Light-emitting device and light source apparatus

Patent metadata

Field	Value
Publication number	US-10651027-B2
Application number	US-201916507251-A
Country	US
Kind code	B2
Filing date	Jul 10, 2019
Priority date	Jul 12, 2018
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A light-emitting device includes: a substrate having a groove extending in a first direction and a first surface and a second surface respectively arranged to sandwich the groove in a second direction; a first electrode provided on the first surface; a second electrode provided on the second surface; a graphite thin film provided on the first electrode and the second electrode and extending from the first electrode to the second electrode along the second direction in such a way as to be astride the groove; a third electrode provided on the graphite thin film in such a way as to be opposite the first electrode via the graphite thin film; and a fourth electrode provided on the graphite thin film in such a way as to be opposite the second electrode via the graphite thin film.

First claim

What is claimed is:

1. A light-emitting device comprising:
a substrate having a groove extending in a first direction and a first surface and a second surface respectively arranged to sandwich the groove in a second direction crossing the first direction;
a first electrode provided on the first surface;
a second electrode provided on the second surface;
a graphite thin film provided on the first electrode and the second electrode and extending from the first electrode to the second electrode along the second direction in such a way as to be astride the groove;
a third electrode electrically connected to the first electrode and provided on the graphite thin film in such a way as to be opposite the first electrode via the graphite thin film; and
a fourth electrode electrically connected to the second electrode and provided on the graphite thin film in such a way as to be opposite the second electrode via the graphite thin film.

2. The light-emitting device according to claim 1 , wherein the graphite thin film is multilayer graphene the number of layers of which ranges from 50 to 2000.

3. The light-emitting device according to claim 1 , wherein one end on the groove side of the first electrode is situated further on the groove side than one end on the groove side of the third electrode; and
one end on the groove side of the second electrode is situated further on the groove side than one end on the groove side of the fourth electrode.

4. The light-emitting device according to claim 1 , wherein the first electrode extends at least to a border line between the first surface and the groove; and
the second electrode extends at least to a border line between the second surface and the groove.

5. The light-emitting device according to claim 1 , wherein the substrate has a base member formed of silicon, and an oxide layer formed of a material containing an oxide; and
the oxide layer is arranged at least between the base member and the first electrode and between the base member and the second electrode.

6. The light-emitting device according to claim 1 , wherein the third electrode and the fourth electrode respectively have an outermost surface layer, and an intermediate layer arranged between the outermost surface layer and the graphite thin film; and
the resistance value of the outermost surface layer is smaller than the resistance value of the intermediate layer, the first electrode, and the second electrode.

7. The light-emitting device according to claim 6 , wherein the outermost surface layer is formed of gold;
the intermediate layer includes a first layer formed of titanium and a second layer formed of platinum;
the first layer is provided on the graphite thin film; and
the second layer is arranged between the first layer and the outermost surface layer.

8. The light-emitting device according to claim 1 , wherein the first electrode and the second electrode respectively have a third layer formed of titanium and a fourth layer formed of platinum;
the third layer is provided on the substrate; and
the fourth layer is arranged between the third layer and the graphite thin film.

9. A light source apparatus comprising: a light-emitting device according to claim 1 ; and
a package having a light-transmitting window and forming an inner space maintained in a vacuum state,
wherein the light-emitting device is arranged in the inner space of the package.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Nagata Takaaki
• Fujii Takeo
• Suyama Motohiro

Classifications

• H01K1/28

  Envelopes; Vessels · CPC title

• H01K1/10

  Bodies of metal or carbon combined with other substance · CPC title

• H01K7/00

  Lamps for purposes other than general lighting (H01K9/00 - H01K13/00 take precedence) · CPC title

• H01K1/06 Primary

  Carbon bodies · CPC title

• H01K1/18

  Mountings or supports for the incandescent body · CPC title