt, the first transfer belt and the second transfer belt. 9. The apparatus according to claim 1 , wherein the direction of movement is a direction that the finger unit moves.
having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title
Devices for picking-up and depositing articles or materials · CPC title
Touching devices, e.g. pressure-sensitive · CPC title
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