Lamp for rapid thermal processing chamber

Patent metadata

Field	Value
Publication number	US-9536728-B2
Application number	US-67515007-A
Country	US
Kind code	B2
Filing date	Feb 15, 2007
Priority date	Feb 15, 2007
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A lamp assembly for the lamp assembly adapted for use in a substrate thermal processing chamber to heat the substrate to temperatures up to at least about 1100° C. is disclosed. In one embodiment, the lamp assembly comprises a bulb enclosing at least one radiation generating filament attached to a pair of leads, the bulb having an inner surface and an outer surface, a lamp base configured to receive the pair of leads and at least a portion of the bulb having a surface treatment adapted to reflect light away from the lamp base. In another embodiment, a sleeve covers the lamp base, which has a cross-sectional area less than about 1.2 times the cross-sectional area of the bulb.

First claim

The invention claimed is:

1. A lamp assembly for use in rapidly heating a substrate in a thermal processing chamber comprising:
a quartz bulb enclosing at least one radiation generating filament attached to a pair of electrical connectors, the bulb having an interior surface containing a halogen gas and an exterior surface;
a lamp base including the pair of electrical connectors, at least a portion of the bulb having a surface treatment extending from the lamp base on a lower portion of the bulb comprising a diffuse scattering component on the interior surface, such that when the lamp assembly is placed in an array to rapidly heat the substrate to temperatures up to at least 1100° C., the coating minimizes movement of radiation towards the lamp base and the bulb can withstand rapid temperature changes in the rapid thermal processing chamber.

2. The lamp assembly of claim 1 , wherein the surface treatment further comprises a coating on the exterior surface of at least the lower portion of the bulb, the coating selected from the group consisting of aluminum, gold, silver, boron nitride, and combinations thereof.

3. The lamp assembly of claim 2 , wherein the coating comprises high temperature paint.

4. The lamp assembly of claim 1 , wherein the surface treatment comprises a coating selected from the group consisting of powdered silica, alumina, zircon, and combinations thereof.

5. The lamp assembly of claim 1 , wherein the surface treatment comprises an acid treatment to impart a rough surface to the interior surface of the bulb, the rough surface adapted to scatter light away from the base and to minimize the movement of radiation towards the lamp base.

6. The lamp assembly of claim 1 , wherein the surface treatment comprises a layer of sintered powder material on the interior surface to scatter light away from the base and to minimize the movement of radiation towards the lamp base.

7. The lamp assembly of claim 6 , wherein the sintered powder material comprises powdered quartz, alumina, or mixtures thereof.

8. The lamp assembly of claim 7 , wherein the sintered powder material is mixed with a binder.

9. The lamp assembly of claim 1 , wherein the surface treatment comprises a poured internal reflecting material.

10. The lamp assembly of claim 1 , further comprising a sleeve enclosing the lamp base, the sleeve having a cross-sectional area that is less than 1.2 times the cross-sectional area of the bulb.

11. The lamp assembly of claim 10 , wherein the cross-sectional area of the sleeve is less than 0.95 times the cross-sectional area of the bulb and the lamp base and the sleeve are substantially similar in cross-sectional shape.

12. The lamp assembly of claim 10 , wherein the cross-sectional area of the sleeve is less than 0.42 times the cross-sectional area of the bulb.

13. The lamp assembly of claim 1 , the assembly is sleeveless in construction.

14. A lamp assembly for rapid thermal processing comprising:
a quartz bulb enclosing at least one coil attached to a pair electrical connectors, the bulb having an inner surface containing a halogen gas and an outer surface;
a lamp base including the pair of electrical connectors; and
a sleeve surrounding the lamp base, the sleeve having a cross-sectional area that is less than 0.95 times the cross-sectional area of the bulb, the lamp assembly adapted for use in a substrate thermal processing chamber to heat the substrate to temperatures up to at least 1100° C.

15. The lamp assembly of claim 14 further comprising a reflective coating extending from the lamp base on at least a portion of the bulb.

16. The lamp assembly of claim 15 , wherein the reflective coating is located on the exterior surface of at least a lower portion of the bulb, the coating being selected from the group consisting of gold, silver, boron nitride, powdered silica, powdered alumina, powdered zirconia and combinations thereof.

17. The lamp assembly of claim 14 , further comprising a diffuse scattering component extending from the lamp base on the interior surface of the bulb.

18. The lamp assembly of claim 17 , wherein the diffuse scattering component comprises a roughened surface.

19. The lamp assembly of claim 17 , wherein the diffuse scattering component comprises a sintered powder selected from boron nitride, silver, silica, zirconia, alumina and combinations thereof.

Assignees

• Ranish Joseph M
• Sorabji Khurshed
• Applied Materials Inc

Inventors

• Ranish Joseph M
• Sorabji Khurshed

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H01K7/00

  Lamps for purposes other than general lighting (H01K9/00 - H01K13/00 take precedence) · CPC title

• H01K1/58

  Cooling arrangements · CPC title

• H01K1/46

  supported by a separate part, e.g. base, cap · CPC title

• H01K1/325

  Reflecting coating · CPC title